H_75nm_L1_65um_D_10um

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Unformatted text preview: 78923081086513E-7i 5.594500815689335E-6-1.2088315218663392E-6i 7.354777157800267E-5 -1.0E-5 7.500000000000002E-8 1.0733129195891292E-8-8.62012329340874E-9i -2.538779535550768E-7+2.0018411400107222E-7i 5.916362887728309E-6-8.819196241937731E-7i 7.256226287720094E-5 -8.37634491993518E-6 7.500000000000002E-8 4.079623902116884E-8+1.2167241539049072E-8i 3.5218922644226235E-7+2.56762038430165E-7i 5.7167071427625004E-6-1.2828219714005797E-6i 7.189479196763923E-5 -9.999999999999999E-6 0 9.655693160933072E-9-5.294428735811048E-9i 6.359286370461904E-7-1.5643014717272443E-7i 5.836986401505879E-6-9.660542716736798E-7i 7.267617295086968E-5 -1.1169276797374383E-5 0 7.860123297915247E-9-1.7923371918775033E-8i 3.1819724146598216E-9+3.956501866666745E-9i 5.781960446481221E-6-1.1066433043981257E-6i 7.184213653441087E-5 -9.999999999999999E-6 7.500000000000002E-8 1.4667348196577474E-8-6.911053192617048E-9i -1.6062468308469785E-7+1.829085836962885E-7i 5.967406814636386E-6-1.042223474522232E-6i 7.116826659125144E-5 -1.1227513868266264E-5 0 1.9980515367757654E-8-1.1792332084372607E-8i 1.6057336001875173E-8-2.4190675959787098E-8i 5.881662360105237E-6-1.1943564369386433E-6i 7.500000000000001E-5 -2.5118661938401206E-5 7.500000000000001E-8 -1.755618298793046E-8+1.205364717917117E-7i -4.340419608797608E-9+1.2893645826364541E-8i 5.81394657614016E-6-7.748859988962996E-7i 7.407886619787167E-5 -2.3722450192521568E-5 3.0400441319329704E-7 3.1817058998920286E-8+1.9637709650424662E-8i -5.958249477133748E-10-2.523464980030976E-9i 5.642917562102834E-6-9.992298836032643E-7i 7.499999999999998E-5 -2.3402425513695748E-5 7.499999999999998E-8 -1.937112066936081E-8+1.44521005947461E-7i 1.7850246019920295E-9+2.226965172334072E-9i 5.8586210658686354E-6-8.091441214036312E-7i 7.363126530721794E-5 -2.0880137659006674E-5 0 -4.888563763243941E-9-3.212120252413308E-8i -2.000558585172678E-9+8.153503320010831E-9i 5.651285155779955E-6-1.0758001456711005E-6i 7.5E-5 -2.1683985597074876E-5 7.5E-8 -4.1158593079320815E-8+1.4539017666216757E-7i -2.3391939961673562E-8-5.3471090629410106E-9i 5.827763337905287E-6-8.26499285139658E-7i 7.499999999999998E-5 -1.0320793722641386E-4 0 3.3390033183119865E-7-1.419349104366295E-7i -3.0775510432891804E-9+6.427282248812107E-10i 4.1703491871688445E-6-3.579819134870801E-7i 7.374497398865545E-5 -1.0413992256535102E-4 0 -4.1477101150646144E-8-1.975016348682949E-8i -3.1696525739736505E-9+8.397084847247549E-9i 3.867379562356247E-6-6.321844990061244E-7i 7.5E-5 -1.0381346035590175E-4 7.500000000000001E-8 6.273705359272407E-8+1.303115240223854E-7i 4.161879903864921E-9+6.509267822716772E-9i 4.234303434745494E-6-3.8138181471649893E-7i 7.404473857241648E-5 -1.0226368076099888E-4 9.788253050924132E-8 8.946013830517835E-8+6.050268437640671E-8i -3.6359172141318753E-9+3.90880511291769E-9i 3.989213938111523E-6-5.808016904866523E-7i 7.499999999999998E-5 -1.0210486718904258E-4 7.499999999999998E-8 -6.095067088761456E-8+1.2369743778968783E-7i 8.121036369963287E-10+7.707910719420368E-9i 4.29818859965...
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This document was uploaded on 01/24/2014.

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