H_75nm_L1_65um_D_10um

197793218397718e 7 6334331659462825e 7

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Unformatted text preview: 85506E-5i -1.5700945475339136E-5+3.774137572808134E-6i 1.6222968227199965E-4-4.2062348485760585E-5i -7.135405105804886E-5 4.484708602467658E-5 0 6.982101656182599E-6-1.7453954216390538E-6i 9.26924283808396E-7-2.44352204817333E-7i 2.0147590396035644E-4-5.0902633732422654E-5i -7.076088907152138E-5 4.148934930553945E-5 2.340147935076543E-6 -3.905732416812376E-5+9.80680076466644E-6i -1.3951023504822799E-5+3.2612466313913204E-6i 1.9439697826818686E-4-4.894024791636488E-5i -6.836517415461941E-5 4.3317049300464216E-5 0 1.4892424227772796E-6-3.9837206772757644E-7i 1.7044976950779578E-7-6.559330611037331E-8i 1.6131000334586285E-4-4.066287851546336E-5i -7.091850598130491E-5 4.596588415829808E-5 2.441721713502285E-6 -3.699398306498851E-5+9.349041495042287E-6i -1.1678145033780134E-5+2.7493468690864128E-6i 1.7252231394825548E-4-4.3798328856886373E-5i -7.192862031568304E-5 4.222684460135058E-5 0 2.6773226804339967E-6-6.804597242650312E-7i -7.436958545520289E-9-2.085615298519361E-8i 2.2492630598726707E-4-5.660253416978067E-5i -7.355627743055048E-5 4.179846919470009E-5 9.210122165886453E-7 -4.5319675357312E-5+1.1080941104357755E-5i -7.845513095540695E-6+1.8141439847357485E-6i 2.7100380559561855E-4-6.816346247725917E-5i -6.7188040900772E-5 5.210121223342537E-5 2.72872911829565E-6 -1.7655294791440986E-5+4.558886231331617E-6i -7.81485404789818E-6+1.8504836013519304E-6i 1.1475661838952048E-4-2.9354744366767417E-5i -7.115196407774542E-5 4.955561148708111E-5 0 2.025800389640471E-6-5.31185907909398E-7i 6.092019726043172E-7-1.6922271879679057E-7i 1.7182482679736264E-4-4.3783214495859914E-5i -7.201879841488348E-5 5.050489481064125E-5 3.464799204811832E-6 -5.296334399172163E-5+1.3510773297562948E-5i -1.5038555309758682E-5+3.5824614667789503E-6i 1.531927592025108E-4-3.9296793709464646E-5i -7.2026024434429E-5 4.701620919381727E-5 0 3.4431343533425364E-6-8.861181515107397E-7i 2.9950714178998E-7-9.6403908116105E-8i 2.0058826054786873E-4-5.088195587774846E-5i -7.332097070274112E-5 4.710499184094038E-5 2.771972632749887E-6 -7.356544681056224E-5+1.847881297835911E-5i -1.638091772030696E-5+3.87468071966514E-6i 1.9193871948758578E-4-4.900629352751335E-5i -7.358961039556679E-5 4.9611966570287726E-5 1.3866245315142423E-6 -4.5778384227290976E-5+1.1449063741938992E-5i -9.144694785688284E-6+2.150759497607987E-6i 2.1183309248866132E-4-5.4089380842105394E-5i -6.924204878172653E-5 4.7064301744901115E-5 0 7.604421854388402E-7-2.2525082851836595E-7i 2.487955593619877E-7-8.907699616242165E-8i 1.5573181041964035E-4-3.9530754454659055E-5i -7.499999999999998E-5 5.2559283170457775E-5 7.5E-8 -7.451446437643268E-5+1.717977199260808E-5i 1.1038906941372562E-6-2.8811977346767287E-7i 3.5598518177625384E-4-8.928020256521212E-5i -7.408512864506745E-5 5.2298638201483854E-5 1.080109020725974E-6 -5.212072140885845E-5+1.2845463631674295E-5i -6.804963337525881E-6+1.6091854710338691E-6i 2.230408953482231E-4-5.696560676658639E-5i -7.411702043805147E-5 5.3135094398608456E-5 9.415366291868609E-8 -1.7881461042847...
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