H_75nm_L1_65um_D_10um

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Unformatted text preview: 67904194517E-7+3.0159967889385746E-8i 1.1570404753399454E-8-8.792492371914232E-9i 8.911482916643169E-7-2.649705099702032E-7i 2.365478710857194E-4 6.81924854516238E-5 -2.90071368894144E-5 2.2963132037136118E-7-1.575592213292481E-8i 3.1899870287464976E-8-6.240104151847426E-9i 7.357165225016357E-7-1.7276066613017787E-7i 2.1973353571259804E-4 7.439902946122079E-5 -2.893632955302146E-5 2.97046486471894E-7-6.65668744742308E-9i 4.558177858813129E-8-7.064923908136972E-9i 8.024902065532527E-7-2.101425892177349E-7i 2.2484965705140073E-4 6.52713645050962E-5 -2.9836932018993457E-5 2.832682863760604E-7-1.1985249199858638E-8i 3.460693351542757E-8-7.734701223831352E-9i 7.915252249890529E-7-1.9863901239686008E-7i 2.2977312216846803E-4 7.93958808849852E-5 -3.586877120827576E-5 2.817407452990482E-7-2.6098903231765006E-8i 5.318697150308301E-8-8.213892073241923E-9i 7.320758593670244E-7-1.8473400701003823E-7i 2.3388171705259633E-4 5.754624417839223E-5 -3.86721586638024E-5 2.9002981792110104E-7-3.4025649295000274E-8i 3.495293352498508E-8-8.511456746842786E-9i 7.300899040179249E-7-1.8232374325229433E-7i 1.5987563848645319E-4 -6.910594536259086E-6 -9.429595217967873E-6 1.9567620069472938E-7-2.7567250252051023E-8i 1.392688133734982E-7+5.977136287351067E-8i 1.7531893008411987E-6-3.7150217008414605E-7i 1.367844523599353E-4 -4.081444549988961E-7 -5.728214102438802E-6 1.5261979859687787E-7-3.493169809148966E-8i 1.3673380392642938E-8+6.369350193394578E-9i 2.419396972956296E-6-4.194654969088172E-7i 1.4415519688137793E-4 5.165907372927743E-7 -6.763369722827614E-6 1.6452203154660262E-7-3.3631672692356785E-8i -1.5500480799005766E-8-7.152330673460851E-9i 2.2035977193061895E-6-3.9223295117142504E-7i 1.3947158474419177E-4 -1.0331532266691186E-6 -6.77932502758408E-6 1.7409557364310679E-7-3.84551192546289E-8i 3.059111264604571E-8+1.413532054578096E-8i 2.3147523990460774E-6-4.186792705321115E-7i 1.4210963646471084E-4 -2.087669268678172E-6 -7.014202201876766E-6 1.7459439991006729E-7-3.68634043236628E-8i 6.101758940145736E-8+2.8038905458253454E-8i 2.2399493134908204E-6-4.0817630953454E-7i 1.1519944957372117E-4 4.611918942107082E-6 -4.216287558669853E-6 1.4908655535250067E-7-4.664252105044192E-8i -1.8573108630429956E-7-9.28813402066346E-8i 3.106036275329896E-6-5.844252490326878E-7i 7.543566700502508E-5 -1.0089191689486576E-5 -1.8144326081764758E-6 -1.2841092055020958E-8-1.830020579119907E-7i -8.015733763529782E-8-6.439826530799684E-8i 5.460711645719825E-6-1.1704590798806275E-6i 2.0047187572474473E-4 -1.272505842516166E-4 -1.5223972581462882E-5 2.106752216808853E-7+1.8251126967948975E-8i -1.2869770698117056E-7-2.7559905638499404E-8i 8.041753283716843E-7-2.409148454898452E-7i 2.0296081587625292E-4 -1.1894210224652364E-4 -1.3409726375510545E-5 2.296496944915293E-7+3.4277283800682276E-8i -1.0764723564150088E-7-2.321647025258138E-8i 7.981331967232995E-7-2.4693518580793355E-7i 2.0494506894710936E-4 -1.1688095527572954E-4 -1.9440143476417847E-5 2.504727072049016E-7+1.5685608588222037E-8i -1.0548310619534986E...
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This document was uploaded on 01/24/2014.

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