H_75nm_L1_65um_D_10um

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Unformatted text preview: 2015E-6i -7.587149141618249E-5 1.418423616401863E-4 -1.2318677493034508E-6 9.258532491240173E-6-1.6957339748265715E-6i 1.955003328234055E-6-4.72928790700225E-7i 2.4473712045768384E-5-6.2780973442786575E-6i -7.695807911284216E-5 1.422475130148027E-4 0 1.2945474637302064E-5-2.2924110500745346E-6i 1.910363295222424E-6-4.185626914216911E-7i 2.279400475149961E-5-6.189112370342498E-6i -7.709678276260683E-5 1.4853845759712613E-4 -1.2135090456861903E-6 5.6205812950564645E-6-9.570411591107096E-7i 2.7176125321608407E-6-5.539917324512076E-7i 1.8576270378384795E-5-4.98470723153295E-6i -7.83675329337325E-5 1.4932823461693168E-4 0 5.683174199741254E-6-9.383282798503759E-7i 3.343323793685843E-6-5.91230709683235E-7i 1.7613697914891303E-5-4.972343813272112E-6i -7.729109930821263E-5 1.4472225685385125E-4 -1.330175373300569E-6 8.551448143579329E-6-1.57678252684207E-6i 3.0018677800150946E-6-6.727218967817926E-7i 2.0371628112013246E-5-5.515111380725478E-6i -7.883955644850629E-5 1.467835094271688E-4 0 8.210365140287612E-6-1.464122013067684E-6i 3.6640157640571713E-6-7.244938933018141E-7i 1.8330857428005064E-5-5.266257893485464E-6i -7.648961501385448E-5 1.468742848484552E-4 -1.735553006136393E-6 6.059518335979406E-6-1.0831481507105963E-6i 2.597587465172544E-6-5.770653816151887E-7i 1.9574081815238113E-5-5.163365032189641E-6i -7.527082231675655E-5 1.4393989823518964E-4 -1.5021431063605435E-6 6.176344393567982E-6-1.1139562927311357E-6i 1.8198127556815423E-6-4.3600857610216093E-7i 2.2791722034245797E-5-5.777416712007928E-6i -8.495171587531784E-5 1.5118578868808584E-4 0 3.500291559503193E-6-7.424331947674896E-7i 9.695372313166673E-6-1.769934896450944E-6i 1.8083746900223564E-5-5.214187284515839E-6i -7.97309988060591E-5 1.5165727601389726E-4 -1.42600116152038E-6 3.4794931603761217E-6-6.595678943609686E-7i 4.6404954065843514E-6-8.384042951626676E-7i 1.718692071521347E-5-4.704193902552403E-6i -8.005250533979911E-5 1.5088007040492038E-4 0 4.038120213914475E-6-7.143680261098573E-7i 5.047862876930709E-6-8.426978923004036E-7i 1.7134441382662687E-5-4.882600593826146E-6i -8.245936742068866E-5 1.5135062597899343E-4 0 3.504582219976241E-6-6.852521765152328E-7i 7.279847704533659E-6-1.255051079666687E-6i 1.7634601512535813E-5-5.0275131420567565E-6i -8.102054470714637E-5 1.4898630763788764E-4 0 5.822670883626664E-6-1.1073458159605494E-6i 5.808922058229045E-6-1.08710402501692E-6i 1.7160567510962525E-5-5.043303648535483E-6i -7.408544254636681E-5 1.4511973613896216E-4 -1.8148793525740345E-6 3.5692978586909785E-6-6.834301895674492E-7i 1.588318535094752E-6-3.8810644534352937E-7i 2.069509739067418E-5-5.257070721916869E-6i -7.106898858469339E-5 1.4618545159626126E-4 0 -2.082259387137242E-8+2.227470380983871E-9i 2.192816722337534E-8-2.2059536694232463E-8i 1.7901408445051344E-5-4.599129932677145E-6i -7.1311059541831E-5 1.4370722524656974E-4 0 3.240017982570292E-8-7.53321672907809E-9i 4.942876374061119E-8-2.7699064682779682E-8i 1.9442840906132874E-5-4.982744031859028E-6i -7.208497882461775E-5 1.4450071466508513E-4 -1.444621...
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This document was uploaded on 01/24/2014.

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