H_75nm_L1_65um_D_10um

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Unformatted text preview: 820556949891454E-8+1.0408709804253822E-8i 8.419702378584832E-8-2.190588175873073E-8i 1.602627124833315E-7-4.1642359350790306E-8i -5.00496142035776E-4 5.522346223253036E-4 -6.359664859513836E-5 -2.176533402209928E-8+5.686553115825439E-9i 3.340915593069337E-8-8.599002952634018E-9i 1.353048018862934E-7-3.508256260549679E-8i -4.8678402825723903E-4 5.357493007051023E-4 -1.8846218885402156E-4 -6.04467274513821E-8+1.5698272131349604E-8i 9.375444467656917E-8-2.4394718385603104E-8i 1.0094927369704142E-7-2.6111320334416268E-8i -5.212636951783158E-4 5.212545394230029E-4 -1.2681429422569448E-4 -4.866721724906567E-8+1.2654953347807426E-8i 6.714695671678105E-8-1.7420052489200166E-8i 1.23049311498899E-7-3.1859540406753454E-8i -3.732021340699256E-4 5.081525434360804E-4 -1.811477971444176E-4 -7.52372814238172E-8+1.9583972055345956E-8i 1.6688206682254017E-7-4.356252097967497E-8i 1.378596108731072E-7-3.574658189228902E-8i -2.594706616639739E-4 5.335222297628804E-4 -2.3564999403962881E-4 -4.130741724931364E-8+1.0609449358572328E-8i 2.0368454675603258E-7-5.321905433370274E-8i 9.69618866758008E-8-2.5116613448102996E-8i -2.7860425555787445E-4 5.473160030005707E-4 -1.170528346851261E-4 -2.989604963158284E-8+7.823296020365374E-9i 1.2347466456008202E-7-3.2255523255953965E-8i 1.8427381622525372E-7-4.7987243092144856E-8i -3.0014388778776827E-4 5.79660037364209E-4 8.226687065809054E-6 2.476733611604859E-9-4.926593169242578E-10i -6.061764606529412E-9+1.6884794456128828E-9i 1.8559779987434495E-7-4.834279965966708E-8i -4.3635231192881143E-4 5.198051951373567E-4 1.4891397475983538E-4 6.091725227215933E-8-1.572699205491991E-8i -1.0733374342407055E-7+2.8263194687118353E-8i 1.4180135648661392E-7-3.670728626441503E-8i -4.8678402825723903E-4 5.357493007051023E-4 1.8846218885402156E-4 6.031786357130189E-8-1.5584909470381646E-8i -9.473034666712134E-8+2.490971169328433E-8i 1.0319658986691433E-7-2.6631309001093154E-8i -5.212636951783158E-4 5.212545394230029E-4 1.2681429422569448E-4 4.811095921077523E-8-1.2461998562764338E-8i -6.645202789658846E-8+1.7532704751431863E-8i 1.2394728212925628E-7-3.2040978865093366E-8i -4.6759404024672966E-4 5.698932896594786E-4 1.2681266469417453E-4 3.796210959809672E-8-9.774647069044127E-9i -6.722328923321618E-8+1.7718351965278776E-8i 1.193348148815777E-7-3.089703781541092E-8i -5.358056960636123E-4 4.867262073144728E-4 1.884512010549586E-4 7.554065318990232E-8-1.959352007368028E-8i -9.238301107151236E-8+2.429965191247686E-8i 1.0598328346880208E-7-2.729550414436533E-8i -4.094147720979799E-4 6.130279898954677E-4 1.268078388455597E-4 2.8112887660433755E-8-7.176009111455365E-9i -6.455392771048365E-8+1.6991441360908862E-8i 1.1366698535105081E-7-2.9470669505763813E-8i -3.5138138173151353E-4 5.545153662149015E-4 1.315202860531983E-4 4.204287660559638E-8-1.0735237748134369E-8i -1.0875368010317389E-7+2.8614542486486016E-8i 1.5411671055769465E-7-4.00172471627992E-8i -4.155738285849967E-4 6.219343956396402E-4 0 1.31481696117939E-9-2.674963344159922E-10i -1.944188797517531E-9+6....
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This document was uploaded on 01/24/2014.

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