H_75nm_L1_65um_D_10um

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Unformatted text preview: 5692E-4 0 1.1537682178160523E-9-2.7636710260286567E-9i 4.820586259841065E-10-4.3364959903979414E-10i 6.506576559056677E-7-1.3618802535547462E-7i 2.5016033729588315E-4 1.3007962569714935E-4 -6.476323489758027E-6 3.6405356395101624E-8-5.480309978220211E-9i 1.2773532420185165E-8-1.3699694438809997E-9i 6.209202887232982E-7-1.3457513395092461E-7i 2.4852322460414735E-4 1.1401356166310091E-4 0 1.0594861136580934E-9-2.6418224564601998E-9i 2.3079430567737348E-10-3.7538451534485305E-10i 6.623163084891631E-7-1.3685008166745806E-7i 2.5193249490526137E-4 1.1575619167697382E-4 -7.686200275842174E-6 4.585834968756887E-8-5.575479734381815E-9i 1.3524941760555578E-8-1.4449593086746449E-9i 6.352193560359305E-7-1.3602427995861022E-7i 2.4879725054765655E-4 1.5549718600814155E-4 0 1.164209488027457E-9-2.251383336595962E-9i 5.465761415996629E-10-1.0821615646310375E-9i 5.789281510272107E-7-1.318484329768958E-7i 2.45628114223467E-4 1.6022986741584479E-4 -8.992382156212784E-6 4.106764008485716E-8-8.244726182178626E-9i 1.9460948917269218E-8-2.7565599403352447E-9i 5.807443419999488E-7-1.332141934479011E-7i 2.5091192230811203E-4 1.4326101870674497E-4 0 1.026966249097191E-9-2.419006147072864E-9i 3.5734064193084235E-10-8.130516191423084E-10i 5.937529360336533E-7-1.3224251966552356E-7i 2.539928933764367E-4 1.5243566481945483E-4 -6.875094314903599E-6 3.0689010639308415E-8-6.514937840814176E-9i 1.313769254346869E-8-2.1487469342730594E-9i 5.607572349767301E-7-1.2887352242431187E-7i 2.456694938488892E-4 1.3757127480153273E-4 -9.896919601967678E-6 5.6212527113159585E-8-7.0712313626828206E-9i 2.1828705416316192E-8-1.6910069588188215E-9i 6.263920450432891E-7-1.3671657473515563E-7i 2.6065483603467847E-4 1.1861474884665339E-4 0 2.2850002972282315E-9-1.8938851033359913E-9i 6.117155278788044E-10-3.738408989653868E-10i 5.881014903946251E-7-1.3040052687433693E-7i 2.569538842020936E-4 1.3280935549290536E-4 0 1.4087414243527774E-9-2.088647503384431E-9i 4.391158865812323E-10-5.626424523687149E-10i 5.827374178127993E-7-1.303666678647208E-7i 2.561374495827796E-4 1.290371941232642E-4 -1.2412510432179658E-5 6.127339627827439E-8-9.532104842502106E-9i 2.094596573193705E-8-2.6108831226097145E-9i 5.876385284173458E-7-1.3199051194983454E-7i 2.5452316780106454E-4 1.416929586119744E-4 -9.406841949270344E-6 4.4183414460000875E-8-7.917709906627524E-9i 1.704938448624881E-8-2.305944926948377E-9i 5.76260112562472E-7-1.305127260386515E-7i 2.490157519959143E-4 8.49653017509566E-5 0 1.4017171342205464E-9-2.3139213952158155E-9i 2.9158074314854955E-10-1.3999048095369555E-10i 7.045453818899906E-7-1.4056663659744023E-7i 2.5005376826161597E-4 7.902083731333759E-5 -1.188614912317914E-5 8.359542286168344E-8-6.059620265119402E-9i 1.3878983869524786E-8-2.1985686970096848E-9i 6.931264914612375E-7-1.4419797835060232E-7i 2.552987299259841E-4 8.888889258101929E-5 -1.1657891186620367E-5 7.192161462878532E-8-7.602929477131389E-9i 1.4554042838691982E-8-2.1350923656391306E-9i 6.506310958114776E-7-1.3936364363029676E-7i 2.588324838836668E-4...
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This document was uploaded on 01/24/2014.

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