H_75nm_L1_65um_D_10um

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Unformatted text preview: 08E-7i 3.0E-4 1.854301772384804E-5 -1.7789203819179787E-5 6.496690073261551E-8-1.3722998747008938E-8i 2.405365162053212E-9-5.723594622694195E-10i 4.851055505199453E-7-1.1466944804598058E-7i 3.0E-4 3.4419671992382465E-5 -1.324018965455531E-5 4.812935971881812E-8-1.0370893749707735E-8i 3.83616275600709E-9-8.574716852679831E-10i 4.840922375421194E-7-1.1417984663800734E-7i 3.1485609703111824E-4 2.4663322766942023E-5 -3.170323456703525E-5 9.747871756520414E-8-2.1344468953147242E-8i 5.17590092185999E-9-1.160990931613186E-9i 4.2827827750862795E-7-1.0349431615033741E-7i 3.0E-4 4.682609410465277E-5 -1.4979094955664817E-5 5.3798693561304E-8-1.1444730770977785E-8i 5.682957998697376E-9-1.2681312538482523E-9i 4.79502058654222E-7-1.1327759083826429E-7i 3.184533843685879E-4 -2.6615510887886644E-6 -1.4144611590163586E-5 4.313923573080989E-8-9.871762551426711E-9i -8.952203192618775E-11+4.189041485109327E-11i 4.280470017943636E-7-1.0276076576310389E-7i 2.999999999999999E-4 8.93014747289845E-6 0 1.4842519070038368E-9-1.232725814037356E-9i -3.698830894142224E-11-2.9455196547023186E-12i 4.910862153580094E-7-1.1542930799979057E-7i 3.285276652633833E-4 2.7890512087921986E-5 -6.296487728695158E-5 1.6009312898070284E-7-3.667735215212003E-8i 9.597718128770331E-9-2.1619196658318186E-9i 3.6305452247169603E-7-9.026486264943944E-8i 3.0000000000000003E-4 2.674927477569079E-5 0 1.9241582395980367E-9-1.2476767622297332E-9i 3.056876312472477E-10-8.794080502251706E-11i 4.881882675947161E-7-1.1483120907279512E-7i 3.1312241981962843E-4 2.2104620667402348E-5 -6.4405597737479965E-6 2.149452705581496E-8-5.278083403912588E-9i 9.319374981468338E-10-2.341152170790803E-10i 4.448582383679027E-7-1.0613927587149709E-7i 3.313622089545164E-4 -2.2760566901811534E-5 -3.356169208430026E-5 8.731189237815647E-8-1.99270270360815E-8i -4.1660764318048665E-9+9.367186944878728E-10i 3.8121210408123254E-7-9.314267177003154E-8i 1.88032181917253E-4 1.7574598616444326E-4 0 1.93984497809912E-9-1.406620473833295E-9i 2.0099436588365882E-9-2.4698232879212645E-9i 8.498042759052891E-7-1.8318874801794736E-7i 1.837328564836862E-4 1.8436094424812335E-4 0 1.8712611121485216E-9-1.6212687390521063E-9i 2.3875524275366925E-9-2.0199086055874684E-9i 8.330328179809965E-7-1.8869556165213565E-7i 2.044153137909921E-4 1.7076559172168334E-4 6.462734249595578E-6 -3.813113485210848E-8+4.3101769634897635E-9i -2.9362251022385167E-8-5.004780904172023E-9i 7.679613651554559E-7-1.6560737185650908E-7i 1.965042818384266E-4 1.74382742270796E-4 0 1.306435832191147E-9-1.581956140215278E-9i 1.2209238204327811E-9-2.906195871184275E-9i 8.036965771624783E-7-1.7278345734194012E-7i 1.9503409255714003E-4 1.6892067444131457E-4 4.64100127742311E-6 -2.9990226261233284E-8+3.099885937629164E-9i -2.743060793044967E-8-6.856888849073261E-9i 8.397006065845377E-7-1.7348704159255732E-7i 2.0289413316299724E-4 1.8365816007512412E-4 0 1.2790284525869184E-9-1.5341535051246124E-9i 9.33119719843842E-10-2.201207516736483E-9i 7.276855254646088E-7-1.6591531301268534E-7i 2.1...
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This document was uploaded on 01/24/2014.

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