H_75nm_L1_65um_D_10um

773764577681148e 5 1645694035290944e 5

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Unformatted text preview: 8066744576E-6+5.6211453369294E-9i 1.7423147642500866E-4 -1.528602970982336E-4 -1.4005856810100865E-6 2.5786704223955948E-8+2.1123624238706415E-9i -3.069299032720224E-7-1.383773403335475E-7i 1.1763990202271153E-6-1.5852285923453468E-7i 1.5865170072420812E-4 -1.5263845216139673E-4 -1.8926842705949418E-6 2.957568722115811E-8-6.659626022920387E-10i -3.3664032825102785E-7-1.481144545576239E-7i 1.3156118840891912E-6-1.9116631727697942E-7i 1.8280571222360255E-4 -1.5385733253433573E-4 0 9.299127446113971E-9+2.5656073522775154E-9i -3.5317336958502244E-7-1.6888286753525773E-7i 1.178823212224172E-6-1.068310985501514E-7i 1.8380611220034023E-4 -1.5316604400760557E-4 -1.947565981414352E-6 3.094749993410285E-8+2.3737496294172597E-9i -2.3930449106577647E-7-1.0602793465554126E-7i 1.0815883544575833E-6-1.4774204608585667E-7i 1.8119824577557116E-4 -1.532652618019896E-4 0 1.0584191816845282E-8+3.051496475276372E-9i -3.6322016466055134E-7-1.7233576151598216E-7i 1.1467109418669994E-6-1.335828020565982E-7i 1.7977513354738492E-4 -1.532057895763559E-4 -1.589310034433878E-6 2.7979644163244543E-8+2.57709332093387E-9i -2.6830899884178417E-7-1.2050051108200105E-7i 1.1298890343412937E-6-1.4711511979065487E-7i 1.8279874372033463E-4 -1.5465110846808494E-4 -1.130555788242688E-6 1.6741555799857178E-8-2.2800750809024448E-10i -2.0169161907583263E-7-9.230293777731335E-8i 1.186979986960343E-6-9.626821631411062E-8i 1.7923580629175705E-4 -1.5321168372959076E-4 0 9.507953369350796E-9+2.607958838572229E-9i -3.8440437288877924E-7-1.8144659007498065E-7i 1.1641577671882893E-6-1.3664817770984937E-7i 1.7765813352896357E-4 -1.5366683395721711E-4 0 6.172235543610496E-9+1.1139047531583124E-9i -3.9781969619963964E-7-1.8939019107305713E-7i 1.2378488912291462E-6-1.0903766717180595E-7i 1.7847066013680586E-4 -1.5428046601999017E-4 -1.4870442402233515E-6 2.2574124654563504E-8+4.876230698454167E-10i -2.2562161641128073E-7-1.0108842938786743E-7i 1.1927955215864763E-6-1.1959601288944984E-7i 1.8793283214425544E-4 -1.538625378164348E-4 0 6.949339619369954E-9+1.4691493591017204E-9i -3.2093710450653056E-7-1.5467968980411542E-7i 1.130463242331703E-6-1.0221551483335205E-7i 1.889691167092712E-4 -1.5384392274609874E-4 -1.4371774388018904E-6 2.435397513715433E-8+2.490660950052459E-9i -2.148386472419227E-7-9.74037264528085E-8i 1.0659776257022986E-6-1.2555282093117746E-7i 1.8739729240910377E-4 -1.5328888434937396E-4 -1.7436479659596502E-6 2.9038713191687302E-8+2.8980498883520458E-9i -2.2729213668751903E-7-1.0169827457142436E-7i 1.0556044307146344E-6-1.4079403632846821E-7i 1.8620184882711712E-4 -1.5331092324777606E-4 0 1.2087684984896097E-8+3.923533703082312E-9i -3.4410960242217643E-7-1.6369519109943472E-7i 1.090677293635174E-6-1.326727657133615E-7i 1.8647130636294354E-4 -1.5468377332328336E-4 -1.1695462286528407E-6 1.7028604031195382E-8+2.0331992313729618E-10i -1.8255816823589676E-7-8.261521341583478E-8i 1.145420712272624E-6-9.608644806202715E-8i 1.8440218282120342E-4 -1.5324950318589334E-4 0 9.243162553855428E-9+2.56105...
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This document was uploaded on 01/24/2014.

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