H_75nm_L1_65um_D_10um

409968333808716e 5 1392948832099697e 4

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Unformatted text preview: 687457E-9i -1.6558530571166279E-9-8.767490930310096E-10i 1.0102256594018272E-6-9.744323502118727E-8i 2.2190747176390155E-4 -5.2345682464591195E-5 2.6836308011232126E-6 -2.797903566866011E-7-1.319098286242522E-7i -7.289797460382801E-9-2.402423829287471E-9i 1.0056492655039097E-6-1.46346735883621E-7i 2.2584233546483565E-4 -5.249137632896078E-5 2.3655433763746773E-6 -1.4434491755379843E-7-7.143550097840891E-8i -2.7642871389828E-9-1.8088874994303989E-9i 1.0589678862454309E-6-9.235376734070869E-8i 2.2388380315698165E-4 -5.070697333493392E-5 1.5391260325211891E-6 -2.5677275775920043E-7-1.3332617099638812E-7i -4.410152098607107E-9-1.3793558245483331E-9i 1.0927181758566977E-6-9.281159151889528E-8i 2.224569460036555E-4 -4.8133639013933004E-5 2.7223914856070955E-6 -2.6164893491362865E-7-1.2617286402370547E-7i -8.278023072502097E-9-2.570615817312265E-9i 1.0171575872414958E-6-1.3879166492065503E-7i 2.2849764664918524E-4 -5.0200967856687184E-5 3.130448444203185E-6 -8.811430145454486E-8-3.581140475934133E-8i -1.1272989437137145E-9-1.3990351066823455E-9i 9.763706207616897E-7-1.1861346251209431E-7i 2.2914079732127757E-4 -3.0014743297196597E-5 1.6894253887751087E-6 -3.615576864394828E-8-1.849714780579616E-8i -2.1977481806243133E-9-5.537987586321327E-10i 9.62313998357506E-7-1.2197209097286357E-7i 2.3180367441109272E-4 -3.018812301903802E-5 0 2.624816058380058E-9-3.106561719050079E-9i 4.571767890847948E-11+2.0357841533774162E-11i 9.197336759537233E-7-1.323026592819124E-7i 2.370669239113369E-4 5.840029599110583E-6 4.902982919225264E-6 -4.491314892215125E-8-1.0789395698144125E-8i 2.81453394761117E-10-8.469983789059808E-10i 8.407418393548031E-7-1.4985888137458884E-7i 2.3929447679990032E-4 4.242203505281994E-6 0 2.0183691865173246E-9-2.1042584012698734E-9i -7.6154777107135E-11-1.0231163713932842E-11i 8.238614306440092E-7-1.4815340377034758E-7i 2.4132348531976725E-4 7.258920391043657E-6 0 1.9797648653870344E-9-1.983184898022491E-9i -1.8397064084532243E-11+6.746495750065819E-11i 8.063682259493938E-7-1.5008389751211245E-7i 2.3997952709615912E-4 2.8804875361783782E-6 2.9659405451379587E-6 -2.4289870920539144E-8-5.285252575963632E-9i 1.2469386833925678E-10-6.092435911022585E-11i 8.166516749511458E-7-1.5017958982364444E-7i 2.4325965328829448E-4 2.750751753733522E-6 0 1.7142889400883176E-9-2.142874579511142E-9i -2.088370847238251E-11+1.3635958974380497E-11i 7.901003975637529E-7-1.5103823667586706E-7i 2.476100542901637E-4 7.92562585136825E-6 0 1.6800185495136605E-9-1.9983758292936028E-9i -2.704007135986614E-11-7.392285227155046E-12i 7.570556450324172E-7-1.510800424233174E-7i 2.4703866518478826E-4 1.524811173171878E-5 0 2.2851861072337458E-9-1.7289538466400675E-9i 1.2941393193622446E-11+2.3559559370663757E-11i 7.605891819189917E-7-1.5120283979378367E-7i 2.4218243493456804E-4 1.2299311862067812E-5 0 1.902278152034162E-9-2.1041284615655733E-9i 1.3054911878815125E-11+5.430355544935062E-11i 7.986839051013755E-7-1.5124559692950446E-7i 2.4128144694123558E-4 1.192817530120124E-5 3.895757160...
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This document was uploaded on 01/24/2014.

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