H_75nm_L1_65um_D_10um

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Unformatted text preview: 98216292E-7i 6.746986127905806E-5 -1.0391278498133619E-4 -2.260852272381537E-6 6.728125230747474E-8-5.365059031036077E-8i -6.734794488380123E-8+1.7530833439671228E-8i 3.8560800328781815E-6-8.540479910995949E-7i 6.683623092151645E-5 -1.0692511359574315E-4 -3.5035088154373023E-6 1.0833163085836559E-7-7.230886684806271E-8i -1.0158352137181088E-7+2.4206434994410057E-8i 3.779350991392963E-6-8.527063700539662E-7i 9.337040115436676E-5 -3.0916322160354546E-5 -6.512103190481558E-6 1.1289302726819014E-7-2.062154536627584E-7i 7.295668523722062E-8+6.548189004172181E-8i 3.4748458892134198E-6-1.0479057496196706E-6i 1.030984141451721E-4 -3.221398358083104E-5 -8.872409083809949E-6 2.41408420448181E-7-1.668555425830553E-7i 9.675008143159365E-8+7.581016851771058E-8i 2.926225011448994E-6-9.308043104911034E-7i 9.742272219701102E-5 -3.8001344720914355E-5 -7.4657863754331845E-6 1.3354726903354697E-7-1.954370385133027E-7i 4.3268288315395755E-8+5.8946254251010755E-8i 3.1388571892956574E-6-9.953811836742156E-7i 6.83688870859405E-5 -5.358120700184397E-5 0 1.6078945818016888E-8-9.38708905550388E-9i -4.504840779823743E-9+3.7228969216121928E-9i 5.27619931465864E-6-1.1524772436824982E-6i 6.964898166466712E-5 -5.6953617067835016E-5 -2.6029112893639805E-6 1.288183091067461E-7-1.0243003645787055E-7i -7.21709599020003E-8+2.06803030766073E-8i 5.091972398771345E-6-1.0994450981533156E-6i 7.181539393410061E-5 -5.064972887492972E-5 -2.7173363616318128E-6 8.50850946019834E-8-1.3762461141979965E-7i -6.504395217163054E-8+1.9915661627136483E-8i 5.137302087765962E-6-1.0727877632620647E-6i 6.905159033259803E-5 -5.0777030764451105E-5 0 6.828545428758104E-9-1.3395925825901433E-8i -4.0678449016780945E-9+3.140328656749819E-9i 5.304954087187105E-6-1.1513975887308785E-6i 6.908421327233885E-5 -5.078906050975059E-5 -2.222394418298791E-6 1.3163815299314168E-7-8.991553718186614E-8i -6.067583131575103E-8+1.802760319593743E-8i 5.289516641322632E-6-1.1565828791405235E-6i 6.8066048528667E-5 -4.80688450639589E-5 0 7.872279720677958E-9-1.2535789672294429E-8i -3.0986246237421863E-9+3.375659328741972E-9i 5.438541224730605E-6-1.2025350076240462E-6i 7.031775417733484E-5 -4.7258886099051305E-5 -2.256975615826019E-6 1.1742496489274128E-7-1.0233992634205537E-7i -5.598189238358442E-8+1.7516054648517482E-8i 5.306867738110071E-6-1.1382854134327761E-6i 6.968629487257576E-5 -4.4292226820804064E-5 -2.2304792686730365E-6 1.3574156091704948E-7-9.656558403326864E-8i -5.485471100437475E-8+1.710128691447147E-8i 5.410890939566132E-6-1.1798140010430625E-6i 6.82064194567713E-5 -4.3091946137979254E-5 0 8.829995037813268E-9-1.2089514173317198E-8i -2.8156225302666815E-9+3.1615147291196486E-9i 5.556461560784211E-6-1.2307062614203442E-6i 6.890678662350474E-5 -4.565814361679173E-5 0 4.9217912273367085E-9-1.3873671347219162E-8i -2.677040019870875E-9+3.1975247407762817E-9i 5.447702078542921E-6-1.1891415988968977E-6i 6.738739124319245E-5 -4.080290147978438E-5 -3.543733936244993E-6 2.8351452907593184E-7-1.2811583231303848E-7i -8.9508164708955...
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This document was uploaded on 01/24/2014.

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