H_75nm_L1_65um_D_10um

5596173721375375e 4 10415047299191954e 5

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Unformatted text preview: 2.166851268256157E-8i 2.0383768964019263E-6-3.1173727543045375E-7i 1.0308625801223947E-4 -1.5783965873252616E-4 -1.218622131146036E-6 1.7920608043805093E-8-9.171031256754078E-9i -6.244385603442852E-8-1.3971635474720653E-8i 1.972467896649057E-6-3.427028945462059E-7i 1.0682312441693933E-4 -1.5693731728790296E-4 0 1.6719701914202217E-9-3.4361510474363124E-9i 6.733685159523532E-9+1.708244440259271E-8i 1.990641344527842E-6-2.9645797890552864E-7i 1.0505515415313285E-4 -1.562977843185932E-4 0 3.512272774545083E-9-2.499394618512613E-9i -8.551082212265354E-9+9.814194224345606E-9i 2.0684953668779082E-6-2.7893899388966304E-7i 1.040121615942624E-4 -1.5651207487188046E-4 -2.4766887340950074E-6 3.224955316789568E-8-1.6380024944347513E-8i -1.5105583279827786E-7-5.1290461814912944E-8i 1.974355975392802E-6-3.4144453133720614E-7i 1.0610968699462096E-4 -1.5747688449961684E-4 -2.53115900807407E-6 3.354520205947446E-8-1.565785379996032E-8i -1.209040430400822E-7-3.4802755004802566E-8i 1.9174347575330614E-6-3.377796408962618E-7i 9.808733207582307E-5 -1.569454074229729E-4 0 2.67535086876197E-9-3.122645461712596E-9i 5.061295645008751E-9+1.7084346726888444E-8i 2.0926741357361137E-6-3.504877859991451E-7i 9.870123484129721E-5 -1.571093933221222E-4 -1.7080217714657628E-6 2.3595636966552474E-8-1.3052083558957939E-8i -9.463576785776778E-8-2.7017969756141614E-8i 2.0468079361926373E-6-3.646685815705773E-7i 9.122029976778839E-5 -1.569080952226278E-4 0 2.5265290601837742E-9-3.0446806976655583E-9i 3.919949724663005E-9+1.8241637482767532E-8i 2.1790078823459094E-6-3.972976250193112E-7i 9.17919028944783E-5 -1.5685423764421445E-4 -1.8456041012380306E-6 2.4554529868534398E-8-1.6185817808633663E-8i -9.622048923220198E-8-2.673766830351444E-8i 2.1409706189180544E-6-4.111978360815517E-7i 8.262711940951446E-5 -1.5688285894469915E-4 0 2.7531913063797873E-9-2.808184896451642E-9i -3.335547569703265E-9+1.2797695516167384E-8i 2.2793094107485137E-6-4.7236309185504717E-7i 8.077960818725462E-5 -1.5698025767757958E-4 0 3.0577382755433056E-9-2.4537263286032265E-9i -5.208340283363588E-9+1.308708960934731E-8i 2.2970392504778893E-6-4.97149342035937E-7i 8.110791878936472E-5 -1.5663738903569038E-4 -2.0140523654624552E-6 2.755092319635228E-8-2.099691295578004E-8i -7.009175612051471E-8-9.619472567993525E-9i 2.288273346802821E-6-4.982391841204445E-7i 8.143487143391413E-5 -1.5890364733220808E-4 0 3.0402299315210324E-9-2.372301279203459E-9i -3.402745804917395E-9+7.958224606391396E-9i 2.2328517873461726E-6-4.986728708282578E-7i 8.292451825291597E-5 -1.5920097140371858E-4 -2.1271645931250758E-6 3.4720009253636865E-8-1.7840066109629794E-8i -5.6158321251667066E-8+1.5762290497707092E-9i 2.196320101593681E-6-4.90839830702908E-7i 7.98552950700447E-5 -1.5862652896752515E-4 -2.1322766200506447E-6 3.569695178469501E-8-1.8779963946744648E-8i -5.471675458137208E-8+3.2898945829264296E-9i 2.2578928548133445E-6-5.136409811219076E-7i 7.383171467766449E-5 -1.5427778664360383E-4 0 2.5353247359433544E-9+3.6781061444420753E-9i -3.28763898903...
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This document was uploaded on 01/24/2014.

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