H_75nm_L1_65um_D_10um

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Unformatted text preview: .118483329945545E-9i 3.5902142689655624E-7+1.6210193019157976E-7i 2.0738273865991864E-6-2.7229326179753434E-7i 1.568247774967574E-4 -6.6219204418901766E-6 0 1.048408019768648E-8+4.1924699245670355E-9i 5.87518110723005E-7+2.550893889005724E-7i 2.1005743309078462E-6-2.8361293720748776E-7i 1.562215378778994E-4 -6.504408738468812E-6 -1.3887175491427212E-6 3.7777075475530393E-8-1.2165644182627884E-9i 3.846324134055517E-7+1.7271615875398157E-7i 2.0956256237547582E-6-2.860620862083136E-7i 1.5518229807612218E-4 -6.7685709095866145E-6 0 8.967766551845272E-9+3.91747978952515E-9i 5.678344005002271E-7+2.49411709213771E-7i 2.1068082382009606E-6-3.002856980986067E-7i 2.2096359000599232E-4 -3.9254558193211414E-5 -2.1422188188511337E-6 2.689374150532953E-7+1.3515645286907232E-7i 1.700236881309924E-8+3.7358252074742634E-9i 9.855979924627854E-7-1.5889697986833937E-7i 2.2137032603685707E-4 -4.026945953564348E-5 0 3.2329620953214967E-7+1.781219694150665E-7i 1.4162022622790679E-8+2.5158204760634675E-9i 9.95905101891625E-7-1.522520312947886E-7i 2.2131123448786085E-4 -2.962316869104182E-5 0 2.7407070356236606E-7+1.7091386608333789E-7i 2.0464243814646893E-8+2.4231294389078036E-9i 9.900739657521174E-7-1.5608149957360586E-7i 2.2108954913569584E-4 -3.2296828881396046E-5 0 2.8429749955493724E-7+1.700918248352757E-7i 2.035525561130037E-8+3.0675770067289287E-9i 9.865111604271403E-7-1.5992843936948544E-7i 2.2163941465961698E-4 -2.983400020970092E-5 -2.722309651262679E-6 2.1848441461026305E-7+1.166499195867108E-7i 2.0788575025578508E-8+3.1918268067186334E-9i 9.879652855827242E-7-1.5373685582510525E-7i 2.213213045915162E-4 -3.750704991482014E-5 0 3.1159739831357165E-7+1.7584167387295488E-7i 1.6082941544061905E-8+2.814561563414114E-9i 9.95878845927608E-7-1.5285731333742963E-7i 2.2137771206577728E-4 -3.508784408273414E-5 0 2.99629053924607E-7+1.7353005546210047E-7i 1.6986118803394338E-8+2.720723815389759E-9i 9.927535046158261E-7-1.544384230910672E-7i 2.2178812907780145E-4 -3.6393739247426696E-5 -1.7322719349955282E-6 2.606464025013067E-7+1.3770639872013435E-7i 1.6101699556166367E-8+3.343546987560688E-9i 1.0031087499149608E-6-1.442253948417047E-7i 2.221690760576627E-4 -3.3710799178674024E-5 -1.6712537705041004E-6 2.467318270421352E-7+1.3461090405035792E-7i 1.5708600787809396E-8+2.82332023055925E-9i 1.0108658732768126E-6-1.3696449074143905E-7i 2.2281552485887637E-4 -2.4923253913958136E-5 -1.6840812959136262E-6 2.0013749966381646E-7+1.2531633971022674E-7i 1.6717652198497624E-8+6.684460829374132E-10i 1.0148315534248506E-6-1.257955429319429E-7i 2.2270707069521956E-4 -2.725997926574527E-5 -1.5857532829636152E-6 2.1531004689543548E-7+1.297000288486667E-7i 1.6780271995968973E-8+1.8232756627975739E-9i 1.0173533228286842E-6-1.2679416170464334E-7i 2.217766845078679E-4 -7.516203836412687E-5 -1.5127597277684597E-6 3.298800334483533E-7+1.4975902791377502E-7i -3.032966684523913E-9-9.392646542150355E-10i 9.915095827660157E-7-1.291976352873083E-7i 2.2196029032998363E-4 -7.557675050422998E-5 0 3.879746808932438E-7+1....
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This document was uploaded on 01/24/2014.

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