H_75nm_L1_65um_D_10um

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Unformatted text preview: 99347E-8-2.8740892511163503E-8i 2.579242878523429E-6-6.255695026916153E-7i 8.190596429190068E-5 1.4156763053140215E-4 7.5E-8 2.5793254856804916E-7+1.2034018324971323E-7i -1.0491640447297935E-7-5.493220676686537E-8i 2.3654808348571014E-6-6.499591777987965E-7i 2.3259543866842672E-4 1.4257945711012313E-4 0 3.187768389596228E-9-4.6772689941122575E-9i 7.402614230306106E-10-7.652959196417588E-10i 7.082261639550451E-7-1.3571373324084511E-7i 2.3156404932917282E-4 1.4439474177353235E-4 2.448812777385753E-6 -1.944635132898378E-8-7.599464438039295E-9i -8.724219341495922E-9-2.13459551681292E-9i 7.089767544692052E-7-1.375466006879686E-7i 2.3462614701044596E-4 1.446011342789505E-4 0 2.027637884362884E-9-4.3849388604183005E-9i 6.58698768970969E-10-9.963409609880288E-10i 6.851292945470123E-7-1.3744084008260585E-7i 2.336329250868931E-4 1.4716837620563168E-4 0 2.2798300931324413E-9-4.673511856688384E-9i 5.277631695020079E-10-1.290076749287819E-9i 6.840794913674792E-7-1.3785759973738762E-7i 2.3538664759990114E-4 1.4131004896696637E-4 0 2.4325568883959406E-9-4.017608555929827E-9i 8.638626115531142E-10-6.921416812536609E-10i 6.901320990990304E-7-1.367127806155147E-7i 2.1895761078669416E-4 1.3782456865012817E-4 7.500000000000001E-8 -1.5982105866470552E-7-7.786317149074565E-8i -4.5755765495243585E-8-2.0776695107044474E-8i 7.610777659266481E-7-1.8126945920447553E-7i 2.214542631152012E-4 1.3821754370656346E-4 2.210373758448634E-6 -1.4175937021306506E-7-6.431622033684376E-8i -3.584750940442436E-8-1.350367674294377E-8i 7.857662107875579E-7-1.581434922367398E-7i 2.3193843705079475E-4 1.392844740863136E-4 0 3.2966443336639076E-9-4.730777051843913E-9i 9.189503238221652E-10-4.710483635095297E-10i 7.259819244507585E-7-1.3385121815610856E-7i 2.3047244653128865E-4 1.3940994858261928E-4 2.824098243746788E-6 -2.931732353016568E-8-1.1276816312503459E-8i -1.0844158999689862E-8-2.1582679574696597E-9i 7.39672495060962E-7-1.3357096978511475E-7i 2.2773245343057558E-4 1.4814240763176494E-4 3.9740551617513E-6 -3.9760335526117274E-8-1.4143916868054312E-8i -1.95105131117233E-8-5.597214742411396E-9i 7.222010714876425E-7-1.4221845945127216E-7i 2.317379304018E-4 1.4900396019299224E-4 3.4841283768252776E-6 -2.3557952689724833E-8-5.9296498450156835E-9i -1.1758282364213694E-8-2.7803239941423302E-9i 6.890731114883969E-7-1.4044436041570042E-7i 2.317301338198432E-4 1.534366389521921E-4 0 2.6534860550225593E-9-4.970967665656906E-9i 1.3091021481400728E-9-2.0565466200492004E-9i 6.756245341621692E-7-1.3979283499740508E-7i 2.3419496158484188E-4 1.497727593009259E-4 0 2.293522318244645E-9-4.427283139426887E-9i 1.0279388437301117E-9-1.3761459202150046E-9i 6.709742385736401E-7-1.3891840210707413E-7i 2.2838072951505894E-4 1.5602778381089552E-4 3.1303304461744185E-6 -1.886488788403452E-8-5.426054329649571E-9i -1.1120283941930655E-8-5.27824460208437E-9i 6.870934375630584E-7-1.437398280313744E-7i 2.2838799463666948E-4 1.583879076748619E-4 0 2.5261873973667333E-9-4.538522460806106E-9i 1.8057316107774094E-9-3.76275752...
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This document was uploaded on 01/24/2014.

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