H_75nm_L1_65um_D_10um

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Unformatted text preview: 08818542016E-6 7.5E-8 -1.534047613137999E-8-9.756188405464711E-9i 5.591999596703967E-7+2.415851783486591E-7i 2.1038377893337575E-6-4.262579943475751E-7i 1.446803567410495E-4 8.356871827706747E-6 7.500000000000001E-8 -1.160977117926673E-8-7.803653728771317E-9i 5.797802172840765E-7+2.545262619609497E-7i 2.2032070139461276E-6-4.050086130366451E-7i 1.47466056970238E-4 1.0814836880490073E-5 7.500000000000002E-8 -2.1807274678676115E-8-1.3134987897976788E-8i 5.334037888257297E-7+2.2537722649714203E-7i 1.986742987454831E-6-4.5484156258787995E-7i 1.4908764191798966E-4 1.150172854086399E-5 7.500000000000002E-8 -2.568100592907303E-8-1.506941065824808E-8i 5.188122464034318E-7+2.168780018750685E-7i 1.9225387351488985E-6-4.583166405241776E-7i 1.5438921257784904E-4 1.0806133418112229E-5 7.500000000000001E-8 -2.510651651844604E-8-1.443105481380273E-8i 5.059657876249094E-7+2.1113896031318592E-7i 1.8452523929441733E-6-4.20081545066715E-7i 1.5436500131453402E-4 1.0108737362739898E-5 1.7387935190170858E-6 -5.4712239199643344E-8-5.345706720821046E-9i 4.3267087714075276E-7+1.8292237973312856E-7i 1.8927646369488126E-6-3.963144024201594E-7i 1.5643186073530509E-4 9.387218336636379E-6 7.500000000000001E-8 -1.93854676789014E-8-1.1405440095878716E-8i 5.134279817214486E-7+2.1748237496563468E-7i 1.8820450943714505E-6-3.797020778463394E-7i 1.5607864645045158E-4 1.151518863297167E-5 7.500000000000001E-8 -2.9273491827128144E-8-1.6481398131787568E-8i 4.895771432986879E-7+2.018920613394347E-7i 1.7857009164783899E-6-4.2303861649258546E-7i 1.5421887661222326E-4 1.3563290421055997E-5 7.500000000000001E-8 -3.5600617195247867E-8-1.9819746878313586E-8i 4.7360659050365445E-7+1.911033009513974E-7i 1.7431394342264447E-6-4.620976983819451E-7i 1.5785675697826016E-4 1.0773397406364557E-5 7.500000000000001E-8 -2.6831947251652868E-8-1.519753851970973E-8i 4.929318408413527E-7+2.0450212665531148E-7i 1.78158589571785E-6-4.0370573609865784E-7i 1.5263985439340765E-4 1.1472468169277598E-5 7.500000000000001E-8 -2.6787336052128705E-8-1.5294804173791073E-8i 5.031038764558208E-7+2.0885580221991114E-7i 1.8522544246481652E-6-4.393806917902848E-7i 1.5089992893935553E-4 1.0720550236987518E-5 7.500000000000002E-8 -2.1889490724464824E-8-1.279367176705891E-8i 5.235095681908243E-7+2.2040219759438884E-7i 1.9257771348246972E-6-4.3238344195479417E-7i 2.2690505540274043E-4 4.204832702260034E-5 0 1.763757020895144E-8+4.639432306164201E-9i 2.319014414875109E-9+2.027741830927058E-9i 1.0616711386070336E-6-8.018061241118725E-8i 2.2875558540478948E-4 4.1020184196306696E-5 0 5.2703784302813965E-9-2.8227640530998493E-9i 6.193508437233111E-10+4.662691843412316E-10i 9.928189494809615E-7-1.0745688296838784E-7i 2.2772565558929113E-4 3.863727074971811E-5 0 3.454953496320241E-9-5.245040933640668E-9i -1.3347253100970283E-10-8.664029007917511E-11i 1.0255864453833832E-6-9.367256574653538E-8i 2.3057038751295273E-4 3.8913590833957305E-5 0 7.732244360417195E-9-5.170568415582548E-10i 1.2476639857294153E-10+1.2016838474360532E-10i 9.497426410601796E-7...
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This document was uploaded on 01/24/2014.

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