H_75nm_L1_65um_D_10um

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Unformatted text preview: 66879143886E-5 1.4644237109954255E-4 9.418051098431054E-8 3.574930475536142E-8+3.5114371688127477E-9i 1.0864447563818658E-9-3.4241249557975806E-9i 2.6859101696533745E-6-5.397849339481859E-7i 2.2632663805515393E-4 1.3889133784923674E-4 0 1.1095443697306712E-8+6.9121407297571495E-9i 1.5044424318454562E-9+5.491114852442541E-10i 8.289660285162986E-7-1.0065899108812747E-7i 2.25E-4 1.3961144106451007E-4 0 -6.485518889089536E-8-6.631017213699546E-8i 2.8629542553318177E-9+2.5114266296350843E-9i 9.102617544302106E-7-4.182735450965806E-8i 2.2820527729040853E-4 1.390901381522211E-4 0 3.2785996783354227E-9-7.753295258507848E-9i 5.736425040059682E-10-4.4790928743765337E-10i 7.775047259719339E-7-1.2149539036349485E-7i 2.2937420862873334E-4 1.4172297460925321E-4 0 3.3260931348120386E-9-6.517783813040958E-9i 5.999912830312083E-10-6.368017005780694E-10i 7.467414822003558E-7-1.289633757075889E-7i 2.2713310992972862E-4 1.410718854309046E-4 1.5100809466661726E-6 -2.729621857611004E-8-1.8839369791987558E-8i -7.804324374333227E-9-2.46512861000483E-9i 7.796792801915131E-7-1.240021629983303E-7i 2.2807884414088043E-4 1.44342727472386E-4 0 4.052384406792904E-9-7.99689834777087E-9i 5.320591733902827E-10-7.366433480565649E-10i 7.5060244355147E-7-1.274362510607997E-7i 2.2499999999999994E-4 1.3963035625422812E-4 7.500000000000001E-8 -2.522488982099977E-8-7.234957861913406E-8i -2.0226949054835073E-9-5.845931910736468E-10i 9.162126749445069E-7-7.186537024994686E-8i 2.2385163761426898E-4 1.4722633959609186E-4 7.500000000000001E-8 -1.1070300970064276E-7-5.628834361512006E-8i -9.167133666748706E-9-5.345901930456762E-9i 8.01223083791646E-7-1.4678667270640994E-7i 2.259925333360126E-4 1.471436500034844E-4 9.337459489467566E-7 -1.4712148113689196E-8-2.3876694175470367E-8i -6.4890761501086466E-9-2.4788461418784094E-9i 7.710690474969194E-7-1.2244670761356267E-7i 2.234277068861537E-4 1.4574954667630788E-4 7.500000000000001E-8 -1.2171254456002043E-7-6.2378256057589E-8i -1.5353220795116345E-8-6.719622864502968E-9i 7.93655912037456E-7-1.4700489352415354E-7i 2.2788086800389952E-4 1.492208606422221E-4 0 4.232796369554566E-9-9.132943735274628E-9i 7.465036842586176E-10-1.3535951684170989E-9i 7.264118710573071E-7-1.3265925979526334E-7i 2.2765675344552653E-4 1.4520147077268613E-4 1.6967575911239883E-6 -2.223474422039396E-8-1.5634963616733486E-8i -9.20085724492442E-9-3.1260978968896863E-9i 7.488568315477145E-7-1.3129653017393004E-7i 2.285157157365675E-4 1.4686917029098942E-4 0 3.269373457026281E-9-7.823343341748813E-9i 7.623371713470276E-10-1.0715351238998631E-9i 7.316264165582774E-7-1.317685331744597E-7i 2.3119575023827888E-4 1.450888847613029E-4 0 3.141719094216589E-9-5.330915234288294E-9i 1.1491728752278864E-9-7.549731925178857E-10i 7.109656446625464E-7-1.3556657173147732E-7i 2.2656296681794976E-4 1.5262681261963852E-4 0 5.763173833741737E-10+1.1801416507861803E-9i 1.2396870605915843E-9-2.0197840982434115E-9i 7.208888080054619E-7-1.3375143954516274E-7i 2.2446939624562212E-4 1.5633791599616015E-4 0...
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This document was uploaded on 01/24/2014.

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