H_75nm_L1_65um_D_10um

7532255250137e 5 15380948611615238e 4 0

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Unformatted text preview: 4065E-6 9.896546534512773E-7-3.3601495495576283E-7i 3.647907669232583E-5-1.0361428245893943E-5i 1.5965423908364798E-5-4.9420880214375765E-6i -1.4872815242616247E-4 1.4327811106036372E-4 0 2.3836682329298933E-7-9.552545842914148E-8i 4.120192910606545E-5-1.1732238177043267E-5i 1.6347534287466077E-5-5.382824877583446E-6i -1.5680201002288982E-4 1.4829284113134547E-4 -1.7287029697857456E-6 -8.357845244939358E-7+2.5270325933993316E-7i 3.731295792203307E-5-1.0105622087392142E-5i 2.3661949522442063E-5-7.213250733329191E-6i -1.5976211040108918E-4 1.480990047967279E-4 -1.7301125378801916E-6 -1.2369342853051861E-6+3.7736206810155827E-7i 3.694285667533007E-5-1.0016014723358748E-5i 2.31193172251507E-5-7.0670799098414065E-6i -1.547241801887604E-4 1.466364652703934E-4 -1.8339852061446513E-6 -7.011447952477346E-7+2.09040183272751E-7i 3.7925902834903043E-5-1.0462413238879385E-5i 2.0859640889423516E-5-6.471355351158591E-6i -1.5869248417698298E-4 1.4674027714677688E-4 0 -1.19921929029792E-6+3.669529332304966E-7i 4.040544678326021E-5-1.1101434460584892E-5i 2.0919279781471663E-5-6.6873909220722295E-6i -1.571201815898075E-4 1.4494606321686267E-4 0 -1.2036115178955582E-6+3.6516394144647707E-7i 4.0704582865696756E-5-1.1402783190017524E-5i 1.8318259302655617E-5-5.968428940692696E-6i -1.4870566642130424E-4 1.4540050417106613E-4 -3.2839113214011856E-6 1.7806964416078476E-7-7.413307723612728E-8i 3.646818367954698E-5-1.019507854458634E-5i 1.8769982229739925E-5-5.776682461044463E-6i -1.4808468393670224E-4 1.3992710163693599E-4 0 4.48645507001554E-7-1.753879690442575E-7i 4.160257161826445E-5-1.2155421232708627E-5i 1.290234164773283E-5-4.316098550206116E-6i -1.5254046663348906E-4 1.4466691683176058E-4 -2.218966218194597E-6 -4.804121666582344E-7+1.345308021178369E-7i 3.8143442244276536E-5-1.0722876099689486E-5i 1.8013703704028353E-5-5.659216846965777E-6i -1.5248923068950318E-4 1.433104143635581E-4 0 -5.099868553043451E-7+1.4181179408545574E-7i 4.107464290943087E-5-1.1703847436414244E-5i 1.6334114635382794E-5-5.379003324549594E-6i -1.5487206993955422E-4 1.447846772998477E-4 0 -8.705734302705554E-7+2.5799705008004117E-7i 4.0832759326817445E-5-1.147075035890302E-5i 1.8186110425445204E-5-5.918624512294733E-6i -2.499484227498575E-4 1.7140440227984377E-4 -1.1382975968798075E-5 -9.061136463854667E-7+2.431192052951221E-7i 1.197174992250865E-6-3.111395155383711E-7i 6.530501185621634E-6-1.7350415877244962E-6i -2.567139146068437E-4 1.7464384255010183E-4 0 1.760290667932737E-9+3.152707957543063E-11i -7.093552552557886E-9+9.919717257680927E-9i 5.917217187262051E-6-1.569392246676436E-6i -2.4628160488490995E-4 1.817275999383555E-4 -2.2242789531564216E-5 -1.2881688741586844E-6+3.4818941599151225E-7i 1.9458101177822407E-6-5.138902999505354E-7i 5.331573294874138E-6-1.417359104521467E-6i -2.605818076436281E-4 1.7825861219835862E-4 -1.4649040413646198E-5 -8.430073822452382E-7+2.2680254942332835E-7i 1.1019854515290285E-6-2.873344105250883E-7i 5.17071734150941E-6-1.3708218391568455E-6i -3.0E-4 1.9999999999999998E-4 0 4.46443742...
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This document was uploaded on 01/24/2014.

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