H_75nm_L1_65um_D_10um

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Unformatted text preview: 851753E-9-2.117233166629418E-9i 9.178208168188663E-11+1.2567493741102087E-10i 8.216941023651814E-7-1.4456760026970864E-7i 2.3850137931413204E-4 -5.140225934243992E-5 0 3.7474590534625E-9-1.846814768473154E-9i 3.434973491940541E-10+2.443922683060853E-10i 8.308471070138404E-7-1.431385623003422E-7i 2.464658384137765E-4 -1.51674098545877E-5 0 1.8507630975298992E-9-1.9511876531518967E-9i 3.26786468456857E-11-1.9277607331627534E-11i 7.649995832913263E-7-1.5129296288434183E-7i 2.5022909748903153E-4 -1.9713487492012313E-5 0 2.03883193861023E-9-1.791346870913873E-9i -1.2580330951875716E-10-4.1465348954510175E-11i 7.373552845766174E-7-1.4994210139656037E-7i 2.5444547804770397E-4 -1.3578502656693976E-5 0 1.7911254462962709E-9-1.793388687987979E-9i -4.679261443379587E-11+7.340185034103365E-12i 7.089496303058913E-7-1.4851499266731924E-7i 2.5252161470526864E-4 -1.0691059188467581E-5 3.5619035435923547E-6 -2.198023208905814E-8-6.183763237082522E-11i 1.8351932891861553E-10-1.391075895232392E-10i 7.211555737107221E-7-1.4990559384642988E-7i 2.62927727295873E-4 -9.165642176056714E-6 0 1.7645416883435508E-9-1.618457176261255E-9i -2.0762032457108312E-11+1.0050261629622468E-11i 6.581058081520761E-7-1.4316086692287494E-7i 2.624289832881052E-4 -1.6418477245991754E-5 0 1.6917411798852195E-9-1.635708137191603E-9i -2.772850892122364E-11+3.407143496216805E-11i 6.603491131348308E-7-1.4320205856211924E-7i 1.9053338643143232E-4 1.6817936092530377E-4 0 2.238583424659027E-9-1.4684426091452825E-9i 3.5264937522500118E-9-2.4792602718988334E-9i 8.796846960269656E-7-1.7561447884966594E-7i 1.979401770333366E-4 1.630173876735343E-4 2.703780108095194E-6 -1.8783401628295773E-8+2.789127842976019E-10i -2.380105778416308E-8-1.0758339549632392E-8i 8.659165353658331E-7-1.6161005618686E-7i 1.9571808526085865E-4 1.6580457483558638E-4 0 1.7426439761010271E-9-1.5961561536676374E-9i 2.620905097117099E-9-3.211785446595613E-9i 8.607349053208512E-7-1.6714879680502923E-7i 1.9348224664865826E-4 1.628535817812632E-4 4.347391180106823E-6 -3.207130188388011E-8+1.831508915327796E-9i -4.111711198286888E-8-1.4737875140780783E-8i 8.956818455156389E-7-1.676325290965439E-7i 2.010722943623049E-4 1.694776305864086E-4 0 1.93131072588466E-9-1.549809144399964E-9i 2.759422233532213E-9-2.619092608225093E-9i 8.004517999726109E-7-1.6589216445942315E-7i 2.3827422780493642E-4 1.6202515749803279E-4 0 2.090605102278446E-9-2.3937744402155583E-9i 1.3100925387409787E-9-1.4582137013227834E-9i 6.136773792281941E-7-1.3778000107741964E-7i 2.2433432737558858E-4 1.6511389963084515E-4 3.8005185679336975E-6 -1.9727377509618176E-8-1.857959721765385E-10i -1.2077364907641514E-8-3.764128714501835E-9i 6.770033255741505E-7-1.47638138185626E-7i 2.276415533988767E-4 1.6689350131582174E-4 0 1.6718440532151161E-9-2.427662352061439E-9i 1.3921528137108043E-9-2.4640012714373643E-9i 6.540443133969647E-7-1.447468209639081E-7i 2.1865635462170306E-4 1.6466831388081948E-4 3.932062312284899E-6 -2.2529171467132302E-8+3.4524182035532905E-11i -1.577675607008885E...
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