H_75nm_L1_65um_D_10um

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Unformatted text preview: 03042938194686E-6 5.6441246130044566E-8-4.8433110107799014E-8i 1.0883836068193885E-7-1.8113990219397796E-9i 2.439940917250593E-6-5.687137386231611E-7i 7.561391333057839E-5 1.5506067312397837E-4 -5.138058103800677E-6 8.745003798557062E-8-4.747024482642156E-8i 1.2135554656649816E-7-8.690651449062373E-9i 2.3870086239000227E-6-5.623842421042385E-7i 7.47554284826265E-5 1.4668842351078584E-4 -2.5737359292779215E-6 -1.2828270550113556E-8-6.598204265631702E-8i 7.850919171935109E-8+3.188449035232497E-10i 2.6151497799882363E-6-5.799428178026436E-7i 8.234715006125902E-5 1.5457232045823383E-4 -4.631041886103318E-6 5.7936959046201294E-8-4.636440768702778E-8i 1.5053207974406475E-7+2.0919980477891616E-8i 2.2639084243028864E-6-5.190810579364738E-7i 8.520466105200194E-5 1.5403277768305835E-4 -7.392623253880856E-6 1.0580966046311263E-7-6.221510983094333E-8i 2.0002370293351652E-7+1.6358151797440983E-8i 2.184846595857068E-6-5.163689441908691E-7i 8.44757503940452E-5 1.558757895005071E-4 -4.948272551306684E-6 6.838107827186167E-8-4.317100169449334E-8i 1.5095352654885598E-7+1.859217202964993E-8i 2.2044896264197625E-6-4.996381878501903E-7i 8.247017460307958E-5 1.5820479965569754E-4 -4.9560959783397715E-6 7.878171004663283E-8-3.849121633525762E-8i 1.2123472529656105E-7+5.805742293168992E-10i 2.2019813376080615E-6-5.053593054652672E-7i 7.967965258331552E-5 1.5645374503993163E-4 -5.9882022737842515E-6 9.700936560563117E-8-4.99452645224413E-8i 1.4318503796307333E-7-2.689187633469689E-9i 2.2741441428159386E-6-5.327653985455483E-7i 1.9157057387165008E-4 1.5049645375946313E-4 -1.9197268518492397E-5 1.6531224064330444E-7-1.7128130385940386E-8i 1.4961310788651699E-7+2.402337774760366E-8i 8.5681011950834E-7-2.1073708853131859E-7i 1.9441140157120236E-4 1.578933457440627E-4 -1.5087565849481462E-5 1.1926544647004395E-7-1.403703506621823E-8i 1.1640135146022739E-7+1.8741492183057277E-8i 8.496656325485916E-7-1.8851550001653988E-7i 1.9831549867406354E-4 1.5171078476107017E-4 -1.6003235593313473E-5 1.3763693937716074E-7-9.59646990144238E-9i 1.284154423425475E-7+2.4330225709148453E-8i 8.253612566655429E-7-1.9461304554590167E-7i 2.0193534634561686E-4 1.5580956024951797E-4 -1.5285674916815442E-5 1.1982100095881186E-7-1.0694984413866565E-8i 1.0673619913076037E-7+1.7180808798051856E-8i 8.042558821693609E-7-1.8124231202696661E-7i 2.0091875825739284E-4 1.4880898596323172E-4 -2.5902192754715516E-5 1.9742889297163008E-7-2.3961031772812263E-8i 1.3191669299039626E-7+8.62708130191194E-9i 7.852590552165897E-7-1.9878576037737459E-7i 2.1188803643399517E-4 1.5836165328258518E-4 -1.956383057480539E-5 1.2859512452973061E-7-1.5876826405164133E-8i 8.632793710606062E-8+4.348811081848075E-9i 7.314658777415482E-7-1.6859167731142325E-7i 2.05203931510181E-4 1.5392286296911573E-4 -2.3416490600423307E-5 1.6639667993753535E-7-2.0648189893532156E-8i 1.1281360096292303E-7+6.788081080435561E-9i 7.632947035571408E-7-1.8445059154161877E-7i 2.122861920599235E-4 1.4516022536588275E-4 -3.0990480642560115E-5 2.1102172451935894...
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