H_75nm_L1_65um_D_10um

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Unformatted text preview: 920908627781E-6 -5.24437188263171E-5 3.028658686648437E-7-5.647274555284386E-8i 9.813677458765665E-10-2.9812555065075174E-10i 6.367469800790535E-7-1.5855263460159665E-7i 2.4323671308186103E-4 -3.1949029886633745E-6 -6.928963349398585E-5 4.054309461716346E-7-8.363565328071787E-8i -3.0768032351145447E-9+8.203611952007895E-10i 6.195449959496604E-7-1.615213972262839E-7i 2.592692871392953E-4 -5.044370323240531E-5 -7.482985225762549E-5 3.5029023988036747E-7-7.44292725167114E-8i -4.3494132876155695E-8+9.653468549999873E-9i 5.280616623156045E-7-1.367655971019121E-7i 2.579726438876966E-4 -2.072769135287617E-5 -6.392216556914539E-5 3.244528663919916E-7-6.585095180983278E-8i -1.561337967631954E-8+3.803687174679689E-9i 5.732749371326541E-7-1.4525040434660503E-7i 2.6124861277640444E-4 -3.1670340827517955E-5 -8.007175583554086E-5 3.679383739416326E-7-8.004202088632948E-8i -2.8490956440544317E-8+6.576304807748919E-9i 5.149019362946793E-7-1.337142275136757E-7i 2.384005471505878E-4 -2.0769413601858295E-5 -8.543905028923378E-5 4.874858473450608E-7-1.0762704909239615E-7i -2.5981216266674548E-8+6.293212473156423E-9i 5.784644358096868E-7-1.5548320807375058E-7i 2.566392949354025E-4 1.6488627770314663E-5 -7.42706042128772E-5 3.697299133028118E-7-7.865318370341901E-8i 1.4584210934345582E-8-3.490950605710643E-9i 5.508017850666365E-7-1.4245733245446296E-7i 2.3923988905714955E-4 2.4004756180857093E-5 -8.501780584060947E-5 4.819167235332143E-7-1.0630584346290218E-7i 2.961512268308532E-8-7.082531114652896E-9i 5.759792319017736E-7-1.5470138541772126E-7i 2.5503665180132395E-4 3.811623547507109E-5 -8.529376190072914E-5 4.060305584936801E-7-8.953423689677941E-8i 3.8560965113888115E-8-8.802385089428897E-9i 5.169849220231E-7-1.3619943833474754E-7i 2.574281660056072E-4 -6.643326489232103E-6 -9.416950182535175E-5 4.3247200605002214E-7-9.810989940338938E-8i -7.138230562710187E-9+1.6581775546158202E-9i 4.887508400535046E-7-1.2944162620470446E-7i 2.4921300039510997E-4 -4.831021129152021E-5 -9.540436487705E-5 4.550654392516868E-7-1.0317102633757364E-7i -5.680328728306667E-8+1.2830487208070869E-8i 4.990388304073889E-7-1.33924162513074E-7i 2.6435076254561904E-4 -4.1146474888998306E-5 -1.008852639786754E-4 4.1146487458426703E-7-9.468384853922793E-8i -4.225214608311143E-8+9.588716836606302E-9i 4.442706466821906E-7-1.1775459313573746E-7i 2.486903073366341E-4 -2.903368694420371E-5 -9.806381713542966E-5 4.7565435648742445E-7-1.0874830158558005E-7i -3.553131580118345E-8+8.224878978869784E-9i 4.976602385847707E-7-1.3370589061188198E-7i 2.381729378322993E-4 4.598155395224345E-6 -8.811020849223221E-5 5.025472845136949E-7-1.1229554687814086E-7i 6.347314146615747E-9-1.5181186429128666E-9i 5.718048743293563E-7-1.5402873226548555E-7i 8.224633664252624E-5 1.5585841788193943E-4 -3.0912264383635107E-6 3.853133761570301E-8-3.155036831312155E-8i 1.1272535336618952E-7+1.9646247924133753E-8i 2.2695500347329694E-6-5.017493002991127E-7i 7.508237910751656E-5 1.5103136582459648E-4 -2.801083669441924E-6 1.72838555908411...
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This document was uploaded on 01/24/2014.

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