H_75nm_L1_65um_D_10um

5902852491143217e 6 16119157996082474e 4

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Unformatted text preview: 7i 3.904287180223205E-6-1.033563166782359E-6i -1.9980377481120535E-4 -1.4259351806035703E-4 2.696748597834933E-5 7.846872601653546E-6-2.213623734904132E-6i 1.529743321776996E-5-4.224017980846417E-6i 8.355417489504351E-6-2.314336018688401E-6i -1.8661234388181184E-4 -1.336669216654913E-4 1.857149836475602E-5 1.013751031351725E-5-2.987816079904879E-6i 2.4621127341770263E-5-7.020367536864318E-6i 7.601381855269815E-6-2.1491953324057734E-6i -2.1698310461779557E-4 -1.2780071170625357E-4 2.6748588600867423E-5 1.2482274676410345E-5-3.450875295559895E-6i 1.3391164875745212E-5-3.6891726093384107E-6i 1.0051473374892378E-5-2.7563985442761617E-6i -2.009436451039929E-4 -1.2330512648613817E-4 1.988297256248827E-5 1.6869664116248808E-5-4.8617554384474775E-6i 2.1847323599265425E-5-6.191386097011341E-6i 8.265148435342354E-6-2.340069713641651E-6i -1.8326389393662475E-4 -1.4431273527384863E-4 2.5364260939129387E-5 5.9641701617816506E-6-1.7257888388870404E-6i 1.9362886984185537E-5-5.429776308669369E-6i 8.126139556687299E-6-2.2362514291021284E-6i -1.622436023503276E-4 -1.7283633084023227E-4 3.695460864254914E-5 9.124853521822323E-7-2.447467820406747E-7i 9.618021277559787E-6-2.6501112912243564E-6i 6.7353023827915295E-6-1.800724365829414E-6i -1.5720887927458507E-4 -1.5099325063293214E-4 3.567866367453282E-5 1.1095539310278634E-6-2.936939177391208E-7i 1.7724476070012254E-5-4.958241823125148E-6i 5.8606527083271695E-6-1.5285360225857793E-6i -1.3501122545865789E-4 -1.6907387525963175E-4 5.76501427858628E-5 -9.47078793610838E-7+2.8727107704452005E-7i 1.025817979004818E-5-2.800281846046829E-6i 3.1653653478475805E-6-8.093544585198207E-7i -1.4701329381509848E-4 -2.2265727650392405E-4 6.913990966202584E-5 -3.3381672669342953E-8+1.696860437247867E-8i 3.5888371595671077E-6-9.650303615058034E-7i 2.296347812039427E-6-6.021558187170461E-7i -1.079719190949011E-4 -1.9255139454254382E-4 6.156874733523445E-5 -1.2786166428767625E-6+3.641547841018889E-7i 5.473416669771106E-6-1.4693526929685839E-6i 3.0298283070635614E-6-7.931725793554097E-7i -6.958028109617864E-5 -2.021973818919441E-4 1.1410431496904263E-4 -1.4223207566244804E-6+3.905153507878907E-7i 3.5290366666520975E-6-9.25753736967304E-7i 5.013064388996611E-7-1.2626817843905557E-7i -1.103139227509426E-4 1.1213483754606897E-4 2.2095836199993072E-5 -1.9001060366243725E-5+5.750975969854098E-6i -3.238209007293425E-5+9.217353952602533E-6i 2.168282109327989E-6-2.9630282835661793E-7i -1.2802106742824194E-4 1.096755168244411E-4 2.1162138960250674E-5 -1.2450357832494183E-5+3.932401729446948E-6i -4.1413945632037496E-5+1.1980217804345977E-5i -3.980492210110075E-6+1.84027295067679E-6i -1.224212181472015E-4 1.2472223689592504E-4 1.952712487400222E-5 -1.0626619794855372E-5+3.3060269923823997E-6i -3.1891458792889E-5+9.222515356290606E-6i 3.3912474062015155E-6-7.41658619721394E-7i -7.977224390123023E-5 1.1070996156354019E-4 4.278665562869179E-5 -1.466993817501585E-5+4.113872235607497E-6i -1.711426141469337E-5+4.535935005590572E-6i 5.8665556513436786E-6-1.4902326237635...
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This document was uploaded on 01/24/2014.

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