H_75nm_L1_65um_D_10um

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Unformatted text preview: 26734E-5 0 -3.9933029049601075E-8-3.352109471173748E-8i 6.685476276529698E-9-4.155673719637848E-10i 5.194723420746004E-6-9.691752819650892E-7i 7.319121546152358E-5 5.2196480534454973E-5 0 -1.1069476595512313E-8-3.7900947435186294E-8i 1.4112753191823733E-9-4.7204371586692315E-9i 5.125640570145114E-6-9.736320853983506E-7i 7.685062013002746E-5 5.000325983206628E-5 7.500000000000001E-8 9.237368718218888E-7+4.4842671262504704E-7i 4.538619296610385E-9-3.120991275438031E-9i 4.89876260892243E-6-9.491149594406215E-7i 7.636503619339732E-5 5.1633446617355605E-5 7.500000000000002E-8 8.703480796623531E-7+4.298514918100244E-7i 6.11522849064097E-9-2.1920883048568798E-9i 4.972412282510678E-6-9.100554397736788E-7i 7.520406522882455E-5 5.164080470351406E-5 1.933796767891712E-6 2.5092687959644883E-7+2.2519892188948656E-7i -3.674312865491104E-8+7.83515666143977E-9i 5.014708571087069E-6-9.187196346414442E-7i 7.574347666706904E-5 4.8117411722108514E-5 1.2944701822263864E-6 4.417831384756622E-7+2.9281798785257265E-7i -1.910538939065124E-8+4.083982118237169E-9i 5.109221471753179E-6-9.129398035154693E-7i 7.67907863419055E-5 4.8331987752019996E-5 7.500000000000001E-8 8.500133806817197E-7+4.165095192117339E-7i 8.34080813776871E-9-1.108715540094433E-9i 4.877492354739936E-6-9.772214762125463E-7i 7.636516100169495E-5 4.661740689429086E-5 7.500000000000001E-8 9.162093665577667E-7+4.459891500367223E-7i 1.3688835152209089E-8+3.5244636298953974E-10i 5.0729084925816805E-6-9.366379375613812E-7i 7.877758331934444E-5 4.9117640020978595E-5 7.500000000000001E-8 7.848701792842992E-7+3.7817811904062097E-7i 1.1956177091345527E-8-1.0165861472066774E-9i 4.489591846892935E-6-1.0557256429939897E-6i 7.644630979310322E-5 4.94073047749885E-5 2.0004395893354406E-6 3.8373538187406605E-7+2.939933365631725E-7i -2.96785590844003E-8+8.965230390532708E-9i 4.883176931691936E-6-9.655193962275835E-7i 7.852738642307643E-5 4.670470907357632E-5 7.500000000000002E-8 7.788775797222207E-7+3.781534606211659E-7i 1.4792040208892144E-8+5.489916281536277E-10i 4.572559162162059E-6-1.0615151505150022E-6i 7.873385103789141E-5 4.822020964634876E-5 1.887705045211231E-6 4.906772452404001E-7+3.2720509380112325E-7i -1.718084971084548E-8+1.0078701902456973E-8i 4.528339369829158E-6-1.043343870801301E-6i 8.097039961638323E-5 4.5307905842412234E-5 7.500000000000001E-8 6.976955363643492E-7+3.3112804616820966E-7i 2.7066685374529093E-8+4.433858538230923E-9i 4.248073686177593E-6-1.113715296139704E-6i 8.140105634671061E-5 4.7934105136139736E-5 7.500000000000002E-8 6.938602819975097E-7+3.2578851665623345E-7i 2.3646962665334184E-8+2.759163449669874E-9i 4.148758463826695E-6-1.1066116599218342E-6i 8.068977424187263E-5 5.036658641436608E-5 7.5E-8 7.200893084020807E-7+3.3939354601986586E-7i 1.6746638346620395E-8+9.789147964456291E-11i 4.205132021149812E-6-1.082285062727504E-6i 7.475873951921124E-5 4.587171703377779E-5 1.0539728245155319E-6 2.1120072322850883E-7+1.8184388581540291E-7i -1.5402681807920966E-8+4.688061610936782E-9i 5.344254506348...
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This document was uploaded on 01/24/2014.

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