H_75nm_L1_65um_D_10um

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Unformatted text preview: 24210333799E-11i 7.803841846982415E-7-1.5229245266982455E-7i 2.3964721129966007E-4 -1.5174999515553558E-5 -3.123453845690889E-6 3.028455065188301E-8+3.0771316963332594E-11i 3.936022645024579E-10-1.4534731317297185E-10i 8.201450297426949E-7-1.5041422355351102E-7i 2.3752367926588278E-4 -1.5106522965708147E-5 0 1.9713506982298774E-9-2.5618570685442395E-9i 1.1342607381765665E-11-4.013332498844671E-11i 8.414882944130833E-7-1.474865887772725E-7i 2.3825912373355449E-4 -2.3574998083317168E-5 0 1.894658466824706E-9-2.509253493258218E-9i -3.087964953894068E-11-5.459107223740102E-11i 8.369209932848396E-7-1.477842198106435E-7i 2.4165029008072148E-4 -2.8694180844285002E-5 0 2.17599152151347E-9-2.2107169825588574E-9i -8.250158982912801E-11-2.553739103141004E-12i 8.039123214367347E-7-1.5001447373635505E-7i 2.4183187253779201E-4 -2.339884838712425E-5 -7.334067405022768E-6 6.475439841943976E-8-9.294815111092128E-10i -9.609092080099616E-11+6.787064179839667E-10i 7.959226687836524E-7-1.5369116343994717E-7i 2.3840578178366723E-4 -1.9511794915771252E-5 0 2.0235547091569894E-9-2.497376073057496E-9i -1.2172817562153358E-10-1.1531061319008419E-10i 8.338715551647767E-7-1.4860387407871895E-7i 2.40113612026354E-4 -3.716590866098082E-5 0 2.07339736403052E-9-2.423881014260846E-9i -2.832029292202049E-12+6.518404927542703E-11i 8.182644010352409E-7-1.476228923204348E-7i 2.4064837608722963E-4 -3.141191654873932E-5 -7.676296796380237E-6 7.1678020110555E-8+9.794892201058511E-11i -6.529891095321104E-10+1.2954023317653769E-9i 8.042945101518954E-7-1.52980487084584E-7i 2.4063864435464274E-4 -4.276319351867767E-5 -3.930478830694796E-6 4.00383143388247E-8-2.7282530728660794E-10i -1.3003786542746576E-9+8.403415258201143E-10i 8.085001775001489E-7-1.4816402735744202E-7i 2.4375299015935226E-4 -2.13253150973284E-5 0 1.2781500164656383E-9-2.4798983929648897E-9i -1.195683099446533E-10-1.3182414718547001E-11i 7.863144796062015E-7-1.5102986349705453E-7i 2.465993878446322E-4 -2.237283539110704E-5 -3.4837121078943725E-6 2.844537743088797E-8-2.688965924812261E-9i -3.636383787000129E-10+2.819368093581211E-10i 7.628606764877317E-7-1.5109676772098676E-7i 2.4229440018431935E-4 -1.8031473741150876E-5 -4.00491114889104E-6 3.550824123411285E-8-1.3074833727791466E-9i 1.1857995159929173E-10+1.461790264937926E-10i 7.966649528098019E-7-1.5180519507619243E-7i 2.464658384137765E-4 -1.51674098545877E-5 0 1.827084599800008E-9-2.0104061541057795E-9i -7.178196804745351E-11-3.343244445237263E-11i 7.652679037288519E-7-1.5117936148698316E-7i 2.4148256583204434E-4 -1.6159743191517163E-5 0 2.0358459782188742E-9-2.157470745461769E-9i -4.952535298457956E-11-5.0842738656339814E-11i 8.053888440611959E-7-1.5066132071584115E-7i 2.4848721547140735E-4 2.045281302204239E-7 0 1.5761336724783494E-9-2.043396722968617E-9i -2.7811522459150072E-11+5.1381457851732305E-12i 7.505925059485115E-7-1.509882647689691E-7i 2.481849974266952E-4 -1.7134925895767272E-5 -8.505501283082576E-6 6.322304139376862E-8-4.853534469361355E-9i -7.707460625638824...
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This document was uploaded on 01/24/2014.

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