H_75nm_L1_65um_D_10um

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Unformatted text preview: 93599225496774E-6i 7.731498580095384E-6-2.0773393554967884E-6i -4.688001486336365E-5 2.448924006445784E-4 -1.0026093774095616E-6 1.7021226014628295E-8-3.29158047777524E-9i 3.181344864815911E-8-1.0828439808622667E-8i 2.5085366254877567E-6-6.601415086922509E-7i -1.6839043983974563E-4 1.973460232441692E-4 4.5173763784407725E-5 6.014659494589881E-7-1.5720410287721772E-7i -5.282012688628689E-6+1.4386540179514844E-6i 4.456500219008089E-6-1.1830183712368446E-6i -2.007035951590349E-4 1.9830073104890178E-4 2.636855189900002E-5 9.197048622237735E-7-2.4761838213707915E-7i -2.955405185010182E-6+8.033764311454484E-7i 5.481353093117557E-6-1.4637552464920022E-6i -2.2440254293679642E-4 1.979735784781342E-4 2.503186709806125E-5 9.801448812350574E-7-2.633901847830308E-7i -2.2018071346942156E-6+5.964137155020752E-7i 4.841782405954116E-6-1.2880295481156611E-6i 1.7305463999036792E-5 3.137562647679702E-4 -2.316152921610869E-4 3.354379290769666E-7-8.928962116464726E-8i 6.471942934313529E-7-1.6770726384013768E-7i 2.9747789519439635E-8-7.793396850083584E-9i 1.2388712263386359E-5 3.12833243699515E-4 -1.0714582204681752E-4 3.440858178666391E-7-9.2040274657483E-8i 6.798272841292343E-7-1.7717666632059562E-7i 6.104642414684307E-7-1.5877187970341112E-7i -4.3506476372777684E-5 2.848058714404784E-4 -1.6893272374821143E-4 4.2739933135892935E-7-1.1504260402846667E-7i 1.2043628774544188E-6-3.148204481178019E-7i 2.2710166069317045E-7-5.802626254896036E-8i -8.249235218275452E-6 2.5692500429617856E-4 -1.2839675979458743E-4 7.200840185701246E-7-1.9307581523079707E-7i 1.3394767107186755E-6-3.4884913770014626E-7i 5.818886121102633E-7-1.5067433519108175E-7i -1.6534113409893964E-4 2.3913920941949683E-4 3.945984978442935E-5 1.2810826305553878E-7-3.014543387524411E-8i -1.870918462201872E-6+5.046210645005909E-7i 2.9681729975685776E-6-7.875211806678463E-7i -9.000651541691353E-5 2.688682261636814E-4 2.965373909882253E-5 -1.8043101595785274E-7+5.1769068357614816E-8i -7.539262742575835E-7+1.994164575068755E-7i 2.1020336304058454E-6-5.551276482799158E-7i -1.0601276772932143E-4 2.3415147230377157E-4 1.8714058259627646E-5 -1.7823391695045995E-7+5.311251482182847E-8i -9.41299845972933E-7+2.5092460243623715E-7i 3.5517888878260397E-6-9.435732142942157E-7i -8.24033138827878E-5 3.1032715112482793E-4 -2.1122994428728146E-4 2.0567158816075121E-7-5.59107210832922E-8i 9.965064759335218E-7-2.6064762564322216E-7i 8.935694515008997E-9-1.1110297990775526E-9i -1.2866702709242419E-5 4.56079560584103E-5 2.2154973563432405E-5 -1.3825241180068135E-5+3.3921444450749847E-6i -1.3459085833429754E-5+3.1478660897806777E-6i 2.0463286693683456E-5-5.118299403339005E-6i -4.6332727221983624E-5 5.083320532625654E-5 2.0630193145888132E-5 -2.2844495307423436E-5+5.898624410778053E-6i -2.3878422550547348E-5+5.627823385122079E-6i 3.6364071074358936E-5-9.20685348003854E-6i -3.392930307578949E-5 2.694494979088965E-4 -4.902394084039307E-5 3.6759954413838954E-7-9.893649218851826E-8i 8.78315660506238E-7-2.322002986861447E-7i 1.5429665946299721...
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This document was uploaded on 01/24/2014.

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