H_75nm_L1_65um_D_10um

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Unformatted text preview: 3.2223812591864003E-6i 2.5709574735499112E-5-6.90869286691464E-6i -1.0729080141166786E-4 1.5228575909087758E-4 7.170327290489747E-6 -3.8090233119507376E-6+1.109573003961704E-6i -1.6486221754749333E-5+4.151090080328999E-6i 1.9546909403874256E-5-5.467038097518659E-6i -1.222961607201176E-4 1.502692648136997E-4 7.672740972010695E-6 -3.295851250961549E-6+1.0143635848682486E-6i -2.323675792979052E-5+6.173333845194993E-6i 2.0128320531009715E-5-5.7497503657989476E-6i -1.3218775782331948E-4 1.479827108411614E-4 8.736616621798244E-6 -2.649684763020234E-6+8.449965564859869E-7i -2.6832306652349292E-5+7.368944172031637E-6i 1.808112268369817E-5-5.242204511864271E-6i -1.1560370118111706E-4 1.430766258130291E-4 8.37399381241917E-6 -6.694902580786896E-6+2.036857225940094E-6i -2.558513347356936E-5+7.006634844191715E-6i 1.4099308574642072E-5-4.270761351313741E-6i -1.7832183966584817E-4 1.5349209554458404E-4 4.764975288812848E-6 2.071799337080571E-6-5.982162352323577E-7i -2.0791133267591242E-5+5.3533409884738125E-6i 2.6341494507407052E-5-7.299279676035245E-6i -1.4776978907799813E-4 1.5098658072173373E-4 7.178951538663585E-6 -2.711529363881849E-7+1.1067217769519585E-7i -2.6324105457791118E-5+7.176282859940096E-6i 2.246381338224051E-5-6.4050345085605985E-6i -1.4093871816847812E-4 1.4694893276306746E-4 1.0806110838613083E-5 -1.4515831590770592E-6+4.814526064395435E-7i -2.7592030583435852E-5+7.705030877092183E-6i 1.6119436592268905E-5-4.648400806198163E-6i -1.3715953031617306E-4 1.4064178383590615E-4 9.492844031607817E-6 -3.0211106557877842E-6+9.885953968758973E-7i -3.2280955116151305E-5+9.242882518819832E-6i 1.2181090723871699E-5-3.618216252451177E-6i -1.5474814975024312E-4 1.480976306743589E-4 6.439348233098467E-6 7.225682422685734E-7-1.920196725035368E-7i -3.0596533592703046E-5+8.445302680753936E-6i 2.047052766655856E-5-5.988509136297127E-6i -1.523960231137682E-4 1.5218436282692557E-4 5.798903295739066E-6 2.6692179102719547E-7-5.2608999132014844E-8i -2.590043890460966E-5+6.957414226908622E-6i 2.5800157488951622E-5-7.297688154130017E-6i -1.7355812422194844E-4 1.5310538848850588E-4 4.9088835207624915E-6 1.8700685289955941E-6-5.399187713170629E-7i -2.2141473425538925E-5+5.77430439446511E-6i 2.6797182487219252E-5-7.463861440235328E-6i -1.6941981002327025E-4 1.5268202102801097E-4 5.581170950234924E-6 1.7452796828783643E-6-5.03494571931107E-7i -2.3469066804959387E-5+6.200522264794655E-6i 2.578692369957109E-5-7.231319765085842E-6i -1.6402367621728547E-4 1.5465022832956304E-4 6.2899618454353075E-6 1.0861504788346076E-6-3.074225457111872E-7i -1.975373542873925E-5+5.2576132914356175E-6i 2.628430100164986E-5-7.279916222185882E-6i -1.6228623169122676E-4 1.4950060390072714E-4 6.278001561798382E-6 1.5739539983770725E-6-4.551868071733007E-7i -2.8609569019540067E-5+7.790521596622124E-6i 2.187299069786745E-5-6.323390426126631E-6i -1.5798752419639514E-4 1.5281759496780617E-4 9.05911155652664E-6 8.890097804629711E-7-2.4354811355723917E-7i -2.214312301745239E-5+6.036255115231458E-6i 2.136000...
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This document was uploaded on 01/24/2014.

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