H_75nm_L1_65um_D_10um

1968952996292588e 4 0 24102720931391894e

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Unformatted text preview: 999996E-6 0 3.863208033885438E-9-9.495072964016798E-9i -1.8885648126483034E-7+3.782770851023841E-8i 2.873464587849067E-6-8.165791072145544E-8i 1.4009225347960414E-4 -4.144765640779545E-6 1.4085595329195824E-7 1.0859253277899304E-8+1.2658200066538558E-8i -1.014356610488671E-7-3.833871754543825E-8i 2.6864661352585806E-6-2.1803015246368317E-7i 1.4476019512317583E-4 -3.266748598000326E-6 0 -4.445507881998714E-9-6.741360873311697E-9i 4.8043160791103064E-8+2.4238930227004552E-8i 2.446693249771412E-6-2.7512038648279773E-7i 1.4564896608782246E-4 -4.9999999999999996E-6 0 2.013458582775125E-8-1.4299241411032176E-9i -1.6696527608824342E-7+3.705814642584656E-8i 2.7500260485906157E-6-6.128438174357352E-8i 1.4523781592114282E-4 -4.15039444295539E-6 8.289697276262505E-8 2.9436539993087443E-8+2.082139783619885E-8i -8.054750487055491E-8-2.1875856779069813E-8i 2.5529468009471888E-6-1.9965849898631074E-7i 1.42740645116818E-4 -3.0521285954180028E-6 0 2.0225337225424414E-9-9.173940868803708E-10i 2.0546776552757796E-8+1.459476237295802E-8i 2.4789394144543626E-6-2.915510765665052E-7i 1.4632938185281884E-4 -3.646402119494006E-6 0 -2.3311640836466253E-11-1.1654602999063476E-10i 1.0862307202352116E-8+1.081844868992649E-8i 2.4355744184330814E-6-2.518177479559343E-7i 1.4221604644755738E-4 4.9999999999999996E-6 0 -3.263032608924552E-9-2.2843064815191664E-9i 2.3353434077541522E-7-3.7995206283902445E-8i 2.8506232401773364E-6-7.089325440302581E-8i 1.4143006303347807E-4 3.6548130018861525E-6 0 7.138714691713166E-9+9.57855537984005E-10i -1.16567532120315E-8-7.043677883356791E-9i 2.574471190155019E-6-2.6384728976973784E-7i 1.560751862726377E-4 4.9999999999999996E-6 7.5E-8 1.9380255472446704E-10-2.4101779480801707E-9i 6.758634804466477E-8+1.1290603564123785E-7i 2.5429441671536328E-6-5.972055779444054E-8i 1.5434361637554453E-4 4.999999999999999E-6 7.500000000000002E-8 -1.0676200246093372E-8-3.54015654829843E-9i 1.0679226962087124E-7+1.0768222537799198E-7i 2.5456615106757684E-6-8.00424301630711E-8i 1.560684953793074E-4 5.0E-6 0 1.853358667051112E-8+1.9621201498745344E-9i 1.5317599593957175E-7-2.508929370784389E-8i 2.47571232333072E-6-5.165144189818153E-8i 1.556411375762361E-4 4.137741651769677E-6 9.108002064508743E-8 2.6645632042595832E-8+1.982839812207551E-8i 5.6772890103060775E-8+2.1593461811380134E-8i 2.311960657156017E-6-1.6285229680075615E-7i 1.5433693926283863E-4 4.999999999999999E-6 0 -5.191543048539959E-10+1.6177943407237433E-9i 1.562150469328641E-7-2.3212005061334124E-8i 2.525914774229856E-6-5.798651291430293E-8i 1.5261204647845132E-4 4.9999999999999996E-6 7.500000000000002E-8 -8.09638236871454E-10+1.0704240274071183E-10i 9.823732032448012E-8+1.0270032903895799E-7i 2.5916118808550486E-6-8.105493155244138E-8i 1.5347689221698556E-4 3.1730000680414434E-6 0 5.157967024229442E-9+1.7782904957467293E-10i -1.5683226737295784E-8-1.1755097652504169E-8i 2.2147368931264684E-6-2.563584566843101E-7i 1.4993520150320683E-4 -3.2810163734511768E-6 0 -5.163396296507442E-9-6.977436403368938E-9i 3.81126...
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