H_75nm_L1_65um_D_10um

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Unformatted text preview: 5313E-5i 6.3683857222326244E-6 -6.70065769207046E-6 -1.8239629407745048E-6 6.282057835090726E-6-1.524404000995742E-6i -1.145465823738825E-6+2.674050641962809E-7i 4.7452594324061806E-5-1.1312522351668695E-5i 9.85697540413656E-6 -1.2218117367927388E-5 -1.1354416579492548E-6 2.3362951496321916E-6-5.870122371084074E-7i -6.464351504314829E-7+1.2460512946089086E-7i 3.537827517283767E-5-8.47685131802949E-6i 1.4471136095226705E-5 -1.3961181159002246E-5 -1.559497548382583E-6 2.0308143256295122E-6-5.015273857199212E-7i -5.512894051484663E-7+1.0160308767980311E-7i 2.725623963983296E-5-6.55732239679523E-6i 1.1999300201084863E-5 -1.2999978791224658E-5 -1.4064177567589382E-6 2.297756548063342E-6-5.699496224457476E-7i -6.31311033259468E-7+1.1605758446660348E-7i 3.116142470154413E-5-7.480484961977901E-6i 2.066329973715636E-5 -1.3797371926606907E-5 0 2.2508356851390816E-8-1.6294722378843118E-8i -1.29245281024123E-8-4.486363511015575E-9i 2.1018614866101662E-5-5.049762530270576E-6i 7.31123966482363E-6 -1.2793624752004454E-5 0 8.734379271279138E-8-5.1184577341953016E-8i -5.193498594567125E-8+6.9099221647827246E-9i 4.072643774689343E-5-9.739598978481665E-6i 1.147306918350436E-5 -1.4293800490358102E-5 0 2.38018855099256E-8-2.778408789624413E-8i -3.385310483877459E-9-1.1723259475740025E-8i 3.1537481335778784E-5-7.5715239979969484E-6i 9.294258004806887E-6 -1.4261253596882078E-5 0 8.608660353787904E-8-4.5689718753897946E-8i -2.221556597125261E-8-2.392810936737465E-9i 3.5333613957215344E-5-8.473123115990583E-6i 9.302722218401106E-6 -1.3630639809677142E-5 -2.0738148025638292E-6 4.112516923117311E-6-1.0000119102298796E-6i -1.3318307574817188E-6+2.9506759624282203E-7i 3.540687195170082E-5-8.49492300711264E-6i 7.589178382270305E-6 -1.3916358691498892E-5 -1.2910130629273047E-6 3.0086663595393204E-6-7.374306391326468E-7i -1.064283288186368E-6+2.4099734029204255E-7i 3.899352992881044E-5-9.339285372567726E-6i 1.0364407648562302E-4 2.839545752809862E-5 -7.495397956455167E-6 2.0138798042514332E-7-1.4547297392008488E-7i -1.463570933049647E-7-8.712285734580999E-8i 2.945936399782973E-6-9.318741593592106E-7i 9.463330290723087E-5 3.386509816935763E-5 -7.176676630689863E-6 1.3512937195173777E-7-2.0791083436350702E-7i -5.50487492930946E-8-6.269994201008927E-8i 3.35575476551575E-6-1.0285916137639083E-6i 9.633688697910798E-5 2.4637387112836454E-5 -7.742495315314144E-6 2.39401629751349E-7-1.8577703902337575E-7i -1.1977630483184855E-7-8.32061512970975E-8i 3.3932040812051245E-6-1.0013498008853837E-6i 5.604006361306483E-6 -9.132521517761017E-6 0 1.7519512234049882E-7-7.915715690895702E-8i -2.609296658976958E-8+5.6380704190987325E-9i 4.871352396935998E-5-1.1607490705392077E-5i 4.410254624206709E-6 -6.040855804755014E-6 0 2.2929502247522743E-7-9.179405854868305E-8i -1.7449052524201824E-8+7.164334569030363E-9i 5.591557127735254E-5-1.3292174688373283E-5i -6.853089222886042E-6 2.6682809171290832E-6 -1.004746322162237E-6 4.064139970916935E-5-9.522255269908338E-6i 3.214800925322586E-6-7.448818562729928E-...
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This document was uploaded on 01/24/2014.

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