H_75nm_L1_65um_D_10um

4536602220389255e 6 11943385990675965e 6

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Unformatted text preview: 185266359914E-8-1.9367413762803882E-8i 5.167051445214371E-6-1.1774518127222373E-6i 7.593742146312116E-5 1.4735391832737679E-5 -1.5131728098793436E-6 -1.5403934462651128E-7-2.3765042637634552E-7i -2.466858902215694E-9-6.797204838964051E-9i 5.431671011440055E-6-1.1422516605119658E-6i 6.678012999986686E-5 1.2175577453532375E-5 -1.7662872542392413E-6 2.0321675330391763E-7-7.250507749782035E-8i 4.406528373412332E-8+2.9117668637401835E-8i 6.2591689186806895E-6-1.4056020124467417E-6i 8.048231495505598E-5 2.1936720876492242E-5 -2.0454467094158333E-6 -2.4820426954196587E-7-2.588657994748803E-7i -5.3550158496628874E-8-3.6340484217638494E-8i 4.672364882341414E-6-1.1902432753392412E-6i 8.198346579784096E-5 2.010010746134016E-5 0 -4.397218098723237E-7-2.2957537729991005E-7i -1.0672258742355973E-7-4.450553137190592E-8i 4.469370598827335E-6-1.2238114013007194E-6i 8.13533070332399E-5 2.4693326221321104E-5 -2.0451470954764247E-6 -2.7578094021257887E-7-2.6269211305941144E-7i -5.343194090532535E-8-3.6979801703682915E-8i 4.537077650791014E-6-1.1847679291338857E-6i 8.225565632323012E-5 2.308050141631313E-5 0 -4.72404695364974E-7-2.416956646513944E-7i -9.722773701402194E-8-4.0418441092497126E-8i 4.404158561660365E-6-1.2187180231263772E-6i 8.654347921699873E-5 2.469966299572828E-5 0 -3.9398577779024953E-7-1.9059729505363615E-7i -1.444436954477343E-7-5.806380598472425E-8i 3.962538258967699E-6-1.1925785883926399E-6i 8.759459825536848E-5 1.4216610626121404E-5 0 -2.0528840429142887E-7-1.0753333090595675E-7i -2.5869038997011936E-7-1.1301657282725752E-7i 4.0656694228797175E-6-1.1561662316236638E-6i 8.435955464493561E-5 2.0561987674622096E-5 0 -3.837013311592638E-7-1.9575463214384225E-7i -1.4126047246176846E-7-5.853550678467811E-8i 4.225002654596133E-6-1.208976179088295E-6i 8.371100669104489E-5 1.686470944411693E-5 0 -3.3483799742427397E-7-1.77371021537788E-7i -1.5547312238049413E-7-6.525237781696198E-8i 4.339595052118965E-6-1.2117655291504966E-6i 8.131316663802003E-5 1.8895850386315965E-5 -2.7098573734112632E-6 -1.2478179677657218E-7-2.3580925106002568E-7i -6.786932304770294E-8-4.3816775546666963E-8i 4.618454070427943E-6-1.1862858889892837E-6i 8.204605868351087E-5 1.4473913507856033E-5 -2.7394375136230567E-6 -4.136460027251179E-8-1.9718331618645734E-7i -9.601299311725595E-8-5.154835444033613E-8i 4.596976709466442E-6-1.1816727405513408E-6i 8.05998157306867E-5 1.6063023735195045E-5 0 -4.014682734860315E-7-2.2164446340683523E-7i -9.65609504460884E-8-3.956445671578411E-8i 4.681127605237204E-6-1.2268188800686225E-6i 7.953594107065469E-5 1.6323310972349992E-5 -2.648305493413845E-6 -9.340816511186635E-8-2.3375137819709655E-7i -4.8098451403018084E-8-3.297843645780342E-8i 4.859182608915733E-6-1.1888048136752751E-6i 7.72252831491263E-5 2.8571965358156844E-5 -2.2895639337855943E-6 -2.4516877529164913E-7-2.8874235574075535E-7i 2.411191426348389E-9-2.176906311995753E-8i 5.059020841106887E-6-1.1342500949927032E-6i 7.700693672863555E-5 2.6285611203820767E-5 -2.7968126149579564E-6 -1.3982251573212116E-7...
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This document was uploaded on 01/24/2014.

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