H_75nm_L1_65um_D_10um

3790577909938122e 4 6032829213359544e 6

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Unformatted text preview: 1.3281623975539887E-6-1.7340686972487262E-7i 1.5516463540523522E-4 -1.579611892544969E-4 -2.895322226971754E-6 3.270170602032084E-8-6.495114957906185E-9i -1.087158326028389E-7-3.498619474511952E-8i 1.326805445519484E-6-1.864366596480884E-7i 1.5402613439774763E-4 -1.5911956238358747E-4 0 2.4245478596744588E-9-1.8912864416665686E-9i -1.9131690876032737E-9+6.173144856416409E-9i 1.340416854511279E-6-1.8492713441855335E-7i 1.5481186879760263E-4 -1.6059474870364722E-4 -3.6937848439695625E-6 3.869277230699574E-8-8.645099036352448E-9i -8.31311405062509E-8-2.0169836544506556E-8i 1.2640838699999168E-6-2.0912705823893573E-7i 1.6001398456070906E-4 1.1231995890781843E-6 0 2.0878566811338607E-9-6.21220779148491E-10i 1.0183626215222628E-9+3.5069475103860014E-10i 2.0331087890613134E-6-2.529860083437951E-7i 1.5919433670589175E-4 2.749400205615194E-6 -2.6574019113796656E-6 5.8578839211755156E-8-7.591897903852494E-9i -8.176476826914603E-8-3.824364450101354E-8i 2.018777296746021E-6-2.7037141190677306E-7i 1.571358078405722E-4 1.4473681303903358E-6 0 1.7405781840413983E-9-8.643919916568586E-10i 6.959494720187138E-9+3.3574575151008535E-9i 2.095678266901948E-6-2.6018514283872854E-7i 1.5713567674543704E-4 6.422971689189327E-7 -2.250042552620064E-6 5.0647878690673715E-8-7.246836532599174E-9i -1.4858786613964055E-8-7.050524672289466E-9i 2.0561071066492713E-6-2.7854116786827966E-7i 1.6186279450299527E-4 -1.422322063243046E-6 0 2.0233709291853144E-9-5.583121761742699E-10i 2.3770240516435733E-9+1.0165633489514074E-9i 1.996559432972189E-6-2.475749904629028E-7i 1.6020002855130432E-4 3.021377886977711E-7 -3.7377523207859215E-6 7.950377651292021E-8-1.0772280844622611E-8i -7.12425429661603E-9-3.3320393018038623E-9i 1.951507170550967E-6-2.87310252374781E-7i 1.5910861276365553E-4 -1.0692467088000085E-6 0 2.123446869041768E-9-6.426074306803788E-10i 2.4292867646577643E-9+1.0746080747784156E-9i 2.051001789679949E-6-2.560477032795271E-7i 1.5803838706828654E-4 -2.2213906441771434E-6 -2.2011629051206414E-6 4.922998939593578E-8-6.748147962042965E-9i 5.671365939242579E-8+2.6648542022829906E-8i 2.051826604881615E-6-2.6926470650232065E-7i 1.5669560743635416E-4 -1.3717803346384699E-6 0 2.0663771739533733E-9-6.957234832648138E-10i -2.410487554658854E-9-1.3023510187710166E-9i 2.1041863845056624E-6-2.620465290225022E-7i 2.2611267340401386E-4 -3.662925116703565E-5 0 -8.434271543307001E-9-1.902482255852728E-8i 2.130950961670207E-9+1.6193921110999197E-9i 1.1205857717296275E-6-4.156905425122861E-8i 2.267052228807882E-4 -3.491469479292134E-5 0 1.3066673596716835E-10-9.814773147782835E-9i -1.0986722722097022E-9-6.678040710297236E-10i 1.0628401881154304E-6-7.60682707616185E-8i 2.2867503078562463E-4 -3.653568445804946E-5 0 2.575710246592495E-10-6.142334968175106E-9i 4.2807992335542736E-11+8.696927249543518E-11i 9.91174122979338E-7-1.0831573195756469E-7i 2.271269071632251E-4 -3.556526796199962E-5 -1.980783506439111E-6 7.930616977079863E-8+3.030066181799988E-8i 3.2408315995297263E-9+9.088204856488269E-10i 1...
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This document was uploaded on 01/24/2014.

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