H_75nm_L1_65um_D_10um

5958952416091206e 12i 0 7538820209064889e 4

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Unformatted text preview: 2i -3.7743133443430255E-12+9.79104272864296E-13i 1.8834707643847753E-11-3.588514735844068E-12i -7.67697933984991E-4 2.4275046816499578E-4 1.3254468062073003E-4 4.249065664925009E-19+1.9243640649325846E-20i -1.7029831411896478E-19+3.040962921593581E-20i 1.7316058185049408E-18+3.22225480041432E-20i -7.070668959038222E-4 1.7179743692809205E-4 1.7333795136054698E-4 1.2947737724784066E-7-3.382315250066453E-8i -3.739567688088096E-8+9.840655204875885E-9i 1.0263856442024721E-7-2.6223174121161E-8i -7.19922657647528E-4 1.74921026690421E-4 1.7648955047619324E-4 1.2692865011093293E-8-3.297170988911663E-9i -3.3209719507562054E-9+8.752509566711692E-10i 1.1993916131981346E-8-3.0020304120685217E-9i -7.074365954691935E-4 1.1975353306715145E-4 2.1141559712776835E-4 1.5799563108100255E-7-4.122420518008177E-8i -3.136905713865728E-8+8.240722628225436E-9i 8.392675278411438E-8-2.1319875424353387E-8i -7.202990790231789E-4 1.2193087003200872E-4 2.1525951707554596E-4 1.5603859162066923E-8-4.049035961509717E-9i -2.871982629274633E-9+7.552954945770965E-10i 1.0341334160803766E-8-2.569654079401718E-9i -7.032416361588508E-4 6.137448225493133E-5 2.473628389644681E-4 1.8126095774594372E-7-4.725271762009738E-8i -1.8796934198818344E-8+4.930412654749718E-9i 6.243128926843082E-8-1.570405785515891E-8i -7.160278477253754E-4 6.249038193229373E-5 2.518603451274584E-4 1.8251515777147555E-8-4.732081587105761E-9i -1.7056651906498034E-9+4.480946836349975E-10i 8.472698690756936E-9-2.0818902388923195E-9i -6.910622789872927E-4 0 2.8624624091300524E-4 2.003533092457062E-7-5.218338143497047E-8i -6.035175633612903E-11+1.5536529042348773E-11i 3.6538228827470555E-8-8.953798005345412E-9i -7.036270476961527E-4 0 2.91450718020514E-4 2.0516952773929152E-8-5.314260614064259E-9i 4.4680919145850226E-11-1.1512154622317479E-11i 6.270592793642389E-9-1.5093017235272418E-9i -7.288140592919E-4 6.360628160965611E-5 2.5635785129044864E-4 2.6061268707720605E-9-6.695092011645501E-10i -2.4006021851564207E-10+6.299228756316277E-11i 1.4529781329487562E-9-3.450472567981997E-10i -7.161918164050124E-4 0 2.9665519512802306E-4 2.943567829465574E-9-7.553368904738625E-10i 3.5086490907890917E-12-8.908426219129041E-13i 1.1332846171002135E-9-2.623043324427674E-10i -7.584899428786457E-4 1.8429179597740785E-4 1.8594434782313204E-4 1.6784744320747956E-11-4.040368002332507E-12i -4.257850623574695E-12+1.1015412939110588E-12i 1.6678648808867657E-11-3.0659687508412554E-12i -7.713457046223518E-4 1.8741538573973678E-4 1.8909594693877828E-4 5.017527841767254E-19+2.7122973857142576E-20i -1.3135512009334074E-19+3.4063871712164436E-20i 1.779864230858491E-18+4.9631684328477797E-20i -7.416002708584245E-4 6.47221812870185E-5 2.6085535745343897E-4 3.5297123308377774E-10-8.924122242247505E-11i -3.19205624795141E-11+8.373343518497765E-12i 2.0637417985922458E-10-4.537501737321752E-11i -7.54386482424949E-4 6.58380809643809E-5 2.653528636164292E-4 2.4291428166757907E-11-5.869536354318207E-12i -2.18906418524484E-12+5.688886641345887E-13i 1.2120013641264166E-11-1.8582...
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This document was uploaded on 01/24/2014.

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