H_75nm_L1_65um_D_10um

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Unformatted text preview: 1.3707675027492537E-9i 8.691566633766697E-10-9.636437790983736E-10i 4.9269258136679E-7-1.188812577893528E-7i 2.6442308048649135E-4 1.8388215788674219E-4 -1.6660755430066906E-5 5.191992595546804E-8-1.227012535210251E-8i 2.5203647838702615E-8-5.1950818427508315E-9i 4.686984444383398E-7-1.1392002152818693E-7i 3.0E-4 1.9999999999999998E-4 -2.855251127051544E-5 5.941207124749301E-8-1.4665765268755979E-8i 2.829003762446733E-8-6.533830963142362E-9i 3.5464715438110534E-7-8.837816731610292E-8i 2.71414846445394E-4 1.8730539555209403E-4 -3.097127149588823E-5 8.71753928627845E-8-2.0495687984328706E-8i 4.1573000496745825E-8-8.639260347995692E-9i 4.3465133866517765E-7-1.0706302292342138E-7i 2.749909433753103E-4 1.9999999999999998E-4 -4.3343055080021E-5 1.0890306421359433E-7-2.6249742889580726E-8i 5.453238408492884E-8-1.1871109361529902E-8i 4.0038250742741264E-7-9.984566238705353E-8i 3.0E-4 2.0E-4 -5.712709271870705E-5 1.1657278608786815E-7-2.8490652244958075E-8i 5.425010435941411E-8-1.2309941805292449E-8i 3.357399903091573E-7-8.455224546095733E-8i 3.0000000000000003E-4 2.0E-4 -8.570167417496568E-5 1.652291656468861E-7-4.073073688019079E-8i 7.721473091401222E-8-1.7830793352475684E-8i 3.0746550886016444E-7-7.827436442143001E-8i 2.762792814002134E-4 2.0E-4 -7.331249976797008E-5 1.72613228000646E-7-4.210593008689378E-8i 8.571929238809069E-8-1.917734663610623E-8i 3.6566504241588786E-7-9.266859043727612E-8i 2.764258910648393E-4 1.9999999999999998E-4 -1.0094375988338755E-4 2.2241230293271759E-7-5.5038185529973476E-8i 1.093267405503918E-7-2.5193312698841896E-8i 3.2568834660760986E-7-8.370816872913051E-8i 2.7680960709006944E-4 1.9999999999999998E-4 -1.2813449294777886E-4 2.6004727795914885E-7-6.510954380464692E-8i 1.2705990809847484E-7-3.001624928768147E-8i 2.804349647864743E-7-7.291002581595684E-8i 2.6455793169438517E-4 1.8274200485200585E-4 -1.2229487352282927E-4 2.980223271532363E-7-7.398270876198022E-8i 1.378061619060807E-7-3.193229565281292E-8i 3.1769882178716683E-7-8.298215887884143E-8i 2.6353788697681843E-4 1.7914273212397958E-4 -9.751168354431799E-5 2.6328196248564357E-7-6.41162068091468E-8i 1.206200488457067E-7-2.6877634481379243E-8i 3.710635635280252E-7-9.580257700870777E-8i 2.5942776553080233E-4 1.7604062480034972E-4 -7.744709972127287E-5 2.317071386189347E-7-5.5093598033216875E-8i 1.0650041475578324E-7-2.2557830904663045E-8i 4.1965898369634494E-7-1.0707867465906504E-7i 2.5060952109975026E-4 1.9999999999999998E-4 -8.749051472107924E-5 2.4051316552643656E-7-5.914063861088E-8i 1.274347289325299E-7-2.844832442471023E-8i 3.9596539918138046E-7-1.0150886101536414E-7i 2.2663813717306951E-4 2.0E-4 -1.275893253406994E-4 3.650842807932616E-7-9.222187095637636E-8i 2.0395061793235416E-7-4.7958087073502306E-8i 3.487752026871111E-7-9.167333693628898E-8i 2.3332547039586337E-4 1.9999999999999998E-4 -1.041662112517165E-4 3.0940696784617244E-7-7.722906394638172E-8i 1.7094968407740428E-7-3.900280787913173E-8i 3.9584242753042706E-7-1.0279395407611964E-7i 2.245277130054391E-4 1.80521...
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This document was uploaded on 01/24/2014.

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