H_75nm_L1_65um_D_10um

3622751308960403e 5 8599359699975771e 8

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Unformatted text preview: 1850343E-10+3.149258866749344E-10i 9.262485016143294E-7-1.269139592564029E-7i 2.303329055441158E-4 -4.9829773284699335E-5 0 4.7126157444281334E-9-2.786415084343047E-9i -1.7185932088244552E-10-6.694278621558782E-11i 9.571714262121121E-7-1.1731962210746912E-7i 2.301388772409043E-4 -4.844674472746595E-5 1.7999327960315332E-6 -3.7432387992534204E-8-1.573430771892488E-8i -6.062062400759816E-10-8.182687013257023E-10i 9.551905125722763E-7-1.2048733459753583E-7i 2.278307088160559E-4 -1.1664632120412819E-5 1.4488639277300623E-6 -2.915396792049158E-8-3.0457161338728E-8i -1.0723616274494562E-9+4.9760033415727025E-9i 9.66884813946136E-7-9.674294866564523E-8i 2.2886868654133574E-4 -1.309536073980513E-5 0 4.714388572969184E-9-1.9430985886849956E-9i 2.52633017381651E-10-2.4703453989402476E-10i 9.531762744164173E-7-1.0493118076107696E-7i 2.3559234640648232E-4 1.1505081683701475E-6 2.235827289223175E-6 -2.1304531652128933E-8-9.712101073239147E-9i 4.4233361789025915E-12-1.9113124530856125E-10i 8.579315831208979E-7-1.425872716713894E-7i 2.358084009954835E-4 -2.55118805639375E-8 0 1.979925322903991E-9-2.3740065610080165E-9i -1.4101245079983473E-11-4.0647759174764854E-11i 8.570124449172159E-7-1.4084265804814926E-7i 2.3694536800792482E-4 3.1985899689656E-6 0 1.863582876244069E-9-2.4646528793973218E-9i -1.0270674739290206E-10-4.4424443884539985E-11i 8.458949853147873E-7-1.439216587102859E-7i 2.3285590215146954E-4 -6.495265640588598E-6 0 2.625798694237913E-9-1.8027563268780294E-9i 1.2383413566764093E-10-3.341456278033552E-10i 8.904710069034657E-7-1.2963901145520482E-7i 2.3542187263581282E-4 -2.917113950193537E-6 2.7505283758309743E-6 -2.6939155853790712E-8-1.1627889318955748E-8i -4.794132536063867E-11+6.689675901511778E-10i 8.590445185656694E-7-1.4358300972884782E-7i 2.3624208141906014E-4 -5.05729623090015E-6 0 2.6525831412780568E-9-1.3326018938117331E-9i -7.10060707567008E-11-3.2856283094475694E-10i 8.528089476907446E-7-1.4284992178361375E-7i 2.3761557642718335E-4 -2.44091326774036E-6 0 1.9282532975592775E-9-2.2196317860436882E-9i -1.7737626061308845E-11-7.002697453617523E-11i 8.394715701986898E-7-1.4512637039113942E-7i 2.346141259816052E-4 -3.105332774038758E-6 0 2.0913960886695546E-9-2.395778485443611E-9i -2.5068047452169513E-11-2.374396478300264E-10i 8.698142298940696E-7-1.3679982394653928E-7i 2.306991552282067E-4 -1.1365408175789769E-5 0 2.537691618889585E-9-2.9376641512341155E-9i -3.572594656820043E-11-4.311512013337943E-10i 9.205685231291234E-7-1.2106907191973E-7i 2.381886380141233E-4 -5.326511543141447E-6 0 2.3173459901309024E-9-1.7805652636304057E-9i -1.119411172446061E-11-1.5961812332488702E-10i 8.343263499627942E-7-1.462505117528492E-7i 2.292119889302162E-4 -1.8240742856274454E-5 1.7866161491351473E-6 -3.086457862779629E-8-1.9062400267080007E-8i -2.497546837875713E-9+9.099696746979373E-10i 9.466375199193976E-7-1.2216873495860386E-7i 2.3166592637375032E-4 -2.0121382941852252E-5 0 3.7030514865609405E-9-2.1297958822601673E-9i 4.064732331476243E-11-1.246894722265997E-10i 9...
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This document was uploaded on 01/24/2014.

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