H_75nm_L1_65um_D_10um

724573415544227e 5 4138978400201811e 5

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Unformatted text preview: 841969221424E-7i 9.557241001364435E-8-4.80006604674217E-8i 2.7561728713237277E-5-6.7407167143292256E-6i 1.845821916224292E-5 1.2725635665126234E-6 -1.6985876949187637E-6 1.8355002767897627E-6-5.143890711723991E-7i 4.144102167398427E-8-1.2311077068135787E-8i 2.4627456834618755E-5-6.146251939028217E-6i 1.7053589156775826E-5 1.1421126538094565E-6 -1.741594082364035E-6 2.110403613389492E-6-6.64080102101259E-7i 3.954826102901947E-8-2.479709312389858E-8i 2.6375765385188487E-5-6.520443028499376E-6i 1.6757866564645208E-5 -1.5578465773516318E-7 -1.6520989319297803E-6 2.040246496841626E-6-6.780457989014612E-7i -3.0226219839266154E-9+4.871379929595991E-9i 2.6817112910991027E-5-6.60236990441575E-6i 1.6506682092330823E-5 -1.5366798025107872E-6 -1.6566097533731678E-6 2.0941937417073977E-6-6.905582947018422E-7i -4.957019217368381E-8+4.220873622130301E-8i 2.7116421051720094E-5-6.6722934134881665E-6i 1.5506516619382453E-5 -8.360497002583159E-7 -2.068912570799254E-6 2.9717713552983153E-6-8.938987580524576E-7i -4.784192202694922E-8+3.070601103598592E-8i 2.8501277442620595E-5-6.904965986933713E-6i 1.5741678525458287E-5 -9.555449488149E-9 -2.045810286690437E-6 2.8744080763026195E-6-8.704303874725275E-7i 1.169871861324587E-9+6.986712159820805E-10i 2.8180241518757767E-5-6.840333548939894E-6i 9.346427358912396E-6 4.198345924574778E-6 -1.5848633759943172E-6 4.184544701262944E-6-1.0601248645767877E-6i 4.777990264825994E-7-1.3599835394011118E-7i 3.995532286560204E-5-9.542630541588206E-6i 9.215137382895408E-6 4.942978559268104E-6 -1.3800001402974388E-6 3.712840289577872E-6-9.615139076111882E-7i 4.942421659728658E-7-1.3951514994178563E-7i 4.014675811902537E-5-9.591438750134026E-6i 1.0138627278034606E-5 4.469238751466055E-6 -1.6242364434861884E-6 3.956542258744752E-6-1.0229131927092541E-6i 5.119010548653141E-7-1.605550371697878E-7i 3.800786906444521E-5-9.09311845983321E-6i 1.2421464390325973E-5 5.090490293054998E-6 -1.035301856210547E-6 1.9238061603950456E-6-6.218760542871428E-7i 2.6647812109967116E-7-2.0256984546930042E-7i 3.3479532063017094E-5-8.108069337732397E-6i 1.1231474607788696E-5 5.12775558415536E-6 -1.22527782203058E-6 2.6589118476487484E-6-7.577558710793707E-7i 4.5702503765003495E-7-2.005106075348466E-7i 3.5742712009371666E-5-8.603439218622088E-6i 1.1403299304206591E-5 4.456866635838973E-6 -1.3682194705625101E-6 2.9427910277374385E-6-8.068629668867491E-7i 4.4610664774575616E-7-1.8658719386181956E-7i 3.537867233897186E-5-8.474533575974505E-6i 1.088580729018184E-5 3.937632035446783E-6 -2.1540970293145067E-6 4.795598436225562E-6-1.2181308828435045E-6i 5.03009829179793E-7-1.540437148941573E-7i 3.627012497952285E-5-8.686867218269518E-6i 1.4010772222794686E-5 2.1135549790181704E-6 -2.3398628404803178E-6 3.889930292243461E-6-1.0612553952303366E-6i 1.9275985600843292E-7-8.209893806837623E-8i 3.0631808172411756E-5-7.363200367851483E-6i 1.258921709319257E-5 1.6456231644942828E-6 -1.8804880459475823E-6 3.6300502772903092E-6-9.547896428063388E-7i 1.5221213638148445E-7-5.959113782541295E-8i 3.32...
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This document was uploaded on 01/24/2014.

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