H_75nm_L1_65um_D_10um

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Unformatted text preview: 87968E-9+2.315546679247201E-9i 3.419895455581342E-6-5.7842477595542E-7i 1.1236670542664115E-4 -1.1055105274911559E-6 0 3.146777189767336E-9-1.7458505591539834E-9i 3.7279760762197413E-10+7.286404643228919E-10i 3.3257994180008396E-6-5.551981116227935E-7i 1.1240977093338206E-4 -1.0459319733884991E-6 1.6639017294938406E-6 -5.7087250043632104E-8+1.767206472960277E-8i -2.1944659714633164E-8-1.1238768597872714E-8i 3.3069187653233267E-6-5.624172454516573E-7i 1.1522022544711596E-4 -1.4375767899473674E-6 0 2.97877919947099E-9-1.7524575632645014E-9i 3.730831144960314E-9+2.985672841338167E-9i 3.2357073851980607E-6-5.174491439267843E-7i 1.1434537395965474E-4 1.4344699548096575E-6 2.0613592771126396E-6 -6.958442785122605E-8+2.0862331002678932E-8i 3.634496187760547E-8+1.8555357758149447E-8i 3.231967176528588E-6-5.433290423243271E-7i 1.1847659563279258E-4 -3.3433309331825256E-6 1.4690603900648952E-6 -4.711872266714371E-8+1.1962066295753517E-8i -9.604349466598033E-8-5.0989850747703194E-8i 3.1553087376485675E-6-4.704799032183653E-7i 1.1464729328745667E-4 -4.183077910875652E-6 1.8237584554505275E-6 -5.9388037542081106E-8+1.8126639948546512E-8i -1.78714561431276E-7-9.483926306985602E-8i 3.3127220319983076E-6-4.98155808182661E-7i 1.1642280594195799E-4 -4.514178820363055E-6 1.2187912934853564E-6 -4.137813633894851E-8+1.0358205423018809E-8i -1.9759397665438661E-7-1.1024555306781753E-7i 3.3393648563972616E-6-4.346260335551153E-7i 1.1709318188667187E-4 -6.421011603684076E-6 7.500000000000001E-8 1.8047246302260473E-9-1.6696318481316911E-9i -7.047434761492393E-7-3.264923238214802E-7i 3.22493205057492E-6-5.038884151186726E-7i 1.1592307285148043E-4 -8.128312339011142E-6 7.500000000000001E-8 4.87655312154554E-9-9.452460262866085E-10i -6.263243387764157E-7-2.890055951121416E-7i 3.017975069801579E-6-6.228769039036986E-7i 1.141134804972072E-4 -7.827206359380555E-6 1.8646389931247264E-6 -5.912614100223288E-8+1.887688511337572E-8i -4.606179859568031E-7-2.168531798851969E-7i 3.1056453377059566E-6-6.238868718523933E-7i 1.1408601757505706E-4 -9.145579894950128E-6 7.500000000000001E-8 7.854373211414371E-9-1.5510722845518182E-10i -6.008327009272447E-7-2.740883984631443E-7i 2.997360596636692E-6-6.796897991998145E-7i 1.1921871841216108E-4 -6.584730299555534E-6 2.1120626559486056E-6 -6.419088386675661E-8+1.8664671345740916E-8i -4.0256852947659055E-7-1.9266947977403777E-7i 3.024124245696633E-6-5.252169765263435E-7i 1.189601055530581E-4 -6.699982232804855E-6 7.5E-8 -1.0923305749234013E-9-2.94166532526939E-9i -6.528745762722188E-7-3.061714529021349E-7i 3.0798381975654903E-6-5.195460527949982E-7i 1.2056556324371146E-4 -6.301699726787206E-6 7.5E-8 -9.677355138048679E-9-5.8684667191906075E-9i -6.885445653611539E-7-3.228745052745E-7i 3.139540615329501E-6-4.578785145825974E-7i 1.1665775342166402E-4 -7.5255063306555265E-6 2.324438808656766E-6 -7.114221205577952E-8+2.267870362049075E-8i -4.1973252502416073E-7-1.9775781578189726E-7i 3.0243664113644317E-6-5.913931558304665E-7i 1.1792046122046913E-4 -8.5057502407...
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This document was uploaded on 01/24/2014.

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