H_75nm_L1_65um_D_10um

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Unformatted text preview: 58604339391124E-7i 7.882013129515875E-5 1.5585720467775572E-4 1.3141598938252556E-7 8.406778953529148E-10-3.4710543161953213E-9i -3.19865838808997E-8-1.2108490764217716E-8i 2.3491576547834265E-6-4.871604899758797E-7i 8.000402527577826E-5 1.5499999999999997E-4 0 4.487208814696504E-9-6.425811959395451E-9i -1.675580114805753E-7-1.0301584625765874E-8i 2.375368940488176E-6-4.172355886344903E-7i 8.077220131310402E-5 1.5636088845818604E-4 0 2.3796628567235727E-9-3.9708711148282836E-9i -7.415515515743274E-9+5.948044044480947E-9i 2.3214285220917348E-6-4.872921997250018E-7i 8.346061662017741E-5 1.5499999999999997E-4 0 8.565131937032788E-9-1.2581702735214861E-8i -1.4655608535995094E-7-2.355164545503153E-8i 2.3752142141083197E-6-3.577668710545249E-7i 8.222818898639493E-5 1.5671159181949068E-4 0 1.879463870646525E-9-1.963213674960329E-9i 9.813288701088218E-9-1.3246237051678378E-9i 2.28450306437429E-6-4.887001886072203E-7i 8.344056262392571E-5 1.5499999999999997E-4 7.500000000000001E-8 -2.5129946556219043E-9-3.3426968763645782E-9i 8.024826722985418E-8-1.2043303308030734E-7i 2.449939782713884E-6-4.0213495002606995E-7i 8.921821483933283E-5 1.5680115620077847E-4 0 9.562186097187425E-10-2.5914557721397856E-9i 5.546863440352573E-9+3.3742885016067176E-9i 2.1984001152263934E-6-4.2194711257507983E-7i 8.864550363678687E-5 1.5499999999999997E-4 0 9.40263341180623E-9-9.261416095487579E-10i -1.3856261730992886E-7-1.619390447150172E-8i 2.384668234878262E-6-2.87086335482023E-7i 8.861727251238842E-5 1.5499999999999997E-4 7.500000000000001E-8 4.4952203408023445E-9-3.690807223336431E-10i -2.242510248600659E-8-1.2410391114364377E-7i 2.4337630725454856E-6-3.3004291956201415E-7i 1.0344050443261983E-4 1.568989976436631E-4 0 -7.437568299335189E-10-5.208611387063593E-9i 1.97804622791847E-8+1.927293396575108E-9i 2.02177294946158E-6-3.2371279858170386E-7i 1.1975482573644396E-4 1.5499999999999997E-4 0 1.0189578754834136E-8-4.424073147176373E-9i -1.0416267739990152E-7-1.8169693006910807E-8i 2.1442831088962105E-6-4.526067099334836E-8i 1.197457180987255E-4 1.5499999999999995E-4 7.5E-8 4.66217112361381E-9-2.3769615353378246E-9i -5.227511491228814E-8-1.3117863326427765E-7i 2.216367650272312E-6-7.427903676639898E-8i 1.2061581857110361E-4 1.5634396541100833E-4 0 3.902194625653273E-9-3.1726636179341128E-9i -2.0364278492668308E-10+7.891248851748223E-9i 1.8716225782059732E-6-2.1094287766300584E-7i 1.1930861133802335E-4 1.5593534032519246E-4 1.8096844049819962E-7 1.2291681289466893E-8+8.458852502474245E-9i -2.6341459359591203E-8-4.066870182145577E-8i 1.9633744359379495E-6-1.7581312924900421E-7i 1.1802653006424079E-4 1.5499999999999997E-4 0 3.9911791223351926E-9-3.384100246459998E-9i -8.953210493009746E-8-3.253225735556601E-8i 2.157245863535532E-6-4.321636356289127E-8i 1.1851148616737836E-4 1.5582962893183732E-4 4.3039056683075077E-7 -8.421595543944044E-9-1.2654753643791062E-9i -1.0323747831736114E-7-5.338627469183297E-8i 1.9599365661530427E-6-1.809840533754143E-7i 1.1801174464287929E-4 1.5499999999999997E-4 7.50000000000000...
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This document was uploaded on 01/24/2014.

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