H_75nm_L1_65um_D_10um

5743148194800123e 4 2366981488749388e 6

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Unformatted text preview: 04753724821296E-8-9.708518769674986E-9i 1.1537577288306834E-6-2.1770584488885048E-7i 1.6147773739959975E-4 -1.693430091733211E-4 0 1.8685309162119826E-9-1.799956102875017E-9i -1.1872373556716998E-9+3.735933527496433E-9i 1.0958285719466736E-6-2.180866878437573E-7i 1.6680393690093946E-4 -1.68763793086291E-4 -4.070427647642102E-6 3.5155576599249954E-8-8.323245110068806E-9i -4.031091908079844E-8-2.1735394786430707E-9i 1.051978462046748E-6-2.0959813009588796E-7i 1.5583856973452125E-4 -1.68364718903446E-4 -5.4112018688394575E-6 4.9742201503362965E-8-1.2194072914555474E-8i -5.9496605358794994E-8-4.3489834071271175E-9i 1.1447938199055548E-6-2.3039200644912634E-7i 1.514308464609E-4 -1.6720050980426982E-4 -3.471540530000518E-6 3.4109553859049855E-8-9.042812999054731E-9i -4.470046739612414E-8-3.2463855342281748E-9i 1.2030623854039396E-6-2.359175895557162E-7i 1.2445421770890637E-4 -1.6285393554013605E-4 0 2.355274225217946E-9-2.246806906323895E-9i -1.321939856588986E-9+5.552360395384935E-9i 1.5611384958155993E-6-2.9233157265995043E-7i 1.302828162630256E-4 -1.6177336789876992E-4 0 2.3867989625090543E-9-2.304230171381802E-9i -3.420036793436859E-9+4.6749716125192575E-9i 1.5175695469596751E-6-2.684104711828777E-7i 1.2730557955280026E-4 -1.614858412375377E-4 0 2.305200443641775E-9-2.4056208504867016E-9i -3.419295176809642E-9+4.872018297561032E-9i 1.5601520647214094E-6-2.7507495219441614E-7i 1.2590767652845977E-4 -1.6263716488974003E-4 -4.390460804158399E-6 5.27856084198195E-8-1.6099251483568696E-8i -9.00775290562068E-8-1.3298007997226445E-8i 1.5267217164298541E-6-2.9538283825442986E-7i 1.4329051075621132E-4 -1.6506185212862708E-4 0 2.0723227370414723E-9-2.1180410366844946E-9i -2.4467119738757486E-9+4.081719046703941E-9i 1.3170366221688894E-6-2.470633944688879E-7i 1.415933569907922E-4 -1.6261369424089495E-4 -4.059851326998661E-6 4.41834265035748E-8-1.1901662885985034E-8i -7.881178219622198E-8-1.4091975795520433E-8i 1.3603924542873257E-6-2.481175783084103E-7i 1.3758993130654097E-4 -1.635920586867667E-4 -4.2717718403084215E-6 4.7220386550002804E-8-1.3123680190667847E-8i -7.718227959875727E-8-1.1486376980530781E-8i 1.3855518108331446E-6-2.619793288366232E-7i 1.355389794173508E-4 -1.634322329706297E-4 0 2.3014033558278863E-9-2.0814092939064797E-9i -2.3146170504972194E-9+4.603105780404415E-9i 1.4267670063626578E-6-2.6067199936860207E-7i 1.4129093582903647E-4 -1.664880808086297E-4 -4.843236766234806E-6 5.0498647249365214E-8-1.3722109620455107E-8i -6.777958384320984E-8-5.990951106957603E-9i 1.3044874726576244E-6-2.5960179259108644E-7i 1.387412176310955E-4 -1.6524132762387478E-4 0 2.1004846603809442E-9-2.2605983726435574E-9i -1.9820713566525566E-9+4.44113585964254E-9i 1.360691479951109E-6-2.589547394098689E-7i 1.3246360264692662E-4 -1.6378667891900147E-4 0 2.6344822769103522E-9-2.0414755480227225E-9i -3.871950561292686E-9+3.884521994577487E-9i 1.4526969446762347E-6-2.711050844098577E-7i 1.334605643210421E-4 -1.6425749049935227E-4 -4.708315340017485E-6 5.277182089242756E-8-1.51696127...
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This document was uploaded on 01/24/2014.

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