H_75nm_L1_65um_D_10um

280900573323487e 4 7500000000000001e 8

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Unformatted text preview: 06E-4 1.3900729251962361E-4 -1.2850801190838952E-5 2.8553427393179854E-8-7.097377891466704E-9i 8.210873204321373E-9-1.9649996001118663E-9i 3.426785152632741E-7-8.450377374435762E-8i 3.4702278808587444E-4 1.2771000679515248E-4 -4.957313012643493E-5 9.2558221268129E-8-2.2170621168176167E-8i 2.510810319087818E-8-5.726885211667261E-9i 3.0466449203597885E-7-7.608107225162923E-8i 6.128564362314283E-4 1.4980676138201903E-4 -1.2864487915131555E-4 4.1398417925735816E-8-1.0610905635712934E-8i 8.28777973464235E-9-2.0973653756160075E-9i 7.67110025378705E-8-1.9875597567820626E-8i 6.910585083299711E-4 2.862553717690904E-4 0 4.4776555630023574E-10-1.858177482169425E-10i 2.1489077475807602E-10-9.689469524596812E-11i 5.817105178397997E-8-1.5125882391128446E-8i 5.682028612577456E-4 2.59119155853347E-4 -4.490514690210499E-5 1.58161867120865E-8-4.131310723867441E-9i 5.5237350481594605E-9-1.446974884218169E-9i 9.037198511234691E-8-2.335642032501666E-8i 7.157893922347147E-4 2.1713946165574462E-4 0 3.0052758530874174E-10-1.539657478999116E-10i 2.398184549649366E-11-3.822861214199908E-11i 5.773696201973492E-8-1.500569313332598E-8i 7.017841124230363E-4 2.508964100566366E-4 6.367142978843048E-5 -1.1584620636907292E-8+2.8866056022556864E-9i -3.385612315787633E-9+8.134959979702285E-10i 5.713571479434103E-8-1.4870857415478561E-8i 6.52825092214227E-4 2.036985060326619E-4 6.366019694051203E-5 -1.6270760289690886E-8+4.0412828878456476E-9i -4.050084922564068E-9+9.710357582908845E-10i 7.03879353598958E-8-1.8267638261774995E-8i 7.061316265946548E-4 2.14845876012189E-4 1.2133991710620959E-4 -2.259816700675582E-8+5.7011477642881984E-9i -5.83191946333116E-9+1.434547701865476E-9i 5.472484146982746E-8-1.4272132422983368E-8i 6.657414628394737E-4 1.9355840255461855E-4 -2.5024307502484518E-5 6.447521845423307E-9-1.7364496830208609E-9i 1.4604348854876402E-9-4.026259570178763E-10i 6.979763002272613E-8-1.8085761616865763E-8i 6.596725689806784E-4 3.526132461468191E-4 0 8.059770053330264E-11-8.757641525411272E-11i 2.1763638224003193E-11-5.845638900444203E-11i 5.9504573277207475E-8-1.5476952453435224E-8i 6.219341474409301E-4 4.1557420003094254E-4 0 5.116736724726367E-10-1.8838605438013335E-10i 1.6118083553021244E-10-1.030915076222894E-10i 6.039493852891529E-8-1.5717910783205554E-8i 5.976174708404878E-4 3.0927022743175507E-4 2.2508180446015994E-5 -5.827189335222369E-9+1.3963008100632445E-9i -2.413820186234168E-9+5.376941667511035E-10i 7.74704508543417E-8-2.0084141047120603E-8i 6.737969787710215E-4 3.1851999357648846E-4 6.361324619194566E-5 -1.1922153743793493E-8+2.9842281289810705E-9i -4.6724709314762174E-9+1.1291899790677884E-9i 5.79954038176477E-8-1.509920906353526E-8i 5.454609479634622E-4 3.7872049576277434E-4 -5.924411767677654E-6 2.065085063101748E-9-6.088316038627686E-10i 1.1276526887244812E-9-3.7077058088964035E-10i 8.277167596690638E-8-2.1460369982682895E-8i 5.289108078817869E-4 5.289209367247938E-4 0 4.209590078692912E-11-4.720234075635443E-11i 2.546510248613407E-10-1.4191112555939653E-...
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This document was uploaded on 01/24/2014.

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