H_75nm_L1_65um_D_10um

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Unformatted text preview: 10391507E-5 0 6.304165158081561E-8-6.642413805859414E-8i 3.9770640413514725E-8+3.261457828933208E-8i 3.670339035254598E-5-8.764100732325355E-6i 1.0325820918993258E-5 1.0635711317211581E-5 -1.1195715373503506E-6 2.376840883713669E-6-6.240060546324402E-7i 4.2542883325644316E-7-3.04777521840564E-8i 3.5336983432430056E-5-8.475685513341514E-6i 8.647544419093208E-6 1.0332573311788365E-5 0 6.782822895041775E-8-7.264100692763616E-8i 3.486532930997247E-8+1.1406515910047007E-8i 3.918711014562992E-5-9.353147416329916E-6i 7.740969142825199E-6 9.199289962415343E-6 0 7.77755348131658E-8-7.271233219580142E-8i 3.744732355225656E-8-3.43139353263384E-10i 4.219469624506745E-5-1.0064796397595793E-5i -2.068536009435197E-5 2.481685241074934E-6 0 -2.542546984751224E-5+5.5762649385139075E-6i 1.6695113494374027E-5-3.745051988432051E-6i -0.0032917366842921984+7.591990895765883E-4i -2.0265017933850504E-5 2.9933499099534477E-6 -1.2405949396544886E-6 9.021733033074363E-4-2.069066435876412E-4i 2.549708200464096E-4-5.90917794193582E-5i -0.0028588857428646325+6.613423397731437E-4i -2.084976221173881E-5 -1.2459815972804336E-6 0 -5.415595247759437E-5+1.1903514855294423E-5i -1.2763282516117108E-5+2.880238803286417E-6i -0.0029401725694360482+6.787616119873774E-4i -7.408530937834057E-6 3.7380437338150555E-6 0 1.9626693733925977E-6-5.303439156269538E-7i 4.1900630348156086E-7-8.377996425766687E-8i 2.3928010582181477E-4-5.6021200640193714E-5i -8.216449854211516E-6 4.077379745921689E-6 -7.015158847645201E-7 4.4392807548842336E-5-1.0395975004030486E-5i 3.684081413351213E-6-8.579936974489194E-7i 2.7652676688719353E-4-6.466285614484344E-5i -8.61921964377537E-6 4.350036677202424E-6 0 1.1044297712412721E-6-3.62554625295911E-7i 6.528503061128491E-7-1.1597964713500979E-7i 3.0659778060279733E-4-7.163170618562115E-5i -9.003284324324064E-6 4.765253120582689E-6 -7.568440596316287E-7 6.579226393048819E-5-1.533835606863627E-5i 3.4956802357348128E-6-8.42419072643715E-7i 3.241890989893543E-4-7.567827908635082E-5i -8.750762647585813E-6 5.256939744804629E-6 0 2.112565294652702E-6-6.305416423324494E-7i 5.986207004329835E-7-1.069590887733951E-7i 3.1199807143661646E-4-7.280936997943466E-5i -9.275051742079287E-6 5.9486917409393295E-6 0 1.4726455011363864E-6-6.051542232876628E-7i 9.592301235562355E-7-1.9954766432989102E-7i 3.617997789343729E-4-8.413571972832028E-5i -8.788458879356621E-6 5.978271801546343E-6 -9.139638372663854E-7 7.363387226628881E-5-1.70991652001295E-5i 9.824137035620674E-6-2.322641701573582E-6i 2.9234978385665956E-4-6.824438601385386E-5i -7.553692353370409E-6 5.014411710941831E-6 0 -4.105746302712678E-7+1.5124230608133324E-9i 6.04419371644585E-8+4.5459845480003147E-10i 2.4028232125701733E-4-5.6225478912931696E-5i -8.022688108019998E-6 6.198722779431775E-6 0 6.878124893139325E-7-2.818786030367448E-7i 8.508345193724937E-7-1.9114651568008431E-7i 2.5439353704939937E-4-5.945527476311774E-5i -8.932777462675295E-6 6.984330175214832E-6 0 -5.176252264346819E-6+9.16384070467092E-7i 8.029847101814295E-7-1....
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This document was uploaded on 01/24/2014.

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