H_75nm_L1_65um_D_10um

2724082005008914e 6 51341195871410465e 8

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Unformatted text preview: 59970571007E-7i 2.7530115779879414E-4 -1.1219919969746348E-4 -1.9562600487516428E-5 7.891415377476825E-8-1.4793664490385133E-8i -2.1840519539388843E-8+3.785879505250276E-9i 5.226110232366755E-7-1.2200575449537636E-7i 2.804711301053907E-4 -1.3204499923750415E-4 -2.4643584039627825E-5 8.499192194757491E-8-1.7659589533857757E-8i -2.792355050863956E-8+5.131841729997891E-9i 4.785921904533621E-7-1.1438211963706411E-7i 3.0E-4 -1.557878649072423E-4 -1.9951395038789785E-5 5.165387594465087E-8-1.2193468438969093E-8i -1.90494087159946E-8+4.106215806241977E-9i 4.0098062973050254E-7-9.794339890600741E-8i 2.7183407480025853E-4 -1.4458378490932712E-4 -3.5637946874172587E-5 1.2460478820251242E-7-2.599132820035288E-8i -4.6085693943561846E-8+8.259852275313193E-9i 4.823773345744276E-7-1.1702169671607176E-7i 2.4923229610766454E-4 -6.1092397572392E-5 0 7.881897966161607E-10-2.4669147990023912E-9i -4.663007245255595E-10+3.227203577404777E-12i 7.271351158399764E-7-1.4467945378717122E-7i 2.522919694089277E-4 -5.38655234164659E-5 -9.289673559224936E-6 6.550606319593833E-8-5.885161959891419E-9i -6.2581413900309335E-9+1.611912095649916E-9i 7.044959522754566E-7-1.464967415753899E-7i 2.454523330187416E-4 -9.356571728686629E-5 0 8.728773254482778E-10-2.799925791209855E-9i -2.0053559178599568E-10+1.6776745886278888E-10i 7.187906913387917E-7-1.396876707057566E-7i 2.4374070393078898E-4 -8.396096230169618E-5 0 1.4128531367550588E-9-2.6682401220097097E-9i -3.0226410510053055E-10+7.631511591105258E-11i 7.473074742715793E-7-1.4066246387793642E-7i 2.444612056398977E-4 -8.942108423563821E-5 -7.649159495647393E-6 6.306951671121513E-8-1.8502227536100045E-9i -1.1711381343633278E-8+1.271497588403866E-9i 7.259608978895351E-7-1.4228782526673238E-7i 2.4439502686857096E-4 -3.94947162664922E-5 -7.594004067738972E-6 6.444993834440706E-8-2.4635216830167048E-9i -2.615930527929126E-9+1.3263570527754332E-9i 7.716168014022139E-7-1.5108904160028338E-7i 2.44501377342627E-4 -4.260376077322759E-5 0 1.6771223617509013E-9-2.287312048176291E-9i -1.274339352365132E-10+1.7312921232074125E-11i 7.759833288911444E-7-1.4836660973998683E-7i 2.5790728414555337E-4 -3.143548598033097E-5 0 9.59891240091925E-10-1.94756469123162E-9i -1.9125684294062804E-10+8.599918435181585E-12i 6.841468717546606E-7-1.449965037426474E-7i 2.59600742508719E-4 -2.9015111303308654E-5 -7.701692872224057E-6 4.765141522557398E-8-6.7673567336982585E-9i -2.1418107383804842E-9+7.256870664472066E-10i 6.718516205243426E-7-1.446309365840443E-7i 2.499685752018418E-4 -2.630128664385075E-5 0 1.7093350575543672E-9-1.9980692443798327E-9i -1.00536034616165E-10+1.0167698269707843E-11i 7.378262852611419E-7-1.4967153580341427E-7i 2.4848107490993383E-4 -3.0182368099735107E-5 -6.135588832520719E-6 4.6863405928814535E-8-3.955045558050775E-9i -1.39941789993393E-9+7.681089673063817E-10i 7.454862764113397E-7-1.504569568996843E-7i 2.4836915416948715E-4 -3.4100483408761604E-5 0 4.4679645461981443E-10-2.541303349972991E-9i -3.1114161088080865E-10-4.575559875647298E-11...
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This document was uploaded on 01/24/2014.

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