H_75nm_L1_65um_D_10um

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Unformatted text preview: 7685847554E-7i 1.037893552407202E-6-3.1914996979973806E-7i 1.828436863651916E-4 1.392494088717813E-4 0 7.715380771958879E-8+3.254774245922119E-8i 2.615318147553626E-7+1.1154503468032355E-7i 8.717609714950787E-7-2.8593203985653534E-7i 1.6556196632861356E-4 1.4347995363653347E-4 -3.118264597520189E-6 7.019955465090896E-8+1.0398524104557294E-8i 3.1830781492508386E-7+1.2849277583260717E-7i 1.0534678614904117E-6-2.9589966439723134E-7i 1.7131238435938459E-4 1.3898014220882837E-4 0 6.496820067871182E-8+2.7658570695733575E-8i 3.054974846899115E-7+1.2926084047345381E-7i 9.509038611920391E-7-3.1852775340549223E-7i 1.6813667237173966E-4 1.3695903671564276E-4 0 6.784171070513559E-8+2.9063872000408975E-8i 3.036996990905211E-7+1.272070479442372E-7i 9.626998496235006E-7-3.3824157333221985E-7i 1.6944785965168968E-4 1.4125308638320756E-4 -3.0652341319198987E-6 7.93093414844328E-8+1.5088676700845787E-8i 2.999191624789772E-7+1.2000540220496633E-7i 1.0003880587181337E-6-3.0093182885325636E-7i 1.7475475279086935E-4 1.4119400432043307E-4 0 5.998379689871672E-8+2.5418436103229963E-8i 3.066744352277651E-7+1.3148052258960333E-7i 9.420117215122776E-7-2.965794403903396E-7i 1.727298874984672E-4 1.4489757211302599E-4 -4.728457136927613E-6 8.24037981427511E-8+7.573227794957286E-9i 2.812982616587026E-7+1.0989834544338385E-7i 1.012931387213654E-6-2.6439401592971507E-7i 1.781877269200394E-4 1.404374245794007E-4 0 6.696223317968809E-8+2.8292065340802734E-8i 2.87323493495216E-7+1.2286819813227962E-7i 9.112236510440123E-7-2.9192875070793734E-7i 1.7510678190733048E-4 1.409428221400188E-4 -4.264154076646467E-6 9.352969775582918E-8+1.506946220757507E-8i 2.7001164442274906E-7+1.0485730817495512E-7i 9.594513925555608E-7-2.848524853459767E-7i 1.750239028443954E-4 1.3806341625594744E-4 0 7.255727758150418E-8+3.070646910872943E-8i 2.860677623216003E-7+1.2074940489063206E-7i 9.18478775460732E-7-3.123683400727022E-7i 1.7944603110734195E-4 1.4210842796336462E-4 -4.351157409753294E-6 9.249511467927E-8+1.5412651191147604E-8i 2.561331786592056E-7+1.000312061720643E-7i 9.355910708831622E-7-2.6765169247238846E-7i 1.509846513879996E-4 1.4273938909379255E-4 0 3.1545851084964206E-8+1.4532933890032532E-8i 3.894422990567413E-7+1.6809366372039445E-7i 1.1610573900692344E-6-3.5510877804082293E-7i 1.4794819856407814E-4 1.4540961914908087E-4 -1.799355029244782E-6 4.1572843931128E-8+4.934241565246515E-9i 3.872670711764319E-7+1.629986569065328E-7i 1.2385402212744511E-6-3.3282412491526867E-7i 1.4770952911542331E-4 1.4259881458957108E-4 0 2.7906642320431083E-8+1.3278087091888676E-8i 3.9525965785500573E-7+1.707094991726999E-7i 1.1909830501822095E-6-3.677723795226243E-7i 1.4011698021648225E-4 1.4719812779511354E-4 -1.8598279114675051E-6 3.355817544899027E-8-4.8481812115989724E-11i 4.053297115992934E-7+1.7249102676529784E-7i 1.352461262053438E-6-3.3725677595174993E-7i 1.3893871899098726E-4 1.46230726459186E-4 0 1.3059718305542969E-8+6.635121277358364E-9i 4.3666434475464434E-7+1.9381549217627595E-7i 1.3349374834178242E-6-3...
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This document was uploaded on 01/24/2014.

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