H_75nm_L1_65um_D_10um

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Unformatted text preview: 0199230207E-8i 4.830665965271999E-5-1.1526444560466115E-5i 6.143967811100575E-6 -1.2832080209592825E-5 -2.9132168653881143E-6 7.982448389443557E-6-1.907875725458303E-6i -2.7390893766730335E-6+6.322379085003706E-7i 4.2691625891986766E-5-1.021190352253536E-5i 1.468956686632843E-5 -1.5857922535080104E-5 -3.3421840702295218E-6 3.955590259397074E-6-9.58139912341058E-7i -1.2327177744397888E-6+2.68689146301084E-7i 2.6009530835344805E-5-6.279587920275188E-6i 1.2492256722688125E-5 -1.5070563610146734E-5 -2.591897872979905E-6 3.77295081023085E-6-9.157681949539516E-7i -1.1885787579857846E-6+2.5918069575175837E-7i 2.9300385212489627E-5-7.055733898486151E-6i -3.68865233029282E-5 -8.821165894315846E-6 0 -1.0307774639543391E-5+2.4323502643697203E-6i -0.0037659856383748954+8.789314021121543E-4i 9.083854209916254E-4-2.165615426790201E-4i 1.0734799185373135E-5 -1.6636344737600033E-5 0 1.0160784138777724E-7-4.4530787462592617E-8i -4.092458363554388E-8+5.174675148968133E-9i 3.140048148223603E-5-7.5531686619601666E-6i 1.2609156980774661E-5 -1.7844955661465284E-5 -2.3243571114901675E-6 3.0108837402676795E-6-7.327760502153066E-7i -1.1137248214217178E-6+2.515896130710462E-7i 2.791902507839469E-5-6.735769939895562E-6i 9.806066815264295E-6 -1.5938945522509374E-5 -1.9525060519791535E-6 3.4000587090501616E-6-8.264365412175409E-7i -1.2450273619509916E-6+2.818097709631036E-7i 3.309632462941024E-5-7.95542547024727E-6i 9.45649281265547E-6 -1.9116535728106934E-5 0 8.801566151923838E-8-4.037666693974628E-8i -5.96271161741854E-8+1.3772191485625458E-8i 3.1842018484974054E-5-7.66726063008932E-6i 7.93511406765041E-6 -1.7083210495209898E-5 0 3.3047179339405763E-8-3.0125171928633426E-8i -3.55218305575789E-8+7.523015641286898E-9i 3.5930337006244386E-5-8.626527475194396E-6i 7.678913194949347E-6 -1.5220163231054255E-5 -2.644155835108687E-6 5.654104707821466E-6-1.3581355510948845E-6i -2.1567048659541947E-6+4.963698510405404E-7i 3.731911461381283E-5-8.952206464936207E-6i -4.1280630645209805E-5 -7.580921203077383E-6 0 1.31604332181956E-7+2.7961421557772443E-8i -0.0037099620239013364+8.68077651390293E-4i -3.291026844302325E-4+7.881126667252936E-5i -3.9612766165060885E-5 -7.568390654175215E-6 0 -1.996592206343628E-7+9.284041246893082E-8i -0.003706461440848112+8.674343077840811E-4i -3.4919611311877874E-4+8.362588817546998E-5i -4.035065282552946E-5 -8.787755120450565E-6 0 1.1964630345564656E-5-2.710623014843102E-6i -0.0036684276104884473+8.557091136651955E-4i 9.464679788394915E-4-2.2528852125299528E-4i -4.035882205599971E-5 -7.916225950862289E-6 -8.942621304086577E-7 -1.3216285993310745E-6+3.2125865322835123E-7i -0.0028704718045463365+6.694106178367046E-4i -3.795419719108422E-5+8.900158268057567E-6i -3.862756175029437E-5 -8.785404509031717E-6 0 -2.3622631469960576E-6+6.089037863643565E-7i -0.003738226444876434+8.716429764947051E-4i 9.984529871845428E-4-2.3726075743919943E-4i -3.888175692058868E-5 -7.862904194919655E-6 -1.0019830571615545E-6 6.0611627537732195E-6-1.3558291993620574E-6i -0.0027879432...
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This document was uploaded on 01/24/2014.

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