H_75nm_L1_65um_D_10um

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Unformatted text preview: 7126208E-6 1.161946470420975E-7-2.9370579957008747E-8i 3.7300650821829867E-7+1.5993569902055898E-7i 2.3694931165836416E-6-6.944040144863355E-7i 1.2118471835102292E-4 -1.7463013309713634E-5 0 -3.5785253617362377E-9+2.638686570057811E-9i 4.7254810586631606E-7+1.949776134917281E-7i 2.4035034404872347E-6-7.499989881968958E-7i 1.2927147565324547E-4 -2.199556456168151E-5 0 1.768087015882874E-8+1.287598295343885E-8i 4.1770880404347444E-7+1.6282055026852454E-7i 2.0665981366822574E-6-7.086657573072386E-7i 1.2915234323250492E-4 -1.602569966226194E-5 -3.636294290268412E-6 1.1323947373660084E-7-2.0238964544248548E-8i 3.874764046517407E-7+1.6501651558697812E-7i 2.2594877048709307E-6-6.360803612563266E-7i 1.344069466621547E-4 -2.065449630733544E-5 -4.1677354708115415E-6 1.289839229680525E-7-1.475994704142915E-8i 3.4236903503850237E-7+1.4050889337071349E-7i 2.0148182811055067E-6-6.30733205848198E-7i 1.299255360460263E-4 -2.821939068132271E-5 0 1.7928163866712433E-8+1.4932216383233718E-8i 3.4217460541354904E-7+1.2588050858276902E-7i 1.938641449772348E-6-7.302703948642314E-7i 1.3402640040101465E-4 -2.659672242917968E-5 -4.001101999545744E-6 1.2581373190337207E-7-1.1757260132205835E-8i 2.9720823721756963E-7+1.1812388708228742E-7i 1.9147854228310555E-6-6.656699219551211E-7i 1.3518547122604306E-4 -3.398955489233868E-5 0 3.5695390822653336E-8+2.327019035832196E-8i 2.8432729855137964E-7+9.848622909626301E-8i 1.7397779806899653E-6-7.001758990229111E-7i 1.0378934666269214E-4 -1.549220726658243E-5 0 -6.629851254682379E-8-2.8683410784914513E-8i 4.4256054132669353E-7+1.9224930997670432E-7i 3.104427962377612E-6-9.326904609502931E-7i 1.0801413837330581E-4 -1.5725246561779853E-5 0 -4.6444908261142184E-8-1.8147640861526143E-8i 4.598842664525315E-7+1.974656343756779E-7i 2.9169377227875312E-6-8.805155009853011E-7i 1.0810009013901779E-4 -1.352617202279486E-5 -3.3695550387598763E-6 1.0184144643777885E-7-5.6377988068340444E-8i 3.711555827308613E-7+1.701178696006969E-7i 3.036264195771128E-6-8.210495335464287E-7i 1.153522930438492E-4 -1.4242444222632203E-5 -3.6792971789122683E-6 1.138194600644024E-7-4.37369587225222E-8i 3.822463287009148E-7+1.7124125248256368E-7i 2.740007360488329E-6-7.453867921130473E-7i 9.942418773480536E-5 -1.4164842520610809E-5 0 -8.32231393212697E-8-3.8158126079240134E-8i 4.2597194065241563E-7+1.8816439299644472E-7i 3.351119573454432E-6-9.79882185273414E-7i 8.628777265983669E-5 -6.315911595655131E-5 -2.9757684681519525E-6 -3.5467621667456776E-7-2.6566834969413393E-7i -4.837697474313244E-8+1.037650172651893E-8i 3.4817172616019155E-6-1.0233941627976397E-6i 8.738296347516857E-5 -6.330844922439226E-5 0 -5.708002646839193E-7-2.488137413702789E-7i 1.5394334435584641E-9-4.162771886513397E-9i 3.333618884299878E-6-1.054951170095213E-6i 8.75008067347828E-5 -5.897875001723807E-5 0 -5.63947423943938E-7-2.4700086498404745E-7i 1.1514920355317595E-8-1.8895684809006852E-10i 3.3926258304879984E-6-1.075042937191298E-6i 8.982594103094794E-5 -6.129680828511511E-5 -2.290083537268035E-6 -...
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This document was uploaded on 01/24/2014.

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