H_75nm_L1_65um_D_10um

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Unformatted text preview: 7018662E-5i -2.2638426805506859E-4 9.556115506873823E-5 0 2.0428587973186917E-7-8.525577326889966E-8i 6.485217210749905E-8+1.644885111451444E-9i 7.939206917675356E-5-2.0844125693431082E-5i -2.2594538602859653E-4 9.625394347764128E-5 -1.0698253494855318E-6 -1.717153899020718E-5+4.230631108124994E-6i 2.0829378575885905E-6-5.432831748433675E-7i 7.724436983693738E-5-2.0385103326325817E-5i -2.2781387511163582E-4 9.67431491322359E-5 0 4.6015220390559913E-7-1.3985665531061897E-7i 4.620962045821797E-8+6.714352615566632E-9i 6.383727051449537E-5-1.6887501082444698E-5i -2.3053696992575765E-4 9.557989272906495E-5 0 3.3075854747602447E-7-1.0442264170567918E-7i -2.6070420724999545E-9+1.8421845552479832E-8i 5.1070200375825006E-5-1.3608125829619645E-5i -2.2792157090663532E-4 9.484273226021882E-5 0 1.054496769224854E-7-5.6098463855332026E-8i 1.9446626899066732E-8+1.3397910647429246E-8i 6.529605936215811E-5-1.730247277659112E-5i -2.2797946142166241E-4 9.596970184542134E-5 -1.9047922747785837E-6 -1.1523401587625223E-5+2.9453881557767353E-6i 2.464506192213084E-6-6.518865230245585E-7i 5.9432326858743084E-5-1.582282853047484E-5i -2.2310742331043836E-4 1.0407567260546536E-4 0 -5.8320543416237184E-5+1.405837735083334E-5i 2.838569930840385E-6-7.347604471675401E-7i 5.863807774880285E-5-1.6460937237554844E-5i -2.2684047703096366E-4 1.0064240397952391E-4 0 2.191405146699868E-6-5.40342184098333E-7i -2.5569643252384977E-7+7.559810928613187E-8i 6.408005004792294E-5-1.6886687055928894E-5i -2.2499999999999997E-4 9.982715461218307E-5 0 -3.349684840095502E-5+7.643686404494173E-6i 1.9916869844482932E-7-3.453723227409E-8i 1.0709395628252498E-4-2.7581017607888372E-5i -2.26621370162014E-4 9.856047653722082E-5 0 2.3516799251388497E-6-5.815885384105602E-7i 9.163423469876752E-8-2.0876121144264292E-9i 6.998385619720317E-5-1.8418599978178256E-5i -2.2552763389925112E-4 9.980407307313689E-5 -9.747231821625073E-7 -2.0251234412290183E-5+4.901960627571373E-6i 1.8996900308295799E-6-4.977034463819289E-7i 7.667109675879425E-5-2.0140800899721824E-5i -2.25E-4 1.0155697964669942E-4 0 -2.637963344259878E-5+5.962020633074041E-6i 3.447087523032975E-7-7.12130452928487E-8i 1.031118666267386E-4-2.6427606799093255E-5i -2.25E-4 9.809732957766673E-5 0 -3.224632009256919E-5+7.390028226278576E-6i 3.7332421362511306E-7-7.860956173933592E-8i 1.1246961991249448E-4-2.8950611230702146E-5i -2.257893987448039E-4 9.808150688500758E-5 -1.2405508524568125E-6 -1.9792591311016417E-5+4.870138427875476E-6i 2.1316904689073413E-6-5.666196300942172E-7i 7.34873578487373E-5-1.9425426171107872E-5i -2.3591897052985627E-4 1.1911975319974369E-4 0 -1.1896443179268208E-7+1.8304064691639334E-8i 5.091287748548243E-8+6.225057694095642E-10i 2.4315577886932995E-5-6.454206232536459E-6i -2.3527604559077408E-4 1.1324875379285145E-4 0 7.714246610807107E-8-3.1906753490684724E-8i -2.399698058932568E-8+2.1402122614884908E-8i 2.8010636362029492E-5-7.447998909578903E-6i -2.2363955596246718E-4 1.0239743098764418E-4 0 -6.0668079523540364E-5+1.4495518452511453E-5i 2.0393...
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This document was uploaded on 01/24/2014.

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