H_75nm_L1_65um_D_10um

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Unformatted text preview: .2477464730189155E-6 5.1075283876276316E-8-3.4903168734272197E-9i 1.7344937527936082E-8-7.59383450842913E-10i 6.717840235679052E-7-1.38187486646702E-7i 2.3728644601086666E-4 1.2582414654077666E-4 -7.2170110180491775E-6 6.199518155704799E-8+4.828629708174676E-11i 1.9887502291107025E-8+6.977413029651383E-11i 7.090051406448084E-7-1.388980865538463E-7i 2.375922623616725E-4 1.4377999083752614E-4 0 2.250581711704158E-9-3.6045338663488246E-9i 6.415237621845781E-10-9.34913872736633E-10i 6.6673391914716E-7-1.3758860765258635E-7i 2.3709558294136406E-4 1.4229339463669714E-4 -3.7667580196929246E-6 2.794470687077062E-8-3.483745054990152E-9i 1.1652147837683571E-8-4.1388324879088474E-10i 6.723074982883442E-7-1.3767132169715596E-7i 2.308153118160419E-4 1.0321130778078585E-4 0 1.6784421271462749E-9-4.857188260395014E-9i 6.70944772613799E-10+1.1309739039386257E-10i 8.696831993474957E-7-1.1514189660708752E-7i 2.314017663735074E-4 9.852473296808933E-5 0 1.499000321059877E-9-4.578835949070256E-9i 5.143220854498523E-10+7.474439863157552E-11i 8.687315082173548E-7-1.1846469836321902E-7i 2.3107487350258702E-4 9.866066720611345E-5 -2.9826773139563235E-6 5.8379271451291405E-8+1.0442475355225479E-8i 7.933922045774216E-9+2.2837110835588777E-10i 8.649122172827284E-7-1.2053692469238586E-7i 2.3055580207207544E-4 1.0104688122432332E-4 0 3.746972095468816E-9-3.904921316313058E-9i 1.920765518118242E-10-9.488851914012147E-11i 8.810980317329934E-7-1.1317327924794797E-7i 2.3401461571954577E-4 1.017093119226135E-4 0 1.8836833910691523E-9-3.7763915059866685E-9i 5.301730350346842E-10-4.445563571489157E-12i 8.195839906308757E-7-1.2779407342157845E-7i 2.3181836777086618E-4 1.0293815409764298E-4 -3.6267925257240057E-6 6.247499441656187E-8+1.0173465157996207E-8i 1.0085137703362858E-8+3.660484668276195E-10i 8.377322923644403E-7-1.2560990669871798E-7i 2.3491995630764643E-4 9.6297512260998E-5 0 6.360017779078508E-10-4.058695961273226E-9i 3.729688925677113E-10-3.561155406706983E-11i 8.19051212318072E-7-1.3010521162307197E-7i 2.36340320346365E-4 9.408761647199573E-5 -3.4610808870380945E-6 4.2964029231449866E-8+2.5395625725647144E-9i 7.033053446356488E-9-3.416590451359532E-10i 8.008107681704274E-7-1.3463017544950147E-7i 2.3441773222791348E-4 9.892101770671703E-5 -4.191980909114031E-6 5.669993657008376E-8+5.818048026876954E-9i 9.889751132150659E-9-4.417003901036661E-11i 8.109104902242261E-7-1.3235426590395174E-7i 2.322281619105395E-4 1.0546636789616322E-4 0 8.370483434812533E-10-4.791456194832443E-9i 1.169939055634963E-10-1.8005383195924277E-10i 8.37476051068999E-7-1.2227974594285835E-7i 2.3394060485439067E-4 1.0760368479636486E-4 -3.0437823569192683E-6 4.26126474098726E-8+3.7549141359149475E-9i 8.41834522695374E-9+1.694658821230861E-10i 8.004886286805079E-7-1.2994977409017433E-7i 2.3229589646833537E-4 1.0884079106927428E-4 0 1.7031186652118833E-9-4.441094387338898E-9i 5.526317424896256E-10+4.4556651662523705E-12i 8.268713574947006E-7-1.2312630624610946E-7i 2.3072410504621882E-4 1.07055061153454E-4 -3.91748...
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This document was uploaded on 01/24/2014.

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