H_75nm_L1_65um_D_10um

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Unformatted text preview: 803531236E-7i 2.2696017379614047E-4 -1.4322762371075414E-4 -4.1785076742746136E-6 6.18123262140617E-8+9.244739318073751E-9i -2.426037485533736E-8-4.386435757383526E-9i 7.447626518858643E-7-1.3338837160026136E-7i 2.2518367141814388E-4 -1.4230069889138613E-4 -2.4424931873804134E-6 7.422076512391405E-8+2.2194507437942632E-8i -2.066500186785675E-8-5.469036583590566E-9i 7.81245359940661E-7-1.209006853288482E-7i 2.2505685287296388E-4 -1.498386973134002E-4 -2.9838115443488315E-6 4.794052195395525E-8+7.124344305705175E-9i -2.472870681021719E-8-5.766627248573578E-9i 7.350930224521442E-7-1.3216408728175793E-7i 2.25385439950001E-4 -1.4720345824646673E-4 -3.6898230906241963E-6 5.9456083842141395E-8+1.051020173695501E-8i -2.6882634131846054E-8-6.019729878921816E-9i 7.405678167214855E-7-1.3375600705749596E-7i 1.914243581271138E-4 -1.5570761012610767E-4 -2.0804127665122084E-6 2.498887896537898E-8-2.571793569528273E-10i -1.1254192268271943E-7-4.4534783142652586E-8i 1.0319575578984696E-6-1.2348264024560738E-7i 2.2383003505692796E-4 -1.0694532138019013E-4 -7.660567056521564E-6 1.9010400283632513E-7+5.251025359460171E-8i -3.086780436484772E-8-4.094828383433997E-9i 8.445339214135978E-7-1.4971483072199268E-7i 2.2427154141535564E-4 -1.0460764832793482E-4 -8.757355660001602E-6 1.89602536816424E-7+4.7306191389203286E-8i -3.1710688344422276E-8-3.3992127706491482E-9i 8.383215168021749E-7-1.5338729362221817E-7i 2.253210689511815E-4 -1.0361024122455088E-4 -6.365299074448808E-6 1.7462646554251318E-7+5.097533829969292E-8i -2.3435904280134748E-8-2.796784485167153E-9i 8.694736591811913E-7-1.3585168060666064E-7i 2.2361033305712282E-4 -1.0307451651815223E-4 -4.649930955643758E-6 2.0670296195743365E-7+7.362297000456471E-8i -2.1077360795487657E-8-3.7182553653440987E-9i 9.001965057209618E-7-1.2989324170439115E-7i 2.2477989216465472E-4 -1.0645217610178688E-4 -5.477925068877112E-6 1.7651225467456559E-7+5.5911192502342225E-8i -2.271034894743232E-8-3.2833982034018013E-9i 8.763596087122467E-7-1.3143941421388335E-7i 2.2506596273150445E-4 -1.105150207617362E-4 -2.6766369789615065E-6 1.6296236825586468E-7+6.247324574340439E-8i -1.3818363582173244E-8-2.6773580616975723E-9i 9.326607739313676E-7-9.718248716756019E-8i 2.2493268938704683E-4 -1.3725999738583374E-4 -1.5692847825906538E-5 1.3791404210865947E-7+3.2978880385039984E-9i -6.183255481765069E-8-5.2523775388775716E-9i 7.183317378854387E-7-1.605299762479178E-7i 2.2508967687450324E-4 -1.3389439230469105E-4 -1.1680788529893765E-5 1.3026255413101305E-7+1.370644643216288E-8i -5.15315000243417E-8-6.3674340469572155E-9i 7.401964665493832E-7-1.5585656886166884E-7i 2.2517295188353173E-4 -1.3052441230671413E-4 -1.5587262932828462E-5 1.515607920498588E-7+8.121203516802181E-9i -5.935741150310847E-8-4.8430735750701315E-9i 7.317477139967042E-7-1.627319630704419E-7i 2.24161714856225E-4 -1.23084522504537E-4 -2.258494671429404E-5 1.9498276361310628E-7-1.7833214282614104E-9i -7.169324623900492E-8-1.5974799504935306E-9i 7.270132702583267E-7-1.744780570177246E-7i 2.25...
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This document was uploaded on 01/24/2014.

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