H_75nm_L1_65um_D_10um

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Unformatted text preview: 44478058251355E-10+1.2681132754753145E-10i 8.958742291609933E-7-1.2525668850647676E-7i 2.2030859251118942E-4 -9.394875437568708E-7 0 1.6942658735937836E-9-8.335107935129059E-10i 4.372802309922777E-10-4.781566059874232E-10i 9.360591200316514E-7-3.712383910132919E-7i 2.2213456636094276E-4 -2.2630566776400273E-6 0 1.6390256053109821E-9-2.2181581799767085E-9i 1.1374820403698108E-10-4.1158190714878135E-9i 8.744110385115656E-7-4.727221258345224E-7i 2.2683609943983176E-4 2.4623186316526997E-5 0 6.877451565060269E-11-1.0220573313941109E-8i 3.628827594085711E-10+2.7779430216532946E-10i 1.0329051885995984E-6-8.115195541312795E-8i 2.2693370252463638E-4 2.6000642865795396E-5 -1.6807510528719435E-6 6.359963006205677E-8+2.7092383630703537E-8i -4.5609012022502524E-9-5.240895984503977E-10i 1.0110547514532245E-6-9.759353592837728E-8i 2.269784380778796E-4 2.6389111222580036E-5 0 -1.8281463048952247E-9-1.0625426886230142E-8i 9.86596810107973E-10+8.4322387614022E-10i 1.0274955981716866E-6-8.839900482388756E-8i 2.288158351253737E-4 2.3011718390194338E-5 0 2.831658646367812E-9-4.1504693026039636E-9i 5.437466462247664E-11+1.4526797958657767E-10i 9.679592564072963E-7-1.1339515213830141E-7i 2.3080315040758067E-4 2.4638921317532868E-5 -2.304695313365158E-6 4.119272116209522E-8+9.121172178308675E-9i -2.4018108811337435E-9-2.1013616923728965E-10i 9.255052128564828E-7-1.3185902744670912E-7i 2.2811792311150112E-4 2.4398736856289817E-5 -2.4676640712842544E-6 6.380092230279011E-8+2.3702434053574628E-8i -4.549282689415291E-9-1.5617051878287544E-10i 9.702899573945369E-7-1.1721463913778882E-7i 2.2908387215066526E-4 2.5531721345606697E-5 0 2.16420794466764E-9-4.557887382663945E-9i -1.403882999468384E-10-8.486497077494946E-11i 9.667498983067688E-7-1.1514860168559629E-7i 2.2926672166542932E-4 2.6989376158636654E-5 -2.482603339599955E-6 5.4244663780836365E-8+1.5586123609970796E-8i -3.241312510328208E-9-4.4933492701140413E-10i 9.530789686538172E-7-1.2385104973165955E-7i 2.2848333297285762E-4 9.184361360524185E-6 0 1.0355463972428959E-9-7.511344999826282E-9i -3.2451870033431764E-10-6.139954858434277E-10i 9.58108108957246E-7-8.703053320776226E-8i 2.2865719454481974E-4 1.2258436670115042E-5 0 2.4984412289667793E-9-4.894110841600063E-9i -1.3508881394643809E-10+7.725615720072243E-12i 9.549015510297643E-7-1.0249547546157408E-7i 2.2932063436819497E-4 1.0014291860213561E-5 -2.2628869546390163E-6 4.00591836648908E-8+2.2434291636340673E-8i -6.726822184280456E-10+6.436406184414937E-9i 9.353977804372433E-7-1.1386532346326135E-7i 2.3107156130453991E-4 7.963467192716391E-6 0 1.966904211263943E-9-3.730116817140231E-9i -9.639963107938479E-11+1.6760935809724256E-10i 9.143030648775864E-7-1.1830052328754857E-7i 2.3265150834622027E-4 6.841260982779125E-6 -2.1277203139498834E-6 2.8357942842770045E-8+9.876633695030794E-9i -2.2697638842156493E-10+2.2807567311261783E-9i 8.908942924341659E-7-1.3179703346202655E-7i 2.3143121338740672E-4 1.0285154217496616E-5 0 1.9645075903316085E-9-3.827588611443849E-9i -5.4265956728...
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This document was uploaded on 01/24/2014.

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