H_75nm_L1_65um_D_10um

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Unformatted text preview: 6 1.7069065785334888E-7 1.4594033419621208E-8-2.8365270941538984E-9i -8.038679114431368E-8-7.45248409311678E-8i 3.7482318375751283E-6-4.963000904848521E-7i 1.0582295284606022E-4 -4.9999999999999996E-6 0 -2.62838526877993E-9+1.0959555224410982E-8i -2.947196061291006E-7+8.398881224900936E-8i 3.94721959491512E-6-3.471959024122155E-7i 1.075545186391803E-4 -4.9999999999999996E-6 0 1.924931774223813E-9-1.5820700495233102E-8i -2.628945131676908E-7+9.689040261042032E-8i 3.85590057590113E-6-3.295387208126642E-7i 1.058306093935649E-4 -4.999999999999999E-6 7.500000000000001E-8 1.2074529665564567E-8+6.855081000724666E-9i 9.749563931993178E-9-1.3551284046497302E-7i 4.04933086616627E-6-3.739485168466021E-7i 9.719558741936988E-5 4.999999999999999E-6 0 1.042873207922593E-8-2.308150298002375E-9i 2.538558535950258E-7-9.296335495310556E-8i 4.227261940597676E-6-4.998250256832383E-7i 9.720180977146853E-5 4.999999999999999E-6 7.500000000000001E-8 -2.3063258292878187E-9+1.7993066910908819E-9i -1.1633535311169451E-7+1.3595678587162869E-7i 4.4253618775034185E-6-5.281338407560613E-7i 9.547023987437532E-5 4.9999999999999996E-6 7.500000000000001E-8 -6.953524967788999E-9+4.78491831253829E-10i -3.900363949076616E-9+1.3302105279533415E-7i 4.394380525142679E-6-5.82591479221828E-7i 9.685366663028071E-5 4.132525803941749E-6 1.0618777488544826E-7 7.693991825380095E-9+1.8414705477707086E-8i 1.3495449318247246E-7+4.291747716851532E-8i 4.11124762453301E-6-6.676206886997363E-7i 9.790157893035396E-5 4.1601858502023245E-6 2.903099955804744E-7 -5.3906949531190595E-9+3.595341681876974E-10i 5.7438216637301876E-8+6.245179441785838E-8i 4.083502826034023E-6-6.575312132166055E-7i 9.892714353583862E-5 4.999999999999999E-6 0 2.1804185727342445E-9-7.147655253224247E-9i 3.2647288381766326E-7-9.244861713598922E-8i 4.11227119710627E-6-4.6593088575680946E-7i 9.95610970944269E-5 -4.221727922107144E-6 2.74989284437415E-7 -2.161124072023083E-9+5.742062493191102E-10i -8.674209631606418E-8-7.37831685416704E-8i 4.026066751918985E-6-6.141161080847766E-7i 9.889668967357987E-5 -4.9999999999999996E-6 0 1.92313827686954E-8+7.176214548983248E-13i -2.496653346501163E-7+7.981942914648415E-8i 4.162265131189159E-6-4.7336873320114313E-7i 1.0062825546669994E-4 -5.0E-6 0 -1.2705254697204362E-9-5.92565728786177E-9i -3.1946085975935553E-7+1.0258194719818183E-7i 4.0848718810873854E-6-4.15884620816518E-7i 9.890263184896583E-5 -4.9999999999999996E-6 7.500000000000002E-8 1.5099121916629436E-8+1.3319223509352007E-9i 1.1041567896522469E-7-1.3591826078590174E-7i 4.337914653184083E-6-5.008320163408943E-7i 9.858904250692021E-5 -4.018818775263591E-6 1.369099034680872E-7 1.278651079488673E-8+2.0521454522650326E-8i -8.317575229567898E-8-2.5471264024605078E-8i 4.040496818791625E-6-6.363735061171904E-7i 9.828521490617041E-5 2.981603237826679E-6 0 5.455269285934393E-9+1.455506545800997E-10i -1.8600486135058117E-8-2.094720446387671E-8i 3.947179565746026E-6-7.32107330024952E-7i 9.803130437241126E-5 -3.045657683127572E-6 0 -1.825768616485837E-9...
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This document was uploaded on 01/24/2014.

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