H_75nm_L1_65um_D_10um

163571262066827e 5 13380324795773715e 4 0

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Unformatted text preview: 4+9.479923971521491E-5i -1.3928363626026222E-4 -1.1234082154763511E-5 -1.4146919952504563E-6 7.5818273968936145E-6-2.2588092385644743E-6i -2.6267918303367403E-4+3.595821287656342E-5i -3.750742309208136E-4+9.00099000811427E-5i -1.3885512699313412E-4 -1.3454777442685259E-5 0 9.587404164277993E-6-2.8264723998643513E-6i -2.87971644576976E-4+4.2506507796468675E-5i -3.309141070465191E-4+8.699970722891595E-5i -1.4176102862188396E-4 -1.3253485922813587E-5 0 6.63834718520844E-6-2.0175238770974476E-6i -2.864836777955715E-4+4.1481455595597915E-5i -3.3323026397977424E-4+8.715670817714257E-5i -1.0364557139197936E-4 -1.737988515631717E-5 -3.887425223725201E-6 1.2013532551387536E-4-3.3243230101666575E-5i -3.158450304240728E-4+6.589763160555331E-5i -2.762330062434388E-4+7.271920602804526E-5i -1.0476192772726485E-4 -1.928877122745223E-5 0 1.3044318519805088E-4-3.689244619562992E-5i -3.598333483728532E-4+7.681938457674148E-5i -2.4464920572071016E-4+7.076063081771465E-5i -9.953407617931635E-5 -2.4549217025795716E-5 0 2.0068926719982194E-4-5.664963284030336E-5i -3.260920213876624E-4+7.481424315789338E-5i -1.5163986491983298E-4+4.6178744968314905E-5i -9.660419060207893E-5 -1.935899262933313E-5 -7.595450892383829E-6 1.7386577140330762E-4-4.6637636033702974E-5i -2.710961724445787E-4+5.975377004677508E-5i -2.0251954991197836E-4+5.149447854708473E-5i -1.0663728774959E-4 -7.77389075485053E-5 0 7.152910182373369E-5-2.287153611636797E-5i -6.969476256275114E-5+1.990379107775775E-5i -5.053915193177049E-6+3.1249111361258336E-6i -1.045815953740923E-4 -8.129976996886698E-5 -6.1203116695170894E-6 6.072398502882875E-5-1.8849613549309468E-5i -5.827593968887082E-5+1.6365697177938834E-5i -9.380101181730024E-7+1.3848047272781478E-6i -1.1203025237140258E-4 -8.1129980396184E-5 0 5.851284736255306E-5-1.9088993765393646E-5i -7.171375726519602E-5+2.08631727213168E-5i -9.117224880795518E-6+4.746074673034219E-6i -1.146954305530679E-4 -8.845171711781303E-5 0 4.6388851776851014E-5-1.5289004201699412E-5i -6.419131747532677E-5+1.9085998517175876E-5i -7.081363110142396E-6+3.832381715489868E-6i -1.0745759735034745E-4 -9.073531355720173E-5 -6.350671808751949E-6 4.649618339694622E-5-1.4601060724971258E-5i -5.084146450248287E-5+1.4651306602962819E-5i -2.233052725524679E-7+9.486176507708796E-7i -1.0230433345780727E-4 -7.273967705178684E-5 -6.146657203208269E-6 7.577751715733753E-5-2.3195023760418675E-5i -6.694029348593897E-5+1.8290423132599836E-5i -2.0010031309425026E-6+1.886855259405552E-6i -1.0587367052745689E-4 -7.024569854274642E-5 0 8.513737719400926E-5-2.7006184592464295E-5i -8.200147123676452E-5+2.2886255068873118E-5i -9.130968808208835E-6+4.7925971236384675E-6i -1.0944071197559054E-4 -7.466285729369683E-5 -5.829371781148904E-6 6.370279240682806E-5-2.0038517722315648E-5i -7.454213644112385E-5+2.0744657667688402E-5i -1.1650773132205233E-5+5.366011076992109E-6i -1.1395942742369005E-4 -7.49805341450956E-5 0 6.30284349687366E-5-2.0617923876339072E-5i -8.489706014265275E-5+2.4349385871070756E-5i -1.6023...
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This document was uploaded on 01/24/2014.

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