H_75nm_L1_65um_D_10um

687369007475027e 5 7500000000000001e 8

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Unformatted text preview: i 4.28841791581205E-5-1.0824740665367361E-5i -2.598014070906719E-4 -2.113069354455015E-5 1.3429124644538732E-5 2.1660719085698273E-5-5.40920652760964E-6i 5.011146696061726E-6-1.1756995855234533E-6i 3.8442733930702564E-5-9.721577946880787E-6i -2.3868535498345123E-4 -2.2789155600888028E-5 0 -7.162112646575353E-7+1.3799100650603151E-7i -2.145355846218062E-7+4.062904167977151E-8i 1.3785518697019395E-4-3.418033940637743E-5i -2.4114946564600216E-4 -2.7206124150469493E-5 1.045860144954294E-5 5.3104895658872276E-5-1.324290752173337E-5i 1.849449668890567E-5-4.286865889486192E-6i 7.817748894798088E-5-1.9703276209318944E-5i -2.476705606198526E-4 -2.3483763441272963E-5 5.568981351814105E-6 2.119317870479977E-5-5.25999881512157E-6i 6.482227697901713E-6-1.506739985563595E-6i 7.311541257251029E-5-1.8316909720622308E-5i -2.3392812383301145E-4 -1.9241629200854526E-5 7.4222687066952445E-6 1.0565677554670939E-4-2.5740465998155344E-5i 3.743724943120548E-5-8.570458828420942E-6i 1.53667314982918E-4-3.800247852501659E-5i -2.3998117636002904E-4 -1.5283447928764327E-5 6.855462080385968E-6 6.286541746422893E-5-1.5221872554476963E-5i 1.7785728763702142E-5-4.074792240232146E-6i 1.2173524526607978E-4-3.0044289059750866E-5i -2.4031182201456015E-4 -1.6461941633464863E-5 0 -2.7161907474233677E-6+6.001069021760957E-7i -6.893268313246861E-7+1.4962739726650823E-7i 1.3755667074227462E-4-3.384795733776896E-5i -2.3518820299790066E-4 -1.408156531672754E-5 2.8963905422811244E-6 5.818960192899942E-5-1.3956700793516697E-5i 1.854417213693139E-5-4.241588112614528E-6i 2.1073256085161563E-4-5.1339430095930094E-5i -2.43383915433988E-4 -3.264171938768064E-5 0 -6.628244307345608E-7+1.2997286081856824E-7i -1.4600905305176015E-7+2.489838597166982E-8i 8.40651686642845E-5-2.1224424685275908E-5i -2.513471383418402E-4 -2.898434264337171E-5 0 -2.900784292171263E-7+4.467790681080691E-8i -1.2012550920387915E-7+1.9743325382556853E-8i 6.0515384009175396E-5-1.5257498546747979E-5i -2.456479199019531E-4 -2.576154897810691E-5 0 -3.5669214710348784E-8-2.3842794621744174E-8i -5.2539633410679985E-8+4.3472626054530394E-9i 8.28688545175769E-5-2.0761903044480556E-5i -2.521305943646836E-4 -2.0572312371657897E-5 0 -2.4555182578560186E-7+3.4286300316045836E-8i 1.130962898747847E-7-3.370836766692233E-8i 6.472233843491035E-5-1.6198714211274902E-5i -2.572671453029906E-4 -1.6025747787537417E-5 7.338769468117542E-6 1.621576063059488E-5-4.0176525172991755E-6i 3.02745736293693E-6-7.056840933846288E-7i 5.0274048182787045E-5-1.2613484088742116E-5i -2.4435714129992874E-4 -1.986715061708661E-5 0 -1.1442108783530199E-6+2.3759405843850771E-7i -8.309854591296285E-7+1.8817230256251904E-7i 1.0013038079691165E-4-2.4855007741817236E-5i -2.2834753145267972E-4 -7.760533536564992E-6 0 -4.573272638309039E-5+1.055265802801797E-5i -1.8066073323186833E-5+4.153695765774966E-6i 8.580194275696686E-4-2.024707445633907E-4i -2.2958987273203577E-4 -2.9237046568275703E-6 0 -8.341689318767826E-6+1.8836702267143828E-6i 5.08774849768597E-7-1.1679192788808616E-7i 8.47...
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This document was uploaded on 01/24/2014.

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