H_75nm_L1_65um_D_10um

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Unformatted text preview: 69840983915E-7i 2.4885372636749714E-5-6.380198591105907E-6i -7.440232459124541E-5 1.3352406620017231E-4 -1.147037136868651E-6 7.129665797919296E-6-1.4631316693438317E-6i 1.313642372166788E-6-3.54217536236021E-7i 3.290684840771467E-5-8.219393710526268E-6i -7.320668565385081E-5 1.3377379630131645E-4 0 -8.24392072808211E-7+1.411180415300528E-7i -8.305767219829452E-10-1.9062334773167766E-8i 2.9912530401937643E-5-7.5343395257790324E-6i -7.499999999999998E-5 1.3439657982691479E-4 0 9.678069759073307E-6-1.6991233358882674E-6i 1.1175477275989405E-7-4.360396399505362E-8i 4.371167930618255E-5-1.0307038275448203E-5i -7.301667227614218E-5 1.340379150705309E-4 -1.6710692748933783E-6 4.619738145102397E-6-1.0025943860612808E-6i 1.4486963865495417E-6-3.893251814802989E-7i 2.7861413687403462E-5-7.098232267527607E-6i -7.444324992440808E-5 1.356772096428722E-4 -1.2794240286323593E-6 6.735074416734654E-6-1.3625975334843886E-6i 1.459965014934117E-6-3.833810360294454E-7i 3.0135617324936194E-5-7.5536988681360054E-6i -7.577600290256929E-5 1.347490250271935E-4 -1.0334969420904676E-6 1.4147042754362456E-5-2.809316249292066E-6i 1.9419624751136715E-6-4.936449873704943E-7i 3.1754678427029515E-5-8.09940907809878E-6i -7.708166574438147E-5 1.351130619680757E-4 0 2.0060192168993667E-5-3.9769924014519675E-6i 2.075003998416869E-6-4.996300212214052E-7i 2.712432112941888E-5-7.476033234751063E-6i -7.638894519832972E-5 1.3336305711063548E-4 0 2.2024883778327574E-5-4.334504052309769E-6i 1.3557875488224746E-6-3.385580495699178E-7i 3.1595155721054756E-5-8.394474882533016E-6i -7.637989508126983E-5 1.2818896261749206E-4 0 2.870261325622308E-5-5.918938350747892E-6i 1.828868432109308E-6-4.433373787764745E-7i 3.6733059117013966E-5-9.810372596366957E-6i -7.5E-5 1.2746654831987243E-4 0 1.2225996666010883E-5-2.382557455991348E-6i 3.4003559991104454E-7-9.619739834339687E-8i 5.3201842609046536E-5-1.2825375460049878E-5i -7.499160838471087E-5 1.294021879476329E-4 -1.052814398328739E-6 1.2225608065137453E-5-2.54152072662722E-6i 1.5168178817047985E-6-4.087089391068462E-7i 3.9169588744718264E-5-9.814382477397326E-6i -7.500000000000001E-5 1.2919905619663305E-4 0 1.2082714496190286E-5-2.262339627930506E-6i 1.6491534878445197E-8-2.4742444833710426E-8i 5.3438746989726347E-5-1.270327539514178E-5i -7.310239667322377E-5 1.2842515108829361E-4 0 -1.0356856225933464E-6+1.8877438439680871E-7i 1.3592795676712079E-7-4.566552054653556E-8i 3.458563537659604E-5-8.760915764295063E-6i -7.351879241844124E-5 1.2993899870187607E-4 -1.899621059999863E-6 7.084723141842024E-6-1.5674347393246988E-6i 1.813680610295289E-6-4.93062330886433E-7i 3.175606735447666E-5-8.12471409490777E-6i -7.67727564066525E-5 1.3170140528183751E-4 0 2.35507831792706E-5-4.785029268412304E-6i 1.9087928172512036E-6-4.679358130263037E-7i 3.1232585255968344E-5-8.478062000778004E-6i -7.70543922652401E-5 1.2983908903087992E-4 0 2.616901328458833E-5-5.4551195670298325E-6i 1.9680165281004194E-6-5.017362758484231E-7i 3.191687587708938E-5-8.77182985421836E-6i -7.75217836...
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This document was uploaded on 01/24/2014.

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