H_75nm_L1_65um_D_10um

306081599297609e 6 6460817004830043e 7

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Unformatted text preview: 114E-9i 1.395757107068885E-6-2.1156678344446425E-7i 1.466970067609014E-4 -1.5813398014906117E-4 0 2.595134031899744E-9-1.9871413323108553E-9i -6.578055409654187E-9+4.812007425461903E-9i 1.449879657198862E-6-1.8807015871631044E-7i 1.384768181889729E-4 -1.6275220144904514E-4 3.969248290100207E-6 -3.960663675906484E-8+8.380528641300413E-9i 7.2223568118772E-8+2.1308483181704445E-8i 1.3914233563978075E-6-2.5814899479887946E-7i 1.3430790006864105E-4 -1.6814278935531332E-4 0 2.3806246602069842E-9-2.0993934661669642E-9i -4.698828151876097E-9+2.751392393302368E-9i 1.364030471911327E-6-2.771909554537158E-7i 1.387412176310955E-4 -1.6524132762387478E-4 0 2.025470227174156E-9-2.2698299696408132E-9i -1.8420115839318934E-9+4.400702484017027E-9i 1.3606595961335611E-6-2.58911323813317E-7i 1.4064253462344492E-4 -1.6212055533446816E-4 0 2.1171033834201294E-9-2.1893471384850933E-9i -3.359385587843488E-9+4.361254737086371E-9i 1.401112957674961E-6-2.396082592098257E-7i 1.4127592988579936E-4 -1.582214380940333E-4 3.547174813755236E-6 -3.607618875270564E-8+6.854252816866048E-9i 1.1963306588251984E-7+4.7874810505417025E-8i 1.4583193361736448E-6-2.2762130482802803E-7i 1.4384571734277007E-4 -1.617207476887778E-4 0 2.3886704992250756E-9-1.952445567810564E-9i -3.2176523925348715E-9+4.3576132096158696E-9i 1.3726795903043867E-6-2.310294470099939E-7i 1.437065824520789E-4 -1.596155280823371E-4 1.9846241450501035E-6 -1.8264254318198623E-8+2.8453076885990884E-9i 5.7629866209251354E-8+2.5461370086379925E-8i 1.4157348018711744E-6-2.216590501463107E-7i 1.4830541274939109E-4 -1.587582906930582E-4 3.2497282973936395E-6 -3.191997612235148E-8+4.78769936404364E-9i 9.778063367017891E-8+3.9908854863348036E-8i 1.37569191630012E-6-2.1140583243347693E-7i 1.4775669036310807E-4 -1.6265408236980423E-4 0 1.6077410469759739E-9-2.3514356688315295E-9i -4.581157488160484E-9+3.3935586415609342E-9i 1.3145077097588555E-6-2.2671714995099662E-7i 1.5199365989899467E-4 -1.6163858484000935E-4 3.885123279579916E-6 -3.604952812944456E-8+6.0256161243955784E-9i 7.207657256941835E-8+2.4480600430782733E-8i 1.2752753280365261E-6-2.2100100567760613E-7i 1.6396246079225372E-4 -1.6331015260791194E-4 7.1574498282520924E-6 -6.204735244601004E-8+1.014452341490174E-8i 9.312208258424391E-8+2.4783847650683394E-8i 1.1136582743656146E-6-2.1479744308725893E-7i 1.6147773739959975E-4 -1.693430091733211E-4 0 2.126221556561204E-9-1.790065649276013E-9i -2.3215318260075743E-9+3.2563959117708595E-9i 1.0940907544597906E-6-2.1877300649018836E-7i 1.6375100120679027E-4 -1.6981277876215842E-4 5.350133041122075E-6 -4.2002418908348996E-8+7.484299134445168E-9i 4.650800082650675E-8+8.845164857699117E-9i 1.0648818417985558E-6-2.1786766646764616E-7i 1.6472203782188973E-4 -1.7613831370028797E-4 0 1.9354437291812988E-9-1.7059027499767441E-9i -2.64583177497878E-9+2.509401451011254E-9i 1.0126269689026657E-6-2.1735564135782073E-7i 1.5680597299900853E-4 -1.7668935772281006E-4 0 1.9446340686703124E-9-1.7653507443080535E-9i -2.8608137926652006E-9+2.3977117395508015E-9i 1.06...
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This document was uploaded on 01/24/2014.

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